semi合集-English.pdf - 第1456页

SEMI 30.1-0200 © SEMI 1998, 2000 31 Parameter Value CPName Desc ription Range Format 2. L,2 1. “PPNA ME” 2. P rocessProgramID 3. L,2 1. “SLOT LIS T” 2. L,n 1. SlotID 1 : n. Or 1. “SUB STRA TELIS T” 2. L,n 1. Substra teID…

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SEMI 30.1-0200 © SEMI 1998, 2000 30
Parameter Value
CPName
Description Range Format
“ELEMENTLIST” L,n
1. ElementID
1
:
n.
For the SEMI M21 coordinate system.
List of
A[1..16]
data items
“LOCATIONID” Unique identifier of the location to be used for the
“CARRIERBLD” assignment.
U2
“PPBUILDID” ProcessProgramBuildID A[1..80]
“PPNAME” ProcessProgramName A[1..80]
“PRIORITY” Assignment priority 0–9
Highest priority
corresponds to 0.
U2
“SLOTLIST” Specifies carrier slots containing substrate for the ISEM job.
L,n
1. SlotID
1
:
n. SlotIDn
Zero length list specifies
all slots.
List of U2
data items
“STOPLEVEL” Stop levels defined by the ISEM. “1 = LOCATIONID”
“2 = CARRIERID”
Use
defined
CPVALs
“SUBSTRATELIST” Specifies identifiers of substrate for the ISEM job.
L,n
1. SubstrateID
1
:
n. SubstrateID
n
Zero length list specifies
all substrate
(independent of substrate
identifier).
List of
A[0..16]
data items
“CARRIERBLD”
E5 Format
L, 3 Three ISEM required parameters
1. L, 2
1. “CARRIERID” A[9] -- CPName
2. CarrierID A[1..16] -- CPValue
2. L, 2
1. “LOCATIONID” A[10] -- CPName
2. LocationID U2 -- CPValue
3. L, 2
1. “PROCESS-BLD-LIST”
2. L, n List of n jobs
1. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m First ISEM job
2. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m Next ISEM job
.
.
.
n. L, 2
1. “PROCESS-BLD-GROUP”
2. L, m Last ISEM job
m = 3 List
“PROCESS-BLD-
GROUP” (for
Inspection)
L,m
1. L,2
1. “PPBUILDID”
2. ProcessBuildGroupID
m ≥ 2
List of m
data items
SEMI 30.1-0200 © SEMI 1998, 200031
Parameter Value
CPName
Description Range Format
2. L,2
1. “PPNAME”
2. ProcessProgramID
3. L,2
1. “SLOTLIST”
2. L,n
1. SlotID
1
:
n.
Or
1. “SUBSTRATELIST”
2. L,n
1. SubstrateID
1
:
n.
4. L,2
1. “AUTOSTART”
2. AutoStart
5. L,2
1. “TABLE-AREA-DEF”
2. AreaTableName
6. L,2
1. “AREANAME”
2. L,n
1. AreaName
1
:
n.
7. L,2
1. “TABLE-ALIGN-DEF”
2. AlignTableName
8. L,2
1. “ALIGNNAME”
2. L,n
1. AlignName
1
:
n.
9. L,2
1. “ELEMENTLIST” **
2. L,n
1. ElementID
1
:
n.
10. L,2
1. CPNAME*
2. CEPVAL*
m. L,2
1. CPNAME*
2. CEPVAL*
NOTES: “PPBUILDID” and “PPNAME” are required.
“SLOTLIST”, “SUBSTRATELIST”, “AREALIST”, and
“ALIGNLIST” are optional.
* Supplier shall define as many of these CPNAME, CEPVAL
SEMI 30.1-0200 © SEMI 1998, 2000 32
Parameter Value
CPName
Description Range Format
pairs as are supported by the equipment.
** “ELEMENTLIST” is required when using the SEMI M21
coordinate system in the definition of an AlignName or
AreaName.
“PROCESS-BLD-
GROUP” (for Review
Equipment)
L,m
1. L,2
1. “PPBUILDID”
2. ProcessBuildGroupID
2. L,2
1. “PPNAME”
2. ProcessProgramID
3. L,2
1. “SLOTLIST”
2. L,n
1. SlotID
1
:
2. SlotID
n
Or
1. “SUBSTRATELIST”
2. L,n
1. SubstrateID
1
:
n. SubstrateID
n
4. L,2
1. “AUTOSTART”
2. AutoStart
5. L,2
1. “TABLE-ANOMALY-DEF”
2. AnomalyTableName
6. L,2
1. “ANOMALYNAME” or
“M21-ANOMALYNAME”
2. L,n
1. AnomalyID
1
or M21AnomalyID
1
:
n.
7. L,2
1. “ALIGN-TABLE-DEF”
2. AlignTableName
8. L,2
1. “ALIGNNAME”
2. L,n
1. AlignName
1
:
n.
9. L,2
1. “ELEMENTLIST”**
2. L,n
1. ElementID
1
:
n.
10. L,2
m ≥ 2
List of m
data items