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SEMI E5-1104 © SEMI 1982, 2004 254 Unit Identifier Equivalence Prefix Allowed Suffix Allowed Description curie Ci 3.7*l0^l0*Bq No No A unit of activity of radionuclide. cycle c None Yes No Unit equivalent to one complete…

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SEMI E5-1104 © SEMI 1982, 2004 253
Table 24 SECS-II Units of Measure Identifiers
Unit Identifier Equivalence Prefix
Allowed
Suffix
Allowed
Description
Non-dimensional
quantities (pure
numbers)
null string None No No For all quantities which have no associated unit of
measure, a zero length (null) text string is the
appropriate ‘identifier’ to use when units of
measure information is required.
ampere A None Yes No SI unit of electric current.
ampere (turn) AT None Yes No SI unit of magnetomotive force.
angstrom Ang m*10^-10 Yes No Unit of length used when measuring wavelength
of light.
atmosphere, standard atm 101325*Pa No No A unit of pressure.
atmosphere, technical at kgf/cm^2 No No A unit of pressure.
atomic mass unit
(unified)
u 1.660531*10^-27*kg No No One twelfth the mass of an atom of carbon 12
nuclide.
bar bar 100*kPa Yes No CGS unit of pressure.
barn barn 10^-28*m^2 Yes No Unit for measuring capture cross sections of
elements.
barrel (petroleum) bbl 42*gal or 158.99*1 No No A unit of volume.
baud Bd bit/s Yes No Telecommunications measure of data transfer rate
equivalent to one bit of information transferred
per second.
bel B None Yes No The logarithm of the ratio of two power signals.
Becquerel Bq None Yes No SI unit of activity of a radionuclide.
bit bit None Yes No A unit of computer information equivalent to the
choice between two alternatives (as yes or no, on
or off).
boat boat None No Yes Special SECS generic unit corresponding to a
holder of wafers or packages with discrete
positions. The unit capacity is specified by the
symbol’s suffix, if provided. Otherwise, the
capacity is situation-dependent.
British thermal unit Btu 1054.35*J No No The quantity of heat required to raise the
temperature of one pound of water one degree
Fahrenheit at or near 39.2˚F.
byte byte 8*bit Yes No Unit of storage for computer memory.
calorie (International
Table)
callIT 4.1868*J Yes No Defined by the 1929 International Stream Table
Conference to be 1/860 international joules or
l/859.858 joules.
calorie
(thermochemical)
cal 4.l840*J Yes No Unit of energy defined by the NBS to be 4.184
joules. Also, called the gram calorie.
candela cd None Yes No SI unit of luminous intensity.
candle cd None Yes No Alternate name for candela.
carrier carrier None No Yes Special SECS generic unit corresponding to a
holder for substrates, wafers or wafer frames. The
unit capacity is specified by the symbol’s suffix, i
f
provided. Otherwise, the capacity is situation-
dependent.
cassette css None No Yes Special SECS generic unit corresponding to a
holder for wafers or wafer frames. The unit
capacity is specified by the symbol’s suffix, if
provided. Otherwise, the capacity is situation-
dependent.
Coulomb C A*s Yes No SI unit of electric charge.
SEMI E5-1104 © SEMI 1982, 2004 254
Unit Identifier Equivalence Prefix
Allowed
Suffix
Allowed
Description
curie Ci 3.7*l0^l0*Bq No No A unit of activity of radionuclide.
cycle c None Yes No Unit equivalent to one complete performance of a
periodic process.
darcy D cP*(cm/s)(cm/atm)
or 0.986923*um^2
No No Unit of permeability of a porous medium. By
traditional definition, a permeability of one darcy
will permit a flow of 1 cm^3/s of fluid of 1 cP
viscosity through an area of 1 cm^2 under a
pressure gradient of 1 atm/cm.
day (mean solar) d 24*h No No The period required for the Earth to complete one
rotation about its axis.
degree (plane angle) deg pi/180*rad No No One three hundred sixtieth part of the
circumference of a circle.
degree Celsius degC None No No Unit of temperature where 0˚C corresponds to the
freezing point of water and l00˚C corresponds to
the boiling point at standard atmospheric
conditions.
degree Fahrenheit degF None No No Unit of temperature where 32˚F corresponds to
the freezing point of water and 212˚F corresponds
to the boiling point at standard atmospheric
conditions.
degree Kelvin K None No No SI unit of temperature.
die die None No No Special SECS generic unit corresponding to an
individual integrated circuit both on a wafer and
after wafer separation. Also referred to as a bar or
chip.
dyne dyn 10^-5*N Yes No Unit of force in the cgs system. One dyne is the
force required to provide a one grain mass with an
acceleration of 1 cm/s^2.
electronvolt eV l.60209*10^-19*J Yes No Energy acquired by a small particle carrying a
unit electronic charge when it falls through a
potential difference of one volt.
erg erg l0^-7*J Yes No Unit of work or energy in the cgs system. One
erg is equal to the work done or energy expended
to exert a force of one dyne through a distance of
1 cm.
farad F A*s/V Yes No SI unit of capacitance.
foot ft 12*in No No English unit of length.
footcandle Fc lm/ft^2 No No Unit of illuminance. Also called lumen per square
foot.
footlambert FL (1/pi)*cd/ft^2 No No A unit of luminance. One lumen per square foot
leaves a surface whose luminance is one
footlambert in all directions within a hemisphere.
gal Gal cm/s^2 Yes No A unit of acceleration used especially for values
of gravity.
gallon (US) gal 23l*in^3 or 4*qt or
3.7854*1
No No United States version of English system unit of
volume.
gallon (UK) galUK 4.546l*l No No United Kingdom version of English system unit o
f
volume.
gauss G Mx/cm^2 Yes No Electromagnetic CGS unit of magnetic flux
density.
gilbert Gb l0/(4*pi)*AT Yes No Electromagnetic CGS unit of magnetomotive
force.
grain gr .0022857l43*oz No No English unit of weight.
gram g None Yes No One thousandth of the SI unit of mass.
SEMI E5-1104 © SEMI 1982, 2004 255
Unit Identifier Equivalence Prefix
Allowed
Suffix
Allowed
Description
gram-force gf 9.80665*N*10^-3 Yes No The weight of a gram mass when subjected to the
mean gravitational attraction of the Earth.
gray Gy Unknown Yes No SI unit of absorbed dose in the field of radiation
dosimetry.
henry H V*s/A Yes No SI unit of inductance.
hertz Hz c/s Yes No SI unit of frequency.
horsepower (electric) hp 746*W No No Archaic unit of power.
hour h 60*min No No Derived unit of time.
inch in 2.54*cm No No English unit of length.
conventional inch of
mercury
inHg 3386.4*Pa No No Unit equivalent to the pressure required to balance
a one inch high column of mercury in a
manometer at 32˚F.
conventional inch of
water
inH
2
O 249.09*Pa No No Unit equivalent to the pressure required to balance
a one inch high column of water in a manometer
at 4˚C.
ingot ing None No No Special SECS generic unit corresponding to the
entity of semiconductor manufacture from which
wafers are made.
ion ion None No No SECS II unique symbol equivalent to an atom that
carries an electric charge as a result of losing or
gaining electrons.
joule J N*m Yes No SI unit of energy, work, and quantity of heat.
kelvin K None No No SI unit of temperature. Also referred to as degree
Kelvin.
kilopound force klbf l000*lbf No No A multiple of the English unit of force or weight.
knot kn nmi/h No No Unit of velocity expressed in nautical miles per
hour.
lambert L (l/pi)*cd/cm^2 Yes No CGS unit of luminance. One lumen per square
centimeter leaves a surface whose luminance is
one lambert in all directions within a hemisphere.
leadframe ldfr None No Yes Special SECS generic unit corresponding to a
structure for leads which is removed after
p
ackaging. The structure may be fixed length or a
reel. The unit capacity is specified by the
symbol’s suffix, if provided. Otherwise, the
capacity is situation-dependent.
liter l 10^-3*m^3 Yes No A metric unit of volume.
lot lot None No No Special SECS generic unit corresponding to a
grouping of material which is undergoing the
same processing operations. The amount of
material represented by “1 lot” is situation-
dependent.
lumen lm cd*sr Yes No SI unit of luminous flux.
lux lx lm/m^2 Yes No SI unit of illuminance.
magazine mgz None No Yes Special, SECS generic unit corresponding to a
holder of fixed length leadframes. The unit
capacity is specified by the symbols suffix, if
provided. Otherwise, the capacity is situation-
dependent.
maxwell Mx 10^-8*Wb Yes No Electromagnetic CGS unit of magnetic flux.
meter m None Yes No SI unit of length.
metric ton t 10^3*kgf No No Unit of weight of force.
mho mho S Yes No Previous name for the SI unit siemens.