semi合集-English.pdf - 第1476页
SEMI E30.5-0302 © SEMI 2001, 2002 4 23 WORKING ALIGN 27 MEASURING TAKE MASUREMENT MEASUREMENT COMPLETE 28 29 26 24 35 36 34 Figure 2 Working State of Proces sing State Model 7.4 Processing State Model Diagram 7.4.1 Worki…
SEMI E30.5-0302 © SEMI 2001, 20023
INIT
IDLE with
Alarms
PROCESSING ACTIVE
IDLEABORTED
1
18
19
17
SETTING
UP
2
READY
WORKING
3
UNLOAD
4
25
23
24
EXECUTING
STOPPING
16
ABORTING
6
7
5
13
ALARM
PAUSED
PAUSED
22
21
H*
9
8
PAUSE
PROCESS
PAUSED
20
14
15
PROCESS
PAUSING
11
12
26
CHECKING
3233
10
38
LOAD
Figure 1
Generic MSEM Processing State Model Diagram
SEMI E30.5-0302 © SEMI 2001, 2002 4
23
WORKING
ALIGN
27
MEASURING
TAKE
MASUREMENT
MEASUREMENT
COMPLETE
28
29
26
24
35
36
34
Figure 2
Working State of Processing State Model
7.4 Processing State Model Diagram
7.4.1 Working State of Processing State Model
7.4.2 Working Sub-states of Processing State Model — These states need not to be implemented in all Metrology
equipment but if the equipment has the ability to multiple measurements at a site or provide raw scan date to the user
this is how it is to be implemented.
SEMI E30.5-0302 © SEMI 2001, 20025
28
TAKE MEASUREMENT
TAKE SAMPLE
SAMPLE
COMPLETE
30
31
34
Figure 3
Working Sub-State of Processing State Model
7.5 Processing State Definitions
7.5.1 ABORTED all activity is suspended as a
result of an ABORT command. Any alarm and abort
conditions must be cleared before exit from this state.
The CLEANUP command is available to the operator
or host to transition the equipment from the ABORTED
state to IDLE state.
7.5.2 ABORTING (PROCESSING ACTIVE Sub-state)
the equipment has received an ABORT command.
All normal activity is suspended. The equipment is
taking appropriate action to put the equipment and
material in a “safe state” where possible. Data may be
invalid or not available.
7.5.3 ALARM PAUSED (PAUSE Sub-state) an
alarm has occurred in the Process or Process Pause
states and the equipment is waiting for the alarm to be
cleared.
7.5.4 ALIGN (WORKING Sub-state) the
equipment or operator is performing an alignment of
the material to the equipment. Within this state the
equipment shall refine or establish its SEMI M20
coordinate system and establish any secondary
coordinate systems required.
7.5.5 CHECKING (PROCESS PAUSE Sub-state)
the equipment verifies that the updates made to the
Process Program are valid. This is a similar procedure
to that which is done in SETTING UP before the
equipment is ready to transition to the READY state.
7.5.6 EXECUTING (PROCESS Sub-state) the
equipment is processing material automatically and can
continue to do so without external intervention, but
normally may include interaction with the host or
operator.
7.5.7 IDLE checks for queued process or awaits a
command. IDLE is free of ALARM and error
conditions. Any transitions into this state will clear the
process area.
7.5.8 IDLE with ALARMS an alarm has occurred in
the IDLE state and the equipment is waiting for all
alarms to be cleared.