semi合集-English.pdf - 第1442页
SEMI 30.1-0200 © SEMI 1998, 2000 17 Variab le Name Type Descripti on Level Class Forma t Comment for the current inspection/re view . InspectionRu n ID CV Run identif ication in the current insp ection/revi ew. ALL DVVAL…
SEMI 30.1-0200 © SEMI 1998, 2000 16
Variable Name Type Description Level Class Format Comment
multi-lot runs (batch).
Classification RSV Classification code of an
anomaly.
A DVVAL A[1..80]
Coord2D CV The two-dimensional
coordinate of an anomaly.
ALL DVVAL L,2
1. <CoordX>
2. <CoordY>
CoordSys CV The identification for a
coordinate system
definition. SEMI M20,
M20P, or SEMI M21.
ALL DVVAL A[1..16] “M20”
“M21”
“M20P”
CoordX CV The coordinate in the X
direction of a site (anomaly,
alignment site, or the lower
left-hand of an area or
element).
ALL DVVAL F4
CoordY CV The coordinate in the Y
direction of a site (anomaly,
alignment site, or the lower
left-hand of an area or
element).
ALL DVVAL F4
DefaultPriority CV The default priority given a
material location if none is
assigned.
ALL EC U2
DeltaX CV The X-axis translation of
M20P coordinate system
relative to the SEMI M20
coordinate system.
ALL DVVAL F4
DeltaY CV The Y-axis translation of
M20P coordinate system
relative to the SEMI M20
coordinate system.
ALL DVVAL F4
ElementID CV The SEMI M21 address for
a specific rectangular
element on a substrate.
ALL DVVAL I4[2] May refer to a field or
die.
ElementList CV A list of SEMI M21
elements where processing
can be attempted.
ALL DVVAL L,n
1. <ElementID>
:
n.
Fiducial CV The physical feature used to
associate a fiducial line
used for orientation (i.e.,
flat or notch on a substrate).
ALL DVVAL A[1..16] “FLAT”
“NOTCH”
GroupAnomaly-
Count
CV Anomaly count for the
current or last group (i.e.,
field or die inspected).
G DVVAL U2
GroupArea CV Square Area (microns
2
) of
the last group inspected.
G DVVAL F4
GroupComment RSV Operator-generated
comment associated with
the group.
G DVVAL A[1..80]
GroupID CV Inspection/review group
identification for the current
inspection/review.
ALL DVVAL U2
InspectionPPID CV Process program used on
the inspection/review tool
ALL DVVAL A[1..80]
SEMI 30.1-0200 © SEMI 1998, 200017
Variable Name Type Description Level Class Format Comment
for the current
inspection/review.
InspectionRunID CV Run identification in the
current inspection/review.
ALL DVVAL A[1..16]
LotID CV Lot identification of the
current material
inspected/reviewed.
ALL DVVAL A[1..16]
M20Data CV The silicon substrate size,
fiducial type, and
orientation to use.
ALL DVVAL L,3
1. <SubstrateSize
2. <Fiducial>
3. <Orientation>
M21Data CV The data necessary to
establish an ISEM SEMI
M21 layout on a substrate.
ALL DVVAL L,2
1. L,3
1. <M21XSize>
2. <M21YSize>
3. <Tile>
2. L,n
1. L,3
1. <ElementID>
2. <CoordX>
3. <CoordY>
:
n.
M21XSize CV The value of the SEMI M21
coordinate system in the X-
direction.
ALL DVVAL F4
M21YSize CV The value of the SEMI M21
coordinate system in the Y-
direction.
ALL DVVAL F4
Offset CV The distance of the actual or
found location of a site
relative to its defined or
expected location.
ALL DVVAL L[2] Refers to SiteDeltaX,
SiteDeltaY which are o
f
Format F4.
OperatorAction CV The action taken by the
operator on the equipment’s
operator I/O.
ALL DVVAL A[1..80]
OperatorComment CV Operator-generated
comment, not associated
with any reporting level.
ALL DVVAL A[1..80] (See also Run-
Comment, Substrate-
Comment, Area-
Comment,
RegionComment, Site-
Comment, and
AnomalyComment.)
OperatorID CV Identification of the
operator of the
inspection/review
equipment.
ALL DVVAL A[1..16] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
Orientation CV How the wafer is loaded on
the equipment.
ALL EC F4 “0” degrees indicates
that the wafer has the
primary fiducial
towards the operator.
ProcessBuild-
GroupID
CV Name of the current or last
process program executed.
ALL SV A[1..80] See Section 14.
ProcessEquipmentID CV Identification of the process
equipment used with the
ALL DVVAL A[1..16] This information may
be added by the host in
SEMI 30.1-0200 © SEMI 1998, 2000 18
Variable Name Type Description Level Class Format Comment
current material
immediately prior to the
inspection/review.
the ISEM Tables. (See
Section 11.)
ProcessEquipmentLo
cation
CV Location (code) of the
process equipment used
with the current material
immediately prior to the
inspection/review.
ALL DVVAL A[1..16] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
ProcessEquipmentP
PID
CV Identification of the process
program used with the
process equipment used on
the current material
immediately prior to the
inspection/review.
ALL DVVAL A[1..80] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
ProcessLevel CV Identification of the
processing level of the
current material.
ALL DVVAL A[1..16] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
ProcessRunID CV Run identification for the
process prior to current
inspection/review.
ALL DVVAL A[1..16] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
ProductID CV The product identification
of the current material
inspected/reviewed.
ALL DVVAL A[1..16] This information may
be added by the host in
the ISEM Tables. (See
Section 11.)
RegionComment CV Operator-generated
comment associated with
the region.
X DVVAL A[1..80]
RunAnomaly-Count ISV Total number of all
anomalies found on all
substrates in the last run.
R DVVAL U2
RunComment CV Operator-generated
comment associated with
the run.
ALL DVVAL A[1..80]
RunInspected-
AreasCount
ISV The total number of
inspected/reviewed areas on
all substrates in the last run.
RS DVVAL U2
RunInspection-
PPCount
ISV The total number of process
programs used for the
current or last run.
RS DVVAL U2
RunSubstrate-Count CV The total number of
substrates completed in the
current inspection run,
which remains valid until
the next START command.
ALL DVVAL U2
ScaleFactor CV A correction factor applied
to the translation of one
coordinate system to
another.
ALL DVVAL F4 In most cases, a scaling
of 1 (one) is expected.
SiteID CV Inspection/Review group
identification for the current
site inspection/review.
ALL DVVAL U2
SlotID CV Carrier slot number from
which the current substrate
was taken.
ALL DVVAL U2