semi合集-English.pdf - 第1293页

SEMI E5-1104 © SEMI 1982, 2004 235 Stream,Function Name (Mnemonic) Direction S16,F18 PRJobDequeue Acknowledge S,H<-E Description Acknowledge the request to de-queue and report any errors. ERR TEXT will contain th e id…

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SEMI E5-1104 © SEMI 1982, 2004 234
Stream,Function Name (Mnemonic) Direction
S16,F16 PRJobMultiCreate Acknowledge S,H<-E
Description
This message acknowledges the request and reports any errors in the creation of a process job. ERRTEXT contains the identifier
of process jobs that were not created.
Structure
L,2
1. L,m [m = # jobs created]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F17 PRJobDequeue S,H->E,reply
Description
Used to remove process jobs from the equipment for jobs that have not begun processing.
Structure
L,m [m = # jobs to remove]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
Exception
If m = 0, then de-queue all.
SEMI E5-1104 © SEMI 1982, 2004 235
Stream,Function Name (Mnemonic) Direction
S16,F18 PRJobDequeue Acknowledge S,H<-E
Description
Acknowledge the request to de-queue and report any errors. ERRTEXT will contain the identifier of any jobs that were not de-
queued.
Structure
L,2
1. L,m [m = # jobs removed]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F19 PRGetAllJobs S,H->E
Description
Requests the equipment to return a list of process jobs which have not completed. They may be running or waiting to run.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F20 PRGetAllJobs Send S,H<-E
Description
Returns the requested list of process jobs.
Structure
L,m [m = # jobs in the list]
1. L,2
1. <PRJOBID
1
>
2. <PRSTATE
1
>
.
.
m. L,2
1. <PRJOBID
m
>
2. <PRSTATE
m
>
Exception
If m = 0, then no process jobs are running or waiting to run.
SEMI E5-1104 © SEMI 1982, 2004 236
Stream,Function Name (Mnemonic) Direction
S16,F21 PRGetSpace S,H->E
Description
Requests the equipment to return the number of process jobs it has space to create.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F22 PRGetSpace Send S,H<-E
Description
Sends the host the number of process jobs which can be created.
Structure
<PRJOBSPACE>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F23 PRJobSetRecipeVariable S,H->E
Description
Reset the value of recipe variable parameters for a specific process job.
Structure
L,2
1. <PRJOBID>
2. L,m [m = # recipe variables]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
Exception
None