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SEMI E32-0997 © SEMI 1994 , 1997 27 Event Typi cal Data Committe d To Transfer TRAtomic ID, Timestamp Waiting for StartHandoff TRAtomicI D, Times ta mp Transfer Job P aused Ti mestamp Transfer Job S tarted Timesta mp Ato…

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4.4.3 Parameter/Attribute Definition s — This section
gives further details on parameters not sufficiently
defined above. It also defines attributes of the defined
object types. Note that some parameters also serve as
attributes (e.g., TRJobName).
AtomicSpec — If a list of AtomicSpec parameters is
supplied, the order is important. The equipment shall
execute atomic transfers in the order specified on a per–
port basis.
AttributeID/AttrData — An attribute is a characteristic
which applies to all instances of that (type of) object.
Thus, the attributes available for an object depend upon
the ObjType. The three object types available for
material movement are TransferJob and
AtomicTransfer, and Equipment. Below are listed the
defined attributes for each.
Object (i.e., any object): ObjectID, ObjType.
TransferJob: TRJobState, TRAtomicList,
TRJobName, TRJobID (=ObjectID).
AtomicTransfer: TRAtomicState, TRLink,
TRPort, TRObjName, TRRole, TRRecipe,
TRPartner, TRPartnerPort, TRDirection, TRType,
TRLocation, TRAutoStart, TRObjType,
TRAtomicID (=Object ID).
Equipment: Name (=ObjectID).
ErrorCode — This parameter is used to report the
reasons why an activity was unsuccessful. This applies
to the TRJob Create, TRJobComplete, and the
TRJobCommand. While it is impossible to define all
possible errors, the following is a list of values which
may apply in many cases:
TRJobCreate:
• Parameters improperly specified.
• Insufficient parameters specified.
• Queue full or queuing not allowed.
• Error in atomic transfer specification.
• Material Location Status does not match Transfer
Specification.
• Primary Transfer Partner Role not supported.
• Active Participation not supported.
TRJobComplete:
• Failed due to hardware error.
• Failed due to transfer partner error.
• Failed due to error during atomic transfer.
• Transfer Job aborted by host.
• Transfer Job stopped by host.
• Transfer Job canceled by host.
TRJobCommand:
• Parameters missing or improperly specified.
• Requested service not available from this
equipment.
• Cancel not allowed after transfer start.
• Unknown Transfer Job.
GetAttribute:
• Invalid object type.
• Unknown objectid.
• Invalid attribute.
ObjType — The type or class of the object of interest.
The three types of objects contained in this document
are TransferJob, AtomicTransfer, and Equipment.
Timestamp — The format for this Text string is
YYYYMMDDhhmmsscc where:
YYYY= Year
MM= Month (01–12)
DD= Day (01–31)
hh= Hour (00–23)
mm= Minute (00–59)
ss= Second (00–59)
cc= Hundredths of Second (00–99)
TRCmdName/CmdParameter — Possible values are:
Command Parameter
CANCEL none
PAUSE none
RESUME none
ABORT none
STOP none
STARTHANDOFF TRAtomicID
TREventID/TREventData — The following table shows
the defined events and the data which are required to be
available. Any attribute of the object should be
available for reporting with an associated collection
event.
SEMI E32-0997 © SEMI 1994, 199727
Event Typical Data
Committed To Transfer TRAtomicID, Timestamp
Waiting for StartHandoff TRAtomicID, Timestamp
Transfer Job Paused Timestamp
Transfer Job Started Timestamp
Atomic Transfer Started TRAtomicID, Timestamp
Atomic Transfer Complete TRAtomicID, Timestamp
TRJobMS — Identifies which transfer job milestone is
being alerted to the host. Possible values are:
• Transfer Job Started.
• Transfer Job Complete.
TRObjType — Identifies the type of object to be
transferred. This parameter is used only in cases where
a port is capable of transfers involving different object
types. As an example, a list of possible values might
include:
• Wafer Reticle Cassette
• 100 mm Wafer Carrier
• 125 mm Wafer Carrier
• 150 mm Wafer Carrier
• 200 mm Wafer Carrier
• 100 mm Wafer
• 125 mm Wafer
• 150 mm Wafer
• 200 mm Wafer
Attributes: (Note: Some parameters above are also
attributes.)
Name — Each equipment must have a unique Name
attribute, a factory-defined Text string.
TRAtomicList — List of the atomic transfers
(TRAtomicIDs) contained within the specified transfer
job. This is an attribute of a transfer job and is specified
in the GetAttribute service.
TRAtomicState — Attribute of an atomic transfer.
Possible values are defined by the state models defined
in Sections 4.2.3 and 4.3.3.
TRJobState — An attribute of transfer job. Possible
values are defined by the state models defined in
Sections 4.2.2 and 4.3.2.
4.5 Object Attribute Definitions — This section
defines the attributes of those objects required for
Material Movement Management: Equipment,
TransferJob, and AtomicTransfer.
4.5.1 Equipment — The attributes of the Equipment
object are defined in Table 4.5.
Table 4.5 Equipment Object Definition Table
Attribute Name Definition Access Requirement Form
ObjType Object type. RO Y Text = “Equipment”
ObjID User-definable name. RW Y Text
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4.5.2 TransferJob Object — The attributes of the TransferJob object are defined in Table 4.6. A TransferJob is
created by the equipment when it accepts a transfer job create request from the host, and its attributes are based upon
that request.
Table 4.6 TransferJob Object Definition Table
Attribute Name Definition Access Requirement Form
ObjType Object type. RO Y Text = “TransferJob”
ObjID Textual version of TRJobID. RO Y Text
TRJobID Identifier assigned by the equipment. RO Y Unsigned integer
TRJobName Host-created job identifier. RO Y Text
TRJobState Current state. RO Y Enumerated:
TRJobQueued,
TRJobActive,
TRJobComplete
TRAtomicList List of (TRAtomicID). RO Y List of unsigned integers
4.5.3 AtomicTransfer Object — The attributes of the AtomicTransfer object are defined in Table 4.7.
AtomicTransfer objects are created by the equipment when it accepts a transfer job create request from the host, and
its attributes are based upon that request.
Table 4.7 Atomic Transfer Object Definition Table
Attribute Name Definition Access Requirement Form
ObjType Object type. RO Y Text = “AtomicTransfer”
ObjID Textual version of TRAtomicID. RO Y Text
TRAtomicID Identifier assigned by the equipment. RO Y Unsigned integer
TRAtomicState Current state. RO Y Enumerated:
TRAtomicActive,
TRAtomicComplete
TRLink Assigned by the host to identify an atomic transfer. RO Y Unsigned integer
TRPort Material I/O Port identifier. RO Y Unsigned integer
TRObjName Textual identifier of transfer object. RO N Text
TRObjType Material type of transfer object. RO N Enumerated
TRRole Equipment’s role. RO Y Enumerated:
Primary or Secondary
TRRecipe Recipe identifier for transfer recipe. RO N Text
TRPartner Name of equipment’s partner. RO Y Text
TRPartnerPort Identifier for partner’s port. RO N Unsigned integer
TRDirection Indicates whether the equipment will send or receive. RO Y Enumerated:
Send
Receive
TRType Indicated the equipment is to be active or passive. RO Y Enumerated:
Passive
Active
TRLocation Identifies location on the equipment of the source (or
destination) of the transfer object.
RO N Unsigned integer
TRAutoStart Indicates whether the equipment may automatically start
the handoff without waiting for a StartHandoff
command.
RO Y Boolean:
Automatically start (TRUE).
Wait for StartHandoff (FALSE).