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SEMI E30-1103 © SEMI 1992, 2003 2 8 GEM Compliance 8.1 Fundamental GEM Requirements Figure 8.1, GEM Requirements and Capabilities Table 8.1, Fundamental GEM Requirem ents 8.2 GEM Capabilities Table 8.2, Section Reference…

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SEMI E30-1103 © SEMI 1992, 2003
1
SEMI E30-1103
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be
published November 2003. Originally published in 1992; previously published July 2003.
CONTENTS
1 Introduction
1.1 Revision History
1.2 Scope
1.3 Intent
Figure 1.1, GEM Scope
1.4 Overview
Figure 1.2, GEM Components
1.5 Applicable Documents
2 Definitions
3 State Models
3.1 State Model Methodology
3.2 Communications State Model
Figure 3.0, Example Equipment Component Overview
Figure 3.2.1, Communications State Diagram
Table 3.2, Communications State Transition Table
3.3 Control State Model
Figure 3.3, Control State Model
Table 3.3, CONTROL State Transition Table
3.4 Equipment Processing States
Figure 3.4, Processing State Diagram
Table 3.4, Processing State Transition Table
4 Equipment Capabilities and Scenarios
4.1 Establish Communications
4.2 Data Collection
Figure 4.2.1, Limit Combination Illustration: Control
Application
Figure 4.2.2, Elements of One Limit
Figure 4.2.3, Limit State Model
Table 4.2, Limit State Transition Table
4.3 Alarm Management
Figure 4.3, State Diagram for Alarm ALIDn
Table 4.3.1, Alarm State Transition Table
Table 4.3.2
4.4 Remote Control
4.5 Equipment Constants
4.6 Process Program Management
4.7 Material Movement
4.8 Equipment Terminal Services
4.9 Error Messages
4.10 Clock
4.11 Spooling
Figure 4.11, Spooling State Diagram
Table 4.11, Spooling State Transition
4.12 Control
5 Data Items
5.1 Data Item Restrictions
5.2 Variable Item List
6 Collection Events
Table 6.1, GEM Defined Collection Events
7 SECS-II Message Subset
STREAM 1: Equipment Status
STREAM 2: Equipment Control and Diagnostics
STREAM 5: Exception (Alarm) Reporting
STREAM 6: Data Collection
STREAM 7: Process Program Load
STREAM 9: System Errors
STREAM 10: Terminal Services
STREAM 14: Object Services
STREAM 15: Recipe Management
SEMI E30-1103 © SEMI 1992, 2003
2
8 GEM Compliance
8.1 Fundamental GEM Requirements
Figure 8.1, GEM Requirements and Capabilities
Table 8.1, Fundamental GEM Requirements
8.2 GEM Capabilities
Table 8.2, Section References for GEM Capabilities
8.3 Definition of GEM Compliance
8.4 Documentation
Figure 8.2, Host View of GEM
Table 8.3, GEM Compliance Statement
Table 8.4, SML Notation
A. Application Notes
A.1 Factory Operational Script
A.1.1 Anytime Capabilities
A.1.2 System Initialization and Synchronization
A.1.3 Production Set-Up
A.1.4 Processing
A.1.5 Post-Processing
A.2 Equipment Front Panel
A.2.1 Displays and Indicators
A.2.2 Switches/Buttons
A.3 Examples of Equipment Alarms
Table A.3, Alarm Examples Per Equipment Configura-
tion
A.4 Trace Data Collection Example
A.5 Harel Notation
Figure A.5.1, Harel Statechart Symbols
Figure A.5.2, Example of OR Substates
Figure A.5.3, Example of AND Substates
A.5.1 State Definitions
A.5.2 Transition Table
Table A.5, Transition Table for Motor Example
A.6 Example Control Model Application
A.7 Examples of Limits Monitoring
A.7.1 Introduction
A.7.2 Examples
Figure A.7.1, Valve Monitoring Example
Figure A.7.2, Environment Monitoring Example
Figure A.7.3, Calibration Counter Example
A.8 Recipe Parameter Modification for Process and
Equipment Control
A.8.1 Introduction
A.8.2 Equipment Constants
A.8.3 Example
Figure A.8.1, CMP Single Wafer “Polishing” System
with Host Recipe Parameter Modification Capability
Index
SEMI E30-1103 © SEMI 1992, 2003
3
SEMI E30-1103
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be
published November 2003. Originally published in 1992; previously published July 2003.
1 Introduction
1.1 Revision History — This is the first release of the
GEM standard.
1.2 Scope — The scope of the GEM standard is limited
to defining the behavior of semiconductor equipment as
viewed through a communications link. The SEMI E5
(SECS-II) standard provides the definition of messages
and related data items exchanged between host and
equipment. The GEM standard defines which SECS-II
messages should be used, in what situations, and what
the resulting activity should be. Figure 1.1 illustrates
the relationship of GEM, SECS-II and other
communications alternatives.
The GEM standard does NOT attempt to define the
behavior of the host computer in the communications
link. The host computer may initiate any GEM message
scenario at any time and the equipment shall respond as
described in the GEM standard. When a GEM message
scenario is initiated by either the host or equipment, the
equipment shall behave in the manner described in the
GEM standard when the host uses the appropriate GEM
messages.
Figure 1.1
GEM Scope
The capabilities described in this standard are
specifically designed to be independent of lower-level
communications protocols and connection schemes
(e.g., SECS-I, SMS, point-to-point, connection-oriented
or connectionless). Use of those types of standards is
not required or precluded by this standard.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
1.3 Intent — GEM defines a standard implementation
of SECS-II for all semiconductor manufacturing
equipment. The GEM standard defines a common set of
equipment behavior and communications capabilities
that provide the functionality and flexibility to support
the manufacturing automation programs of
semiconductor device manufacturers. Equipment
suppliers may provide additional SECS-II functionality
not included in GEM as long as the additional
functionality does not conflict with any of the behavior
or capabilities defined in GEM. Such additions may
include SECS-II messages, collection events, alarms,
remote command codes, processing states, variable data
items (data values, status values or equipment
constants), or other functionality that is unique to a
class (etchers, steppers, etc.) or specific instance of
equipment.
GEM is intended to produce economic benefits for both
device manufacturers and equipment suppliers.
Equipment suppliers benefit from the ability to develop
and market a single SECS-II interface that satisfies
most customers. Device manufacturers benefit from the
increased functionality and standardization of the
SECS-II interface across all manufacturing equipment.
This standardization reduces the cost of software
development for both equipment suppliers and device
manufacturers. By reducing costs and increasing
functionality, device manufacturers can automate
semiconductor factories more quickly and effectively.
The flexibility provided by the GEM standard also
enables device manufacturers to implement unique
automation solutions within a common industry
framework.