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SEMI E30.5-0302 © SEMI 2001, 2002 13 Variab le name Category Descrip tion Class Format Commen ts M21Data CSV The data ne cessary to establish a n MSEM SEMI M2 1 layout on a silicon wa fer. DVVA L L, 2 1. L ,3 1.<M21 X…

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SEMI E30.5-0302 © SEMI 2001, 2002 12
9.6.2 Status Variables (SV) — are valid at all times. A SV may not be changed by the host but may be changed by
the equipment or the operator. The value of status variables may be queried by the host at anytime using the S1F3/4
or S6F19/20 transactions.
9.6.3 Data Variables (DVVAL) are variables which are valid only upon occurrence of specific collection events.
An attempt to read a data variable at the wrong time shall not generate an error, but the data reported may not have
relevant meaning.
9.6.4 Variable Data (V) this is a class of variable data which includes all the previously defined types of
variables.
Table 4 Data Item Variable List
Variable name Category Description Class Format Comments
AlignList CSV A list of alignment site
information being used by the
currently active Process Program.
DVVAL
L,n
1. <AlignName>
.
.
n.
See Table 5 for
additional
information.
CarrierID CV ID of the Carrier that the
measurement data is associated
with.
DVVAL
A[1..16]
Valid in
processing
substate.
Coord CV The X,Y coordinate for a site in
microns.
DVVAL
L,2
1.<CoordX>
2.<CoordY>
See Table 5 for
additional
information.
Coordsys CV The identification for applicable
coordinate system.
DVVAL
A[1..16]
Options for
silicon wafers are:
SEMI M20,
M20P, SEMI
M21.
Default-Priority CV The default priority given a
location or carrier ID if none is
assigned.
EC
U4
DeltaX CSV The x axis translation between
the origins of two coordinate
systems, in µm.
DVVAL
F4
Units are in
microns.
DeltaY CSV The y axis translation between
the origins of two coordinate
systems, in µm.
DVVAL
F4
Units are in
microns.
ElementID CSV The M21 address for a specific
rectangular element on a
patterned silicon wafer.
DVVAL
I4[2]
M21 row number,
M21 column
number.
ElementList CSV A list of M21 elements where
measurements were attempted.
DVVAL
L,n
1. <ElementID>
.
.
n
See Table 5 for
additional
information.
EquipID CV Unique ID of measurement
equipment.
SV
A[1..16]
Valid in all sub
states.
EquipName CV Name of equipment SV
A[1..16]
Valid in all sub
states.
LotID CV Lot ID that is associated with the
measurement data.
DVVAL
A[1..80]
M20Data CV The silicon wafer size, fiducial
type, and orientation to use.
DVVAL
L,3
1.<WaferSize>
2.<Fiducial>
3. <Orientation>
See Table 5 for
additional
information.
SEMI E30.5-0302 © SEMI 2001, 200213
Variable name Category Description Class Format Comments
M21Data CSV The data necessary to establish an
MSEM SEMI M21 layout on a
silicon wafer.
DVVAL
L,2
1. L,3
1.<M21XSize>
2.<M21YSize>
3. <Tile>
2. L,n
1. L,3
1.<ElementID>
2.<CoordX>
3.<CoordY>
:
n
Coord x and
Coord y are the X
and Y coordinates
in the M20P
coordinate system
of the lower left-
hand corner of the
element. See
Table 5 for
additional
information.
QueuedJobList CSV An ordered list of CarrierID data
items (A[1..16]) of material that
is queued to run. The first item in
the list is the ID of next carrier to
run. A soon as a job specified by
a PROCESS-BLD-GROUP
starts, the CarrierID it specifies is
removed from the head of the list.
SV
L
Offset CSV The difference between the
defined location of a site and the
location at which it is found.
DVVAL
F4[2]
SiteDeltaX,
SiteDeltaY
Operator Action CV Action taken by operator on
equipment’s front panel.
DVVAL
A[1..80]
OperName CV Tool Operator name ECV
A[1..16]
Orientation CV The direction, in degrees, from
the equipment's “0” location for a
wafer's primary fiducial when
initially positioned for
measurements.
ECV
F4
This parameter
has no effect on
the “M20” based
wafer coordinate
system as
discussed in
SEMI standard
SEMI M20.
PP-Name CV The PPID that is being used for
measuring.
SV
A[1..80]
Process SlotList CV The list of cassette slots whose
contents are to be processed.
DVVAL
L,n
1. <SlotID>
.
.
.
L,0 indicates all
slots are to be
processed. See
Table 5 for
additional
information.
SiteDeltaX CSV The x axis translation between
the defined and found locations
of a site, in µm.
DVVAL
F4
Units are in
microns.
SiteDeltaY CSV The y axis translation between
the defined and found locations
of a site, in µm.
DVVAL
F4
Units are in
microns
SiteList CV The list of sites where
measurements are made.
DVVAL
L,n
1.<SiteName>
.
.
n
See Table 5 for
additional
information.
SiteName CV A unique identifier for a site. DVVAL
A[1..16]
SEMI E30.5-0302 © SEMI 2001, 2002 14
Variable name Category Description Class Format Comments
SlotID CV The cassette slot number. DVVAL
U4
WaferID CSV Physical wafer identifier. SV
A[1..24]
WaferIDRead CSV Tool read wafer identifier. SV
A[1..24]
WaferSize CV The nominal diameter of a silicon
wafer.
EC
A[1..16]
mm
XlateData CSV Variable for the equipment to
report the pattern-based
coordinate system offset from the
wafer-based coordinate system
found on the wafer being tested.
SV
L,4
1 <DeltaX>
2 <DeltaY>
3 <Theta>
4 <ScaleFactor>
See Appendix 1
for an example.
See Table 5 for
additional
information.
9.6.5 Data Item Sub-variable List
Table 5 Data Item Sub-Variable List
Data Item Sub-
variables
Description Format Comment
AlignName The identifier given to a alignment site. A[1..16]
CoordX The x coordinate for a site. F4 Units are in microns.
CoordY The y coordinate for a site. F4 Units are in microns.
DeltaX The x axis translation between the origins of two
coordinate systems, in µm.
F4 Units are in microns.
DeltaY The y axis translation between the origins of two
coordinate systems, in µm.
F4 Units are in microns.
ElementID The M21 address for a specific rectangular element
on a patterned silicon wafer.
I4[2] M21 row number, M21 column
number
Fiducial The type of primary fiducial on a silicon wafer. A[1..16] Options are “FLAT” or
“NOTCH”
M21XSize
The M21 element size in the x direction, in µm.
F4 Units are in microns.
M21YSize
The M21 element size in the y direction, in µm.
F4 Units are in microns.
ScaleFactor The scaling factor required by the equipment to
adjust from its SEMI M20 coordinate system to the
coordinate system established through the use of
pattern alignment “alignment site” information. In
most cases, a scaling factor of 1 is expected.
F4
SiteDeltaX The x axis translation between the defined and
found locations of a site, in µm.
F4 Units are in microns.
SiteDeltaY The y axis translation between the defined and
found locations of a site, in µm.
F4 Units are in microns.
SiteName A unique identifier for a site. A[1..16]
THETA (Θ)
The clockwise rotation, in radians, between the
SEMI M20 and M20P coordinate system axes.
F4 Radians
Tile A flag to indicate whether the SEMI M21 layout is
tiled, and in which direction.
A[1..16] Options are:
“NTILE” is untitled “CTILE”
is column tiled “RTILE” is
row tiled