semi合集-English.pdf - 第1454页

SEMI 30.1-0200 © SEMI 1998, 2000 29 PP-UPDATE “PP BUILDID” “ALI GNLI ST” “ANOMALYLIST” “AREALIST” “ELE MEN TLIS T” “SLO TLI ST” “SU BSTR ATE LIS T” “TAB LE -A LIGN -DE F” “TAB LE -AR E A-DE F” “TABLE-ANOMALY-DEF” “TABLE-…

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SEMI 30.1-0200 © SEMI 1998, 2000 28
RESUME or PP-UPDATE may be used to resume
the process.
6. PP-ASSIGN — Instructs the equipment that
supports queuing to create a new ISEM job
(“CARRIERBLD”) for the specified port
(“LOCATIONID”) when more than one port is
available for processing. If only one port is
available, “LOCATIONID” is not required.
Priority may optionally be specified with this
command. The “PRIORITY” specifies the priority
of the newly created job in the ISEM job queue (a
value of 0 (zero) assigns the highest priority to the
job). Without specifying a priority, the job is
queued with the default priority. Jobs with equal
priority are queued in the order the PP-ASSIGN
commands are received. This command is valid in
all PROCESSING states.
7. PP-SELECT — Instructs the equipment to make
the requested ISEM job(s) (“CARRIERBLD”)
available in the execution area. This is a trigger for
the processing state transition from IDLE to
SETTING UP. The first process program
(“PROCESS-BLD-GROUP”) specified in the
“CARRIERBLD” is also validated during
SETTING UP.
8. PP-UNASSIGN — Removes the ISEM job
assignment (“CARRIERBLD”) for a carrier or
port. The carrier or port is removed from the
process queue.
9. PP-UPDATE — Provides the ability to alter the
current process program being executed during the
PAUSED state. The process program variables
specified in the PP-UPDATE command will
replace previous definitions in the “PROCESS-
BLD-GROUP”. This command will trigger
transition to CHECKING for process program
parameter verification. A RESUME command is
implied with the validation of “all” replaced values
to resume the process. If the PP-UPDATE fails, the
process program variables present prior to the PP-
UPDATE are retained. If no parameters values are
specified, the defaults are used.
10. RESUME — Resume processing from the point
where the process was paused. This is the trigger
for processing state transition from PROCESS
PAUSE to the previous PROCESS state.
11. START — Instructs the equipment to initiate
processing. This is the trigger for the processing
state transition from READY to LOAD. An
“AUTOSTART” command parameter may be
included to allow for continuous processing.
12. STOP — Complete the current cycle, stop in a safe
condition, and return to the IDLE processing state.
Stop has the intent of stopping the process entirely.
This command can be used to both: stop the current
ISEM job or to stop all queued jobs. The
equipment is not required to support the
continuation of processing.
13.2.1 Remote Commands and Associated Host
Command Parameters — This table describes the
allowable command parameters (CPNAME) for each
remote command (RCMD). Equipment shall support all
parameters. The column marked Req/Opt specifies
which parameters are required to be sent by the host
and which parameters may be optionally sent by the
host.
Table 8 Allowable Command Parameters
Parameters
Remote Command
CPName Req/Opt Comments
ABORT “ABORTLEVEL” R
CLEANUP “CARRIERID”
“LOCATIONID”
“SLOTID”
O
O
O
PORT and SLOT may be used to define a
different carrier/slot destination for the
substrates.
MAP-CARRIER “CARRIERID”
“LOCATIONID”
R*
R*
* One is required.
NEXT-MATERIAL “CARRIERID”
“LOCATIONID”
“SLOTID”
O
O
O
PORT and SLOT may be used to define a
different carrier/slot destination for the
substrates.
PAUSE None NA None
PP-ASSIGN “PRIORITY”
“CARRIERBLD”*
O
R
* More than one “CARRIERBLD” may be
specified.
PP-SELECT “CARRIERBLD”* R * More than one “CARRIERBLD” may be
specified.
PP-UNASSIGN “CARRIERBLD” R None
SEMI 30.1-0200 © SEMI 1998, 200029
PP-UPDATE “PPBUILDID”
“ALIGNLIST”
“ANOMALYLIST”
“AREALIST”
“ELEMENTLIST”
“SLOTLIST”
“SUBSTRATELIST”
“TABLE-ALIGN-DEF”
“TABLE-AREA-DEF”
“TABLE-ANOMALY-DEF”
“TABLE-M21-ANOMALY-DEF”
R
R*
R*
R*
R*
R*
R*
R*
R*
R*
R*
* At least one is required.
RESUME None N/A None
START “CARRIERBLD” 0 None
STOP “CARRIERBLD” 0 None
13.2.2 Host Command Parameter Names and Values
Table 9 Host Command Parameters CPNAMES
Parameter Value
CPName
Description Range Format
“ABORTLEVEL” ISEM-defined abort levels:
HALT — Process halts, and the ABORTING process state is
entered.
CLEANUP — Process halts, material cleanup is performed, and
the ABORTING process state is entered.
“1= HALT”
“2 = CLEANUP”
U2
“ALIGNLIST” L,n
1. AlignName
1
:
n.
For the SEMI M20 or M20P coordinate system.
List of
A[1..16]
data items
“ALIGNNAME” Alignment name
See the “TABLE-ALIGN-DEF” definition for further explanation.
A[1..16]
“ANOMALYLIST” L,n
1. AnomalyID
1
:
n.
For the SEMI M20 or M20P coordinate system.
List of
A[1..16]
data items
“ANOMALYID” Anomaly identifier
See the “TABLE-ANOMALY-DEF” or the “TABLE-M21-
ANOMALY-DEF” definition for further explanation.
A[1..16]
“AREALIST” L,n
1. AreaName
1
:
n.
List of
A[1..16]
data items
“AREANAME” Unique identifier for an area to be inspected.
See the “TABLE-AREA-DEF” definition for further explanation.
A[1..16]
“AUTOSTART” Specifies whether a START command is required from an external
source (operator or host) to exit the READY state.
0 = NoAutoStart (A START command required.)
1 = AutoStart (No external START command required to
begin execution.)
0–1 U2
“CARRIERID” Identifier of the carrier that the inspection/review data is
associated with.
A[1..16]
SEMI 30.1-0200 © SEMI 1998, 2000 30
Parameter Value
CPName
Description Range Format
“ELEMENTLIST” L,n
1. ElementID
1
:
n.
For the SEMI M21 coordinate system.
List of
A[1..16]
data items
“LOCATIONID” Unique identifier of the location to be used for the
“CARRIERBLD” assignment.
U2
“PPBUILDID” ProcessProgramBuildID A[1..80]
“PPNAME” ProcessProgramName A[1..80]
“PRIORITY” Assignment priority 0–9
Highest priority
corresponds to 0.
U2
“SLOTLIST” Specifies carrier slots containing substrate for the ISEM job.
L,n
1. SlotID
1
:
n. SlotIDn
Zero length list specifies
all slots.
List of U2
data items
“STOPLEVEL” Stop levels defined by the ISEM. “1 = LOCATIONID”
“2 = CARRIERID”
Use
defined
CPVALs
“SUBSTRATELIST” Specifies identifiers of substrate for the ISEM job.
L,n
1. SubstrateID
1
:
n. SubstrateID
n
Zero length list specifies
all substrate
(independent of substrate
identifier).
List of
A[0..16]
data items
“CARRIERBLD”
E5 Format
L, 3 Three ISEM required parameters
1. L, 2
1. “CARRIERID” A[9] -- CPName
2. CarrierID A[1..16] -- CPValue
2. L, 2
1. “LOCATIONID” A[10] -- CPName
2. LocationID U2 -- CPValue
3. L, 2
1. “PROCESS-BLD-LIST”
2. L, n List of n jobs
1. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m First ISEM job
2. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m Next ISEM job
.
.
.
n. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m Last ISEM job
m = 3 List
“PROCESS-BLD-
GROUP” (for
Inspection)
L,m
1. L,2
1. “PPBUILDID”
2. ProcessBuildGroupID
m ≥ 2
List of m
data items