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SEMI E30-1103 © SEMI 1992, 2003 53 Equipment-Initiated Recipe Upload : COMMENTS HOST EQUIPMENT COMMENTS RCPCMD = Upload [IF] multi-block request < --S15,F1 [THEN] Recipe Management Multi- block inquire Recipe Manageme…

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SEMI E30-1103 © SEMI 1992, 2003
52
4.6.6.3 Recipe Upload
Host-Initiated Recipe Upload:
COMMENTS HOST EQUIPMENT COMMENTS
Recipe Upload Request S15,F31-->
<--S15,F32 Recipe Upload Data
Large Recipe Upload Request S15,F51-->
<--S15,F52 Large Recipe Upload Acknowledge
Acknowledge may be “accepted
and will be performed later
with completion signaled”.
When the equipment is ready to
send:
<--S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set request S13,F3-->
<--S13,F4 Open Data Set Data
[START] repeat until
ACKC13 is error:
Read Data Set Request S13,F5-->
[END] <--S13,F6 Read Data Set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
<--S6,F11 Send Event Report “successful
Event Report Acknowledge S6,F12--> upload”
[ELSE]
<--S6,F11 Send Event Report “bad upload”
Event Report Acknowledge S6,F12--> [END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<--S13,F8 Close Data Set Acknowledge
SEMI E30-1103 © SEMI 1992, 2003
53
Equipment-Initiated Recipe Upload:
COMMENTS HOST EQUIPMENT COMMENTS
RCPCMD = Upload
[IF] multi-block request
<--S15,F1 [THEN] Recipe Management Multi-
block inquire
Recipe Management Multi- S15,F2-->
block Grant
[END_IF]
<--S15,F21 Recipe Action Request
Recipe Action Acknowledge S15,F22-->
Host requests upload S15,F31-->
<--S15,F32 Recipe Upload Data
RCPCMD = Upload
[IF] multi-block request
<--S15,F1 [THEN]
Recipe Management
Recipe Management S15,F2--> Multi-block Inquire
Multi-block Grant [END_IF]
<--S15,F21 Recipe Action Request
Recipe Action Acknowledge S15,F22-->
S15,F51-->
Large Recipe Upload
Request
<--S15,F52 Large Recipe Upload
Acknowledge
<--S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set Request S13,F3-->
<--S13,F4 Open Data Set Data
[START] repeat until
ACKC13 is error:
Read Data Set Request S13,F5-->
[END] <--S13,F6 Read Data Set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
<--S6,F11 Send Event Report “successful
upload”
Event Report Acknowledge S6,F12--> [ELSE]
<--S6,F11 Send Event Report “bad upload”
Event Report Acknowledge S6,F12--> [END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<--S13,F8 Close Data Set Acknowledge
SEMI E30-1103 © SEMI 1992, 2003
54
4.6.6.4 Recipe Download
The Recipe Management Multi-block Inquire/Grant transaction (S15,F1/F2) is required for the transfer of multi-
block recipes. However, its use is recommended prior to all downloads, as it provides recipe size to the equipment.
NOTE 18: If the data item RCPOWCODE is TRUE in S15,F27, then a pre-existing recipe with the same identifier shall be
overwritten.
Host-Initiated Recipe Download:
COMMENTS HOST EQUIPMENT COMMENTS
[IF]
Recipe is multi-block
[THEN]
Recipe Management Multi-
block Inquire S15,F1-->
<--S15,F2 Recipe Management Multi-block
Grant
[END IF]
Recipe Download Request S15,F27-->
[IF] RCPOWCODE = TRUE
delete any pre-existing recipe
with the same identifier before
storing new recipe
[END_IF]
<--S15,F28 Recipe Download Acknowledge
Large Recipe Download S15,F49-->
Request
[IF] RCPOWCODE = TRUE
delete any pre-existing recipe
with the same identifier before
storing new recipe
[END_IF]
<--S15,F50 Large Recipe Download
Acknowledge
<--S13,F3 Open Data Set Request
Open Data Set Data S13,F4-->
[START] repeat until ACKC13 is
error:
<--S13,F5 Read Data Set Request
Read Data Set Data S13,F6-->
[END]
<--S13,F7 Close Data Set Send
Close Data Set Acknowledge S13,F8-->
[IF] multi-block request
<--S15,F1 [THEN]
Recipe Management S15,F2--> Recipe Management
Multi-block Grant Multi-block Inquire
[END_IF]
<--S15,F53
Recipe Verification Send
Recipe Verification S15,F54-->
Acknowledge