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SEMI E30.5-0302 © SEMI 2001, 2002 6 7.5.9 INIT  equip ment initialization is occurring. 7.5.10 LOAD ( EXE CUTING Sub-state )  the equipment is determining if processi ng is complete. If not, then the substrate is being…

SEMI E30.5-0302 © SEMI 2001, 20025

TAKE MEASUREMENT

TAKE SAMPLE

SAMPLE

COMPLETE

Figure 3

Working Sub-State of Processing State Model

7.5 Processing State Definitions

7.5.1 ABORTED  all activity is suspended as a

result of an ABORT command. Any alarm and abort

conditions must be cleared before exit from this state.

The CLEANUP command is available to the operator

or host to transition the equipment from the ABORTED

state to IDLE state.

7.5.2 ABORTING (PROCESSING ACTIVE Sub-state)

 the equipment has received an ABORT command.

All normal activity is suspended. The equipment is

taking appropriate action to put the equipment and

material in a “safe state” where possible. Data may be

invalid or not available.

7.5.3 ALARM PAUSED (PAUSE Sub-state)  an

alarm has occurred in the Process or Process Pause

states and the equipment is waiting for the alarm to be

cleared.

7.5.4 ALIGN (WORKING Sub-state)  the

equipment or operator is performing an alignment of

the material to the equipment. Within this state the

equipment shall refine or establish its SEMI M20

coordinate system and establish any secondary

coordinate systems required.

7.5.5 CHECKING (PROCESS PAUSE Sub-state) 

the equipment verifies that the updates made to the

Process Program are valid. This is a similar procedure

to that which is done in SETTING UP before the

equipment is ready to transition to the READY state.

7.5.6 EXECUTING (PROCESS Sub-state)  the

equipment is processing material automatically and can

continue to do so without external intervention, but

normally may include interaction with the host or

operator.

7.5.7 IDLE  checks for queued process or awaits a

command. IDLE is free of ALARM and error

conditions. Any transitions into this state will clear the

process area.

7.5.8 IDLE with ALARMS  an alarm has occurred in

the IDLE state and the equipment is waiting for all

alarms to be cleared.

SEMI E30.5-0302 © SEMI 2001, 2002 6

7.5.9 INIT  equipment initialization is occurring.

7.5.10 LOAD (EXECUTING Sub-state)  the

equipment is determining if processing is complete. If

not, then the substrate is being transferred to the

equipment processing location, such as the stage. A

pre-alignment procedure may be performed prior to the

LOAD state.

7.5.11 PAUSE (PROCESS ACTIVE Sub-state) 

PROCESS is suspended at the next opportunity.

Actions to put the equipment in a “safe state” shall be

performed. The equipment is awaiting a command

(RESUME, PP-UPDATE, STOP or ABORT), or for

alarm(s) to be cleared.

7.5.12 PAUSED (PROCESS PAUSE Sub-state) 

PROCESS shall be suspended and the equipment is

waiting for a command (RESUME, PP-UPDATE,

STOP or ABORT).

7.5.13 PAUSING (PROCESS PAUSE Sub-state) 

PROCESS has been suspended at the next opportunity

and the equipment is put in a “safe state”.

7.5.14 PROCESS (PROCESSING ACTIVE Sub-state)

 this state is the parent of those sub-states which refer

to the active preparation and execution of a Process

Program.

7.5.15 PROCESSING ACTIVE  this state is the

parent of all sub-states where the context of a Process

Program execution exists.

7.5.16 PROCESS PAUSE (PAUSE Sub-state)  the

equipment is free of alarm conditions in the PAUSE

state.

7.5.17 MEASUREMENT COMPLETE (MEASURING

Sub-State)  the equipment has completed collecting

data relative to an alignment location.

7.5.18 MEASURING (WORKING Sub-State)  the

equipment is preforming an action between alignments.

7.5.19 READY (PROCESS Sub-state)  the equipment

is ready to begin processing and is awaiting a START

command from the operator or host. If an

AUTOSTART is included, then the equipment starts

processing immediately.

7.5.20 SAMPLE COMPLETE (TAKE

MEASUREMENT Sub-state)  the equipment

determines if additional samples need to be taken at this

site.

7.5.21 SETTING UP (PROCESS Sub-state)  the

equipment is being set up so that external conditions are

satisfied to start processing the material. This includes

the receipt of any Process Programs and material to be

processed and their validation. Additional information

may come from the host during the processing.

7.5.22 STOPPING (PROCESSING ACTIVE Sub-state)

 the equipment has completed a Process Program or

has been instructed to stop processing and shall do so

gracefully at the next opportunity. All cleanup

necessary is being completed within this state with

regard to material, data, control system, etc. Data is

normally preserved. Any alarm or error condition is

cleared before exit from this state.

7.5.23 TAKE MEASUREMENT (MEASURING Sub-

state)  the equipment is in the process of collecting

data relative to an alignment location. (e.g. Site,

Region, Substrate).

7.5.24 TAKE SAMPLE (TAKE MEASUREMENT Sub-

state)  the equipment collects data from a single

structure or of a single sample.

7.5.25 UNLOAD (EXECUTING Sub-state)  the

substrate is being removed from the processing

location.

7.5.26 WORKING (EXECUTING Sub-state)  the

equipment is processing a specific material.

SEMI E30.5-0302 © SEMI 2001, 20027

7.5.27 Processing State Transition Table

Table 1 Processing State Transition Table

Transition # Current state Trigger New State Actions Comments

1 INIT All equipment

initialization is

complete with no

alarms or error

conditions.

IDLE None If an alarm or error

occurs during INIT, the

equipment shall remain

in this state.

2 IDLE A process is queued or

a command is received.

SETTING UP The set up procedure is

equipment dependent.

Commit has been made

to set up.

3 SETTING UP All setup activity has

completed and the

equipment is ready to

receive a START

command.

READY The equipment is

waiting for a START

command. Start may be

initiated by an

operator.

The selected Process

Program is available for

execution.

4 READY The equipment receives

a START command.

LOAD The equipment

determines if

processing is

completed. If not, it

transfers the next

substrate to the

processing location.

LOAD is an

EXECUTING Substate.

5 EXECUTING The processing is

complete.

STOPPING None Equipment specific.

Supplier must chose

beween LOAD or

UNLOAD states for

completion.

6 PROCESS The equipment has

received a STOP

command.

STOPPING The equipment

unloads the material

and brings the

equipment to a clean

and safe state.

Data is typically

preserved and is valid.

7 PROCESS The equipment has

received an ABORT

command

ABORTING The equipment is put in

a "safe state” if

necessary.

Data may be invalid or

not available.

8 PROCESS An alarm occurs. ALARM

PAUSED

PROCESS activity is

suspended and the

equipment is waiting

for all alarms to be

cleared.

ALARM PAUSED is a

PAUSE Substate.

9 PROCESS The equipment has

received a PAUSE

command.

PAUSING PROCESS shall be

suspended at the next

opportunity. Actions to

put the equipment in a

“safe state” shall be

performed.

PAUSING is a PAUSE

Substate.

10 PROCESS

PAUSED

The equipment has

received a RESUME

command.

PROCESS State

Proceed with the

suspended Substate.

PAUSED is a

PROCESS PAUSE

Substate.

11 CHECKING The equipment has

completed validating

any updates made to the

current Process

Program being

executed. Including a

PP_UPDATE

PROCESS State

Action is appropriate to

the state and the

changes made to the

Process Program

updated.

None