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SEMI E30.5-0302 © SEMI 2001, 2002 19 12.5.10 STOP  complete the current cycle, stop in a sa fe condition and return to the IDLE processing state. Stop has t he intent of stoppi ng the process enti rely. The equi p ment …

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SEMI E30.5-0302 © SEMI 2001, 2002 18
12 Remote Commands
12.1 The purpose of this section is to identify the
MSEM required remote commands, command
parameters, and valid commands versus MSEM states.
12.2 Requirements
The following capabilities are
required:
• StartProcessing
• Stop Processing
• Temporaly Suspend Processing
• Resume Processing
• Abort Processing
• Select Process Programs, Material and/or Sites to
Measure
• Report Location of Material Found within a
cassette
12.3 All the remote commands defined by MSEM are
required unless they have been qualified by the
statement “if the equipment supports this functionality
it shall use this command”. Then, they are only required
if the equipment supports the functionality necessary to
support the command. A good example of this is the
MAP-CASSETTE command if the equipment does not
have the hardware necessary to scan a cassette for the
presence of substrates in slots then the command is not
required by the MSEM. The alphanumeric strings
defined by MSEM for RCMD and CPNAME are
required.
12.4 Definitions
12.4.1 Host Command Parameter (CPNAME/CPVAL)
— a parameter name/value associated with a particular
host command (S2,F49). This document will specify
unique names (CPNAMEs) and values (CPVALs) for
many command parameters. Note that if there are no
associated parameters a zero-length list is sent.
12.5 Remote Commands Description — this section
describes required functionality, suppliers may
implement additional commands. The following remote
commands (RCMDs) must be supported as described
below.
NOTE 2: The terms “current cycle” and “safe point” used
below are to be defined by the supplier.
12.5.1 ABORT terminate the current cycle prior to
its completion. Abort has the intent of immediately
stopping the process and is used because of abnormal
conditions. Abort makes no guarantee about the
subsequent condition of material except as noted in the
CPNAME ABORT-LEVEL description.
12.5.2 CLEANUP
Process Program deselection,
removal of all material to output locations and any
equipment specific activities needed to transition into
the IDLE state. Completion of this command should
generate a collection event report.
12.5.3 NEXT-MATERIAL
processing of the current
substrate is halted at the first safe point and unloaded to
the target cassette location. Next-material has the intent
of allowing the host to skip measurement of the current
substrate. This is a trigger for processing state
transition from WORKING to UNLOAD.
12.5.4 PAUSE
suspend processing temporarily at
the next safe point. Pause has the intent of resuming
the process at the same point where it was paused.
RESUME or PP-UPDATE may be used to resume the
process.
12.5.5 PP-ASSIGN
instructs the equipment to assign
a process to a carrier ID(s)/location(s) and place the
exchange station in the process queue with the given
priority. Only one assignment is allowed for a exchange
station. Without specifying a priority, the material is
queued with the default priority. Material with equal
priority are queued in the order the PP-ASSIGN
commands are received. If the equipment supports the
functionality of queuing material, it will use this
command.
12.5.6 PP-SELECT
instructs the equipment to make
the requested Process Program(s) available in the
execution area. Additionally, to reduce the number of
Process Programs on the equipment, PP-SELECT may
define the material to be measured, measurement site
locations, and/or the information needed for site
alignment; default values shall be used if this
information is not specified. This is a trigger for the
processing state transition from IDLE to SETTING UP.
All Process Programs specified in the command are to
be validated
12.5.7 PP-UPDATE
provides the ability to alter
Process Program variables during the PAUSED
processing state. Any CPNAMEs specified in PP-
UPDATE will replace the previous definitions. This
command will RESUME the process. If the PP-
UPDATE fails, the Process Program variables present
prior to the PP-UPDATE are retained. If no parameters
values are specified, the defaults are used.
12.5.8 RESUME
resume processing from the point
where the process was paused. This is the trigger for
processing state transition 10, from PROCESS PAUSE.
12.5.9 START
instructs the equipment to initiate
processing. This is the trigger for the processing state
transition from READY to LOAD.
SEMI E30.5-0302 © SEMI 2001, 200219
12.5.10 STOP
complete the current cycle, stop in a safe condition and return to the IDLE processing state. Stop
has the intent of stopping the process entirely. The equipment is not required to support the continuation of
processing.
12.6 Host Command Parameters Names (CPNAME)
Table 12 Host Command Parameter Table
CPNAME
CPVAL
Description Range Format
CARRIERBLD L,2
1. L,2
1. CP-CARRIERID **
2. CARRIERID
or
1. L,2
1. CP- LOCATIONID **
2. (STORAGE)ID
2. L,N
1. L,2
1. PROCESS-BLD-GROUP
2. L,M
:
N. L,2
1. PROCESS-BLD-GROUP
** Both CP-CARRIERID and CP-LOCATION may be
included if no carrier ID reader is available.
CP-ABORT-LEVEL MSEM defined abort levels
HALT - halt,
goto ABORTED
CLEANUP - halt, preform cleanup procedure,
goto ABORTED
“HALT”
“CLEANUP”
A[7]
CP-ALIGNLIST L,n
1. CP-ALIGNNAME
:
n.
For the SEMI M20 or M20P Coordinate system
CP-ALIGN-DEF-LIST As defined in Section 9
CP-ALIGNNAME Alignment name A[1..80]
CP-AUTOSTART Defines if a START command is required from an
external source (operator or host) to exit the READY
state. 0 = START command required,
1 = AUTOSTART no external START command
required to begin execution.
0–1 U1
CP-CARRIERID ID of carrier that the measurement data is associated
with.
A[1..16]
CP-ELEMENTID The M21 address for a specific rectangular pattern on
the wafer.
I4[2]
SEMI E30.5-0302 © SEMI 2001, 2002 20
CPNAME
CPVAL
Description Range Format
CP-ELEMENTLIST L,n
1. <CP-ELEMENTID>
:
n.
CP-LOCATIONID Unique identifier of the location to be used for the
“CARRIERBLD” assignment.
U4
CP-LOTID lot id A[1..80]
CP-MATERIALLIST L,n
1. <CP-SLOTID or CP-WAFERID>
:
n.
CP-M21-ALIGNLIST L,n
1. CP-ALIGNNAME
:
n.
For the SEMI M21 Coordinate system
CP-M21-SITELIST L,n
1. CP-SITENAME
:
n.
For the SEMI M21 coordinate system
CP-PPNAME Process Program name A[1..80]
CP-PRIORITY assignment priority 0–9
0–highest
priority
U4
CP-SITELIST L,n
1. CP-SITENAME
:
n.
For the SEMI M20 or M20P coordinate system
CP-SITE-DEF-LIST As defined in Section 9.
CP-SITENAME unique identifier for a site A[1..16]
CP-SLOTID slot number 1–n U4
CP-SLOTLIST Specifies carrier slots that contains substrate to
measure.
L,n
1. CP-SLOTID
:
n.
0 indicates all
slots
CP-WAFERID Physical wafer identifier A[1..24]