semi合集-English.pdf - 第1296页

SEMI E5-1104 © SEMI 1982, 2004 238 Stream,Function Name (Mnemonic) Direction S16,F26 PRJobSetStartMethod Acknowledge S,H<-E Description Acknowledges request to set job st art method and indicates an y er rors. ERRTEXT…

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SEMI E5-1104 © SEMI 1982, 2004 237
Stream,Function Name (Mnemonic) Direction
S16,F24 PRJobSetRecipeVariable Acknowledge S,H<-E
Description
Indicate the status of the request to set recipe variables. ERRTEXT will contain the RCPPARNM value for parameters that
could not be reset.
Structure
L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F25 PRJobSetStartMethod S,H->E
Description
Used to request to change the start method (USERSTART or AUTO) for one or more process jobs.
Structure
L,2
1. L,m [m = # of jobs]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. <PRPROCESSSTART>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 238
Stream,Function Name (Mnemonic) Direction
S16,F26 PRJobSetStartMethod Acknowledge S,H<-E
Description
Acknowledges request to set job start method and indicates any errors. ERRTEXT will contain the identifiers of any process
jobs that did not accept the new process start method.
Structure
L,2
1. L,m [m = # of jobs]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F27 Control Job Command Request S,H->E
Description
Send a control job command to a control job.
Structure
L,3
1. <CTLJOBID>
2. <CTLJOBCMD>
3. L,2
1. <CPNAME>
2. <CPVAL>
Exception
3. L,2 IS L,0 for commands that do not need parameters.
SEMI E5-1104 © SEMI 1982, 2004 239
Stream,Function Name (Mnemonic) Direction
S16,F28 Control Job Command Acknowledge S,H<-E
Description
Indicates success or failure of command request to a control job. If applicable ERRTEXT shall contain information on specific
command parameter names or values that caused the error.
Structure
L,2
1. <ACKA>
2. L,2
1. <ERRCODE>
2. <ERRTEXT>
Exception
2. L,2 IS L,0 if no errors.
Stream,Function Name (Mnemonic) Direction
S16,F29 PRSetMtrlOrder (PRJSMO) S,H->E,reply
Description
This message requests the equipment’s Processing Management Service to use a specific strategy for the order in which
materials are processed.
Structure
<PRMTRLORDER>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F30 PRSetMtrlOrder Acknowledge (PRJSMOA) S,H<-E
Description
This message acknowledges the request for change to the material process strategy by reporting back the value requested, if
correct.
Structure
<ACKA>
Exception
None
10.21 Stream 17 Equipment Control and Diagnostics — This stream is a continuation of Stream 2.
Stream,Function Name (Mnemonic) Direction
S17,F0 Abort Transaction (S17F0) S,H<->E
Description
Same form as S1F0
Structure
Exception