semi合集-English.pdf - 第1284页

SEMI E5-1104 © SEMI 1982, 2004 226 Stream,Function Name (Mnemonic) Direction S16,F3 Process Job Create Request (PRJCR) M,H->E, reply Description The purpose of this message is to request ma ter ial to be processed on …

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SEMI E5-1104 © SEMI 1982, 2004 225
Stream,Function Name (Mnemonic) Direction
S16,F0 Abort Transaction (S16F0) S,H<->E
Description
Same form as S1F0
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S16,F1 Multi-block Process Job Data Inquire (PRJI) S,H->E,reply
Description
If any of Processing Management messages are larger than one block, then this transaction must precede that message.
Structure
L,2
1. <DATAID>
2. <DATALENGTH>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F2 Multi-block Process Job Data Grant (PRJG) S,H<-E
Description
Message to indicate if permission is granted to transmit a multi-block Job Data message.
Structure
<GRANT>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 226
Stream,Function Name (Mnemonic) Direction
S16,F3 Process Job Create Request (PRJCR) M,H->E,reply
Description
The purpose of this message is to request material to be processed on a Process Module.
Structure
L,5
1. <DATAID>
2. <MF>
3. L,n
1. <MID
1
>
.
.
n. <MID
n
>
4. L,3
1. <PRRECIPEMETHOD>
2. <RCPSPEC>
3. L,m (m = {c,2})
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
5. <PRPROCESSSTART>
Exception
For the m length list m = 0 may be allowed value depending on the value of PRRECIPEMETHOD.
Stream,Function Name (Mnemonic) Direction
S16,F4 Process Job Create Acknowledge (PRJCA) S,H<-E
Description
Acknowledge or report error in the creation of a Process Job.
Structure
L,2
1. <PRJOBID>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
This list may be zero length, generally the case when ACKA indicates success. When ACKA indicates a create failure, the
equipment may supply one or more ERRCODEs.
SEMI E5-1104 © SEMI 1982, 2004 227
Stream,Function Name (Mnemonic) Direction
S16,F5 Process Job Command Request (PRJCMDR) M,H->E,reply
Description
Send a job control command to a processing job.
Structure
L,4
1. <DATAID>
2. <PRJOBID>
3. <PRCMDNAME>
4. L,n
1. L,2
1. <CPNAME
1
>
2. <CPVAL
1
>
.
.
n. L,2
1. <CPNAME
n
>
2. <CPVAL
n
>
Exception
The CPNAME, CPVAL pairs are command parameter identifiers and values; n = 0 is valid for some commands
(PRCMDNAME).
Stream,Function Name (Mnemonic) Direction
S16,F6 Process Job Command Acknowledge (PRJCMDA) S,H<-E
Description
The processing service sends its confirmation for receipt of a command request.
Structure
L,2
1. <PRJOBID>
2. L,2
1. <ACKA>
2. L,n (n = {0,n})
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
This list n may be zero length.