semi合集-English.pdf - 第1446页
SEMI 30.1-0200 © SEMI 1998, 2000 21 An exampl e of usage of S13,F13 to t ransf er data sets is shown belo w: L,7 1. <DATAID> 2. <OBJSPEC> 3. “TableDef” <TBLTYP> 4. “TableName” <TBLID> 5. L,n # of …
SEMI 30.1-0200 © SEMI 1998, 2000 20
11 ISEM Tables
A fundamental requirement of ISEM equipment is to
transfer anomaly and review data between itself and the
host. ISEM equipment may also be required to transfer
“Area” and “Alignment Site” data needed for run setup.
Anomaly and review data sets (as well as area and
alignment site data sets) are commonly handled as lists
and tables. ISEM equipment shall use tables when
transferring this kind of data between itself and the
host. List shall be used to refer to sub-sets of this table
data.
11.1 ISEM Table Data
11.1.1 ISEM Tables are used to specify area, align-
ment site, and anomaly coordinate lists for ISEM equip-
ment. ISEM Tables are transferred between the host
and the equipment using SECS-II Stream 13 messages
(Unformatted Data Set Transfers). For example, an
ISEM Table may be used to transfer anomaly data (e.g.,
“M21” coordinates) generated by inspection equipment
to the host, which in turn may then be transferred to
review equipment from the host. ISEM Tables also
include attributes items that are associated with the
table, not with the table data. ISEM Table attributes are
used to include information associated with table data,
like the number of columns (NumCols), number of
rows (NumRows), and table size (DataLength). (See
SEMI E58 for additional information.) Product or
process-related information may also be included on the
attribute section of the ISEM Tables (e.g., LotID, Pro-
ductID, OperatorID, ProcessEquipmentID) (see Table
4). The ISEM does not specify additional table attribute
variable items that may be associated with the table.
11.2 TABLE-DEFs
11.2.1 ISEM Tables are documented using TABLE-
DEF structures (Figure 5). Each TABLE-DEF structure
has a unique name (TableID) and type (TableType).
Each column in the TABLE-DEF has a name (e.g.,
“AREANAME”, “ALIGNNAME”, OR “ANOM-
ALYID”); row names are specific instances or values
that correspond to the column headers in TABLE-DEF.
A specific TABLE-DEF row is designated by referring
to the TABLE-DEF name and the specific row name.
ISEM Tables are transferred using standard (SECS-II
message) Stream 13 messages (Figure 6), and each
ISEM-defined TABLE-DEF item maps into a Stream
13 message item. Align and area data tables are host-
defined, and anomaly tables are equipment-defined.
TableType = <TableDef>TableID = <TableName>
Row Name Column
1
Column
2
Column
3
… Column
n
Row
1
Name
…
Row
m
Name
Figure 5
TABLE-DEF Structure
SEMI 30.1-0200 © SEMI 1998, 200021
An example of usage of S13,F13 to transfer data sets is shown below:
L,7
1. <DATAID>
2. <OBJSPEC>
3. “TableDef” <TBLTYP>
4. “TableName” <TBLID>
5. L,n # of table attributes
1. L,2
1. “NumRows” <ATTRID1>
2. <m> <ATTRDATA1>
2. L,2
1. “NumCols” <ATTRID2>
2. <n> <ATTRDATA2>
3. L,2
1. “DataLength” <ATTRID3>
2. <table length> <ATTRDATA3>
4. L,2
1. “LotID” <ATTRID4>
2. “ABC123” <ATTRDATA4>
n. L,2
1. “ProductID” <ATTRIDn>
2. “CPUTYPE” <ATTRDATAn>
6. L,n # of columns
1. “AREANAME” <COLHDR1>(1st column description)
.
n. “ATTRIBUTE5” <COLHDRn>(nth column description)
7. L,m # of rows
1. L,n # of columns
1. <Item 1,1> table item in row 1, column 1
.
n. <Item 1,n> table item in row 1, column n
.
m. L,n # of columns
1. <Item m,1> table item in row m, column 1
.
n. <Item m,n> table item in row m, column n
Figure 6
S13,F13 with ISEM TABLE-DEF Data
11.3 Required ISEM Tables — ISEM equipment shall support all three table types: area, align, and anomaly. SEMI
M21 anomaly table type may be supported, but it is optional. The ISEM equipment shall be able to store
simultaneously at least 3 (three) defined tables of each type supported to guarantee the validity of any table while
that table is being transferred (a table transfer transaction is in process).
ISEM align and area tables are stored by the equipment during the current inspection or review run (i.e., until a new
remote command PP-SELECT or PP-ASSIGN is sent, or until they are modified with PP-UPDATE).
Table 5 ISEM Table Types (TABLE-DEFs)
Table Type Req/Opt Description
“TABLE-AREA-DEF” R Area Definition — A set of areas and their attributes, typically the list of areas to
be inspected.
“TABLE-ALIGN-DEF” R Alignment Site Definition — A set of alignment sites and their attributes.
“TABLE-ANOMALY-DEF” R Anomaly Coordinate Data Definition — A set of anomalies and their attributes,
with coordinates given in the SEMI M20 or M20P coordinate system.
“TABLE-M21-ANOMALY-DEF” O Anomaly SEMI M21 Coordinate Data Definition — A set of anomalies and their
attributes, with coordinates given in the SEMI M21 coordinate system.
SEMI 30.1-0200 © SEMI 1998, 2000 22
As indicated in Table 5, the SEMI M21 anomaly definition table “TABLE-M21-ANOMALY-DEF” is optional. The
others are required.
ISEM requires that the following columns be included in the TABLE-DEFs. Table 6 defines the column headers and
the allowed formats. Anomaly attributes and attribute headings are defined by the supplier, based on equipment
capability.
11.3.1 “TABLE-AREA-DEF”
TableType: “TableAreaDef” TableID: <AreaTableName>
Area Name Coordx Coordy Coordsys Xtentx Xtenty Attribute (1) … Attribute
11.3.2 “TABLE-ALIGN-DEF”
TableType: “TableAlignDef” TableID: <AlignTableName>
AlignName Coordx Coordy Coordsys Attribute (1) … Attribute(N)
11.3.3 “TABLE-ANOMALY-DEF”
TableType: “TableAnomalyDef” TableID: <AnomalyTableName>
Anomalyid Coordx Coordy Coordsys AnomalyAttribute … AnomalyAttribute
11.3.4 “TABLE-M21-ANOMALY-DEF”
TableType = “TableM21AnomalyDef” TableID = <M21AnomalyTableName>
Anomalyid Coordx Coordy Elementid AnomalyAttribute … AnomalyAttribute
Defect data shall be transferred between the host and inspection/review/analysis equipment using SEMI E5, S13,F13. Columns in the table are
defined by Table 11.3.5 below.
11.3.5 TABLE-STANDARD-DEFECT-DATA-SET-DEF
NOTE 1: Data for each substrate should be reported in column order shown below. Inspection tools should support relevant
columns (see NOTE 6). Review and analysis tools should support all columns. Multiple data entries (list format data items) are
allowed for a given attribute on a single defect.
NOTE 2: The inspection equipment must add a table attribute called “Substrate Header” (ATTRID). It must be a list that includes
the following items in the given order: LotID (A[1..16]), SubstrateID (A[1..16]), ProcessEquipmentID (A[1..16]), substrate
center
1
(L[2], CoordX (F4), CoordY (F4)) and centering method
2
(A[1..16]). Refer to Table 4, Variable Item Dictionary for
descriptions of these items.
NOTE 3: See SEMI M21 for (0,0) die location methodology.
1 Vector from the origin of the substrate coordinate system to nominal substrate center location.
2 CoordSys (e.g., “SEMI M20”, “SEMI M21”, “M21P”, etc).