semi合集-English.pdf - 第1329页

SEMI E30-1103 © SEMI 1992, 2003 3 SEMI E30-1103 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) This standard was technically approved by the Globa l Information & Control Committee and …

SEMI E30-1103 © SEMI 1992, 2003

8 GEM Compliance

8.1 Fundamental GEM Requirements

Figure 8.1, GEM Requirements and Capabilities

Table 8.1, Fundamental GEM Requirements

8.2 GEM Capabilities

Table 8.2, Section References for GEM Capabilities

8.3 Definition of GEM Compliance

8.4 Documentation

Figure 8.2, Host View of GEM

Table 8.3, GEM Compliance Statement

Table 8.4, SML Notation

A. Application Notes

A.1 Factory Operational Script

A.1.1 Anytime Capabilities

A.1.2 System Initialization and Synchronization

A.1.3 Production Set-Up

A.1.4 Processing

A.1.5 Post-Processing

A.2 Equipment Front Panel

A.2.1 Displays and Indicators

A.2.2 Switches/Buttons

A.3 Examples of Equipment Alarms

Table A.3, Alarm Examples Per Equipment Configura-

tion

A.4 Trace Data Collection Example

A.5 Harel Notation

Figure A.5.1, Harel Statechart Symbols

Figure A.5.2, Example of OR Substates

Figure A.5.3, Example of AND Substates

A.5.1 State Definitions

A.5.2 Transition Table

Table A.5, Transition Table for Motor Example

A.6 Example Control Model Application

A.7 Examples of Limits Monitoring

A.7.1 Introduction

A.7.2 Examples

Figure A.7.1, Valve Monitoring Example

Figure A.7.2, Environment Monitoring Example

Figure A.7.3, Calibration Counter Example

A.8 Recipe Parameter Modification for Process and

Equipment Control

A.8.1 Introduction

A.8.2 Equipment Constants

A.8.3 Example

Figure A.8.1, CMP Single Wafer “Polishing” System

with Host Recipe Parameter Modification Capability

Index

SEMI E30-1103 © SEMI 1992, 2003

SEMI E30-1103

GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF

MANUFACTURING EQUIPMENT (GEM)

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese

Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be

published November 2003. Originally published in 1992; previously published July 2003.

1 Introduction

1.1 Revision History — This is the first release of the

GEM standard.

1.2 Scope — The scope of the GEM standard is limited

to defining the behavior of semiconductor equipment as

viewed through a communications link. The SEMI E5

(SECS-II) standard provides the definition of messages

and related data items exchanged between host and

equipment. The GEM standard defines which SECS-II

messages should be used, in what situations, and what

the resulting activity should be. Figure 1.1 illustrates

the relationship of GEM, SECS-II and other

communications alternatives.

The GEM standard does NOT attempt to define the

behavior of the host computer in the communications

link. The host computer may initiate any GEM message

scenario at any time and the equipment shall respond as

described in the GEM standard. When a GEM message

scenario is initiated by either the host or equipment, the

equipment shall behave in the manner described in the

GEM standard when the host uses the appropriate GEM

messages.

Figure 1.1

GEM Scope

The capabilities described in this standard are

specifically designed to be independent of lower-level

communications protocols and connection schemes

(e.g., SECS-I, SMS, point-to-point, connection-oriented

or connectionless). Use of those types of standards is

not required or precluded by this standard.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

1.3 Intent — GEM defines a standard implementation

of SECS-II for all semiconductor manufacturing

equipment. The GEM standard defines a common set of

equipment behavior and communications capabilities

that provide the functionality and flexibility to support

the manufacturing automation programs of

semiconductor device manufacturers. Equipment

suppliers may provide additional SECS-II functionality

not included in GEM as long as the additional

functionality does not conflict with any of the behavior

or capabilities defined in GEM. Such additions may

include SECS-II messages, collection events, alarms,

remote command codes, processing states, variable data

items (data values, status values or equipment

constants), or other functionality that is unique to a

class (etchers, steppers, etc.) or specific instance of

equipment.

GEM is intended to produce economic benefits for both

device manufacturers and equipment suppliers.

Equipment suppliers benefit from the ability to develop

and market a single SECS-II interface that satisfies

most customers. Device manufacturers benefit from the

increased functionality and standardization of the

SECS-II interface across all manufacturing equipment.

This standardization reduces the cost of software

development for both equipment suppliers and device

manufacturers. By reducing costs and increasing

functionality, device manufacturers can automate

semiconductor factories more quickly and effectively.

The flexibility provided by the GEM standard also

enables device manufacturers to implement unique

automation solutions within a common industry

framework.

The GEM standard is intended to specify the following:

— A model of the behavior to be exhibited by

semiconductor manufacturing equipment in a

SECS-II communication environment,

— A description of information and control functions

needed in a semiconductor manufacturing

environment,

— A definition of the basic SECS-II communications

capabilities of semiconductor manufacturing

equipment,

— A single consistent means of accomplishing an

action when SECS-II provides multiple possible

methods, and

— Standard message dialogues necessary to achieve

useful communications capabilities.

The GEM standard contains two types of requirements:

— fundamental GEM requirements and

— requirements of additional GEM capabilities.

The fundamental GEM requirements form the

foundation of the GEM standard. The additional GEM

capabilities provide functionality required for some

types of factory automation or functionality applicable

to specific types of equipment. A detailed list of the

fundamental GEM requirements and additional GEM

capabilities can be found in Chapter 8, GEM

Compliance. Figure 1.2 illustrates the components of

the GEM standard.

Figure 1.2

GEM Components

Equipment suppliers should work with their customers

to determine which additional GEM capabilities should

be implemented for a specific type of equipment.

Because the capabilities defined in the GEM standard

were specifically developed to meet the factory

automation requirements of semiconductor

manufacturers, it is anticipated that most device

manufacturers will require most of the GEM

capabilities that apply to a particular type of equipment.

Some device manufacturers may not require all the

GEM capabilities due to differences in their factory

automation strategies.

1.4 Overview — The GEM standard is divided into

sections as described below.

Section 1 — Introduction

This section provides the revision history, scope and

intent of the GEM standard. It also provides an

overview of the structure of the document and a list of