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SEMI E30-1103 © SEMI 1992, 2003 35 RESUME — Comm and to resume processing from the point where the process was paused. ABORT — Command to term inate the current cycle prior to its completion. Abort has the intent of imme…

SEMI E30-1103 © SEMI 1992, 2003

4.4 Remote Control

4.4.1 Purpose — This capability provides the host with

a level of control over equipment operations.

4.4.2 Definitions

Host Command Parameter (CPNAME/

CPVAL/CEPVAL) — A parameter name/value

associated with a particular host command

(S2,F41/S2,F49). The equipment manufacturer must

provide unique names (CPNAMEs) for any supported

command parameters. Command parameters are not

specified in this document but are left to equipment

manufacturers to define. Equipment models of specific

classes of semiconductor equipment also may address

this issue. Note that if there are no associated

parameters a zero-length list is sent. The data item

CEPVAL, which can be defined as a list, allows

grouping of related parameters within a main

parameter. If the CEPVAL is defined as a single (non-

list) item, then it is the equivalent of a CPVAL.

The uses of OBJSPEC in the header structure of the

S2,F49 Enhanced Remote Command allows the

equipment supplier to define a set of unique identifiers

for different objects within the equipment such as:

equipment sub-systems, sub-system components,

processing stations, ports, and exchange stations.

4.4.3 Description — The equipment responds to host

commands that provide the following functions relative

to individual equipment implementations:

— Start processing

— Select a process program or recipe

— Stop processing

— Temporarily suspend processing

— Resume processing

— Abort processing

Additional commands may be implemented by the

equipment manufacturer (e.g., vent chamber, clear

material, open door).

Remote commands shall be interpreted as “request

action be initiated” rather than “do action.” The

equipment may then respond via S2,F42/S2,F50 with

HCACK = 4 if the command “is going to be

performed.” This alleviates any transaction timeouts

for commands that may take a long time to perform.

The completion of the action initiated by the remote

command (i.e., HCACK = 0 or 4) must result in either a

state transition or other action that generates a

collection event upon normal/abnormal completion.

The format for all remote commands is ASCII, with a

maximum length of 20 characters. The character set is

restricted to the printable characters (hexadecimal 21

through 7E). Note that spaces are not allowed.

The following remote commands (RCMDs), if

implemented on the equipment, shall be supported as

described below (see Section 3.4 for a description of

Equipment Processing States).

NOTE 12: The terms “current cycle” and “safe break point”

used below are to be defined by the supplier or within the

models of classes of semiconductor equipment.

START — This command is available to the host when

a process program or recipe has been selected and the

equipment is in the “ready” processing state. The

START command instructs the equipment to initiate

processing. Variable parameter settings may be

included as name/value command parameters

CPNAME/CPVAL/CEPVAL.

PP-SELECT — This command instructs the equipment

to make the requested process program(s) available in

the execution area. The process programs (PPIDs) are

specified via the command parameter list. A status

variable (PPExecName) contains the PPID of the

process program(s) currently selected.

RCP-SELECT — This command uses the Enhanced

Remote Command S2,F49 to instruct the equipment to

prepare the requested recipes for execution in the

execution area. The recipes and variable parameters are

specified via command parameter lists. Each recipe

specification may be accompanied by new variable

parameter settings, if any, in the command parameter

list. A status variable RcpExecName contains the

recipe specifiers or identifiers of the recipes currently

selected.

STOP — Command to complete the current cycle, stop

in a safe condition and return to the “idle” processing

state. Stop has the intent of stopping the process. The

equipment is not required to support the continuation of

processing. Stop leaves material either fully processed

or partially processed so that the processing can be later

completed. For example, for a single wafer process

tool, five wafers have been processed while the

remaining wafers remain unprocessed.

PAUSE — Command to suspend processing

temporarily at the next safe break point. Pause has the

intent of resuming the process at the same point where

it was paused. The process may be RESUMED,

STOPPED, or ABORTED while in a PAUSED

condition. RESUME shall be able to continue the

process from the same point where it was paused.

SEMI E30-1103 © SEMI 1992, 2003

RESUME — Command to resume processing from the

point where the process was paused.

ABORT — Command to terminate the current cycle

prior to its completion. Abort has the intent of

immediately stopping the process and is used because

of abnormal conditions. Abort makes no guarantee

about the subsequent condition of material. In the

above example, the wafers being processed at the time

of the abort may not be completely processed. Other

AbortLevels > 1 may be defined by the manufacturer or

addressed by models of specific classes of

semiconductor equipment.

CPNAME = AbortLevel, CPVAL = 1 means terminate

current cycle at the next “safe break point,” retrieve all

material, stop in a safe condition and return to the idle

state in the processing state machine.

4.4.4 Requirements

— The following Remote Commands, as defined under

Descriptions, must be implemented on equipment to

satisfy minimum requirements for this capability:

— START

— STOP

— The RCMD value for all commands supported on

the equipment must be recognized if sent with all

upper-case characters (e.g., “STOP”, “START”,

“PP-SELECT”, “PAUSE”, etc.). In addition to

accepting strings with all upper-case characters, the

equipment can optionally accept strings with all

lower-case characters or mixed-case strings. The

equipment documentation should describe whether

or not the optional lower-case or mixed-case strings

are supported.

— Stream 2 currently provides for Host Command

Send and Enhanced Remote Command. The

equipment shall support one or both methods, based

on appropriateness.

— The Enhanced Remote Command is used to address

size, complexity, or the need to target a specific sub-

system within the equipment, (i.e., processing

station, port, exchange station, material handler,

chamber).

4.4.5 Scenarios

4.4.5.1 Host Command Send Scenario

COMMENTS HOST EQUIPMENT COMMENT

Host Command Send S2,F41-->

<-- S2,F42 Host Command Acknowledge

[IF] Command Accepted

(HCACK = 0 or 4)

<-- S6,F11 [THEN] Event Report-state

change or other collection

event occurrence.

Event Report Acknowledge S6,F12-->

4.4.5.2 Enhanced Remote Command Scenario

COMMENTS HOST EQUIPMENT COMMENT

Enhanced Remote Command S2,F49-->

<--S2,F50 EnhancedRemote Command

Acknowledge

[IF] Command Accepted

(HCACK = 0 or 4)

<--S6,F11 [THEN] Event Report-state

change or other collection

event occurrence.

Event Report Acknowledge S6,F12-->

4.5 Equipment Constants

4.5.1 Purpose — This capability provides a method for

the host to read and to change the value of selected

equipment constants on the equipment.

4.5.2 Definitions — None.

4.5.3 Description — This capability allows the host to

reconfigure equipment constants to support a variety of

situations. The following functions are included:

Host Sends Equipment Constants — Allows the host to

change the value of one or more equipment constants.

Host Equipment Constant Request — Allows the host

to determine the current value of equipment constants.

Host Equipment Constant Namelist Request — Allows

the host to retrieve basic information about the

equipment constants available at the equipment.

4.5.4 Requirements

— Equipment constants must be stored in non-volatile

memory.

— The equipment must be in a “safe” condition to

accept new constant(s) settings as defined by the

equipment manufacturer.

— The equipment must provide a collection event to

alert the host whenever an equipment constant is

changed by the operator. Information indicating

which constant was changed shall be available for

the event report.

4.5.5 Scenarios

Host Sends Equipment Constants:

COMMENTS HOST EQUIPMENT COMMENTS

Host sends S2,F15-->

equipment constants <-- S2,F16 EAC = 0 equipment sets

constants

Host Equipment Constants Request:

COMMENTS HOST EQUIPMENT COMMENTS

Host constant request S2,F13-->

<-- S2,F14 Equipment constant data

NOTE: This capability also can be accomplished using S6,F19 & S6,F20. See Section

4.2.