semi合集-English.pdf - 第1493页

SEMI E30.5-0302 © SEMI 2001, 2002 21 CPNAME CPVAL Description Ran g e Format PROCESS-BLD-GROUP L, n 1. L, 2 1. CP-PPBUIL DID 2. PPBUILDGROUP ID 2. L, 2 1. CP-PPN AME 2. PPNAME 3. L, 2 1. CP-LOTID 2. LOTID 4. L, 2 1. CP-A…

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SEMI E30.5-0302 © SEMI 2001, 2002 20
CPNAME
CPVAL
Description Range Format
CP-ELEMENTLIST L,n
1. <CP-ELEMENTID>
:
n.
CP-LOCATIONID Unique identifier of the location to be used for the
“CARRIERBLD” assignment.
U4
CP-LOTID lot id A[1..80]
CP-MATERIALLIST L,n
1. <CP-SLOTID or CP-WAFERID>
:
n.
CP-M21-ALIGNLIST L,n
1. CP-ALIGNNAME
:
n.
For the SEMI M21 Coordinate system
CP-M21-SITELIST L,n
1. CP-SITENAME
:
n.
For the SEMI M21 coordinate system
CP-PPNAME Process Program name A[1..80]
CP-PRIORITY assignment priority 0–9
0–highest
priority
U4
CP-SITELIST L,n
1. CP-SITENAME
:
n.
For the SEMI M20 or M20P coordinate system
CP-SITE-DEF-LIST As defined in Section 9.
CP-SITENAME unique identifier for a site A[1..16]
CP-SLOTID slot number 1–n U4
CP-SLOTLIST Specifies carrier slots that contains substrate to
measure.
L,n
1. CP-SLOTID
:
n.
0 indicates all
slots
CP-WAFERID Physical wafer identifier A[1..24]
SEMI E30.5-0302 © SEMI 2001, 200221
CPNAME
CPVAL
Description Range Format
PROCESS-BLD-GROUP L, n
1. L, 2
1. CP-PPBUILDID
2. PPBUILDGROUPID
2. L, 2
1. CP-PPNAME
2. PPNAME
3. L, 2
1. CP-LOTID
2. LOTID
4. L, 2
1. CP-AUTOSTART
2. START
5. L, 2
1. CP-MATERIALLIST
2. L, n
1. CP-SLOTID
:
n.
or
1. CP-WAFERID
2. L, n
:
n.
n ≥ 2
List of n data
items
SEMI E30.5-0302 © SEMI 2001, 2002 22
CPNAME
CPVAL
Description Range Format
PROCESS-BUILD-
GROUP(continues)
6. L, 2
1. CP-SITE-DEF-LIST
2. SITE-TABLE-NAME
7. L, 2
1. CP-SITELIST
2. L, n
1. CP-SITENAME
:
n.
8. L, 2
1. CP-ALIGN-DEF-LIST
2. ALIGN-TABLE-NAME
9. L, 2
1. CP-ALIGNLIST
2.L, n
1. CP-ALIGN-NAME
:
n.
10. L, 2
1. CP-ELEMENTLIST **
2. L, n
1. CP-ELEMENTID
:
n.
**CP-ELEMENTLIST is required when using the
SEMI M21 coordinate system in the definition of an
ALIGNNAME or SITENAME .
10. L, 2
1. CPNAME
supplier defines Process
Program Variable Parameters
2. CPVAL
CP-PPNAME is required, CP-SLOTLIST, CP-
SITELIST, and CP-ALIGNLIST are optional.