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SEMI E32-0997 © SEMI 1994 , 1997 44 ownership ...................................................................................................................... ...................... 2.0, 4 .1.2, A1-4.3 P parallel .…

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SEMI E32-0997 © SEMI 1994, 199743
G
GEM.................................................................................................................................................................... 1.2, 1.3
GetAttribute ...................................................................................................................................................4.4.2, 4.4.3
H
handoff................................................... 3.1, 4.1.1–4.1.6, 4.2.1.2, 4.2.3, 4.3.1, Table 4.4, 4.4.2, 5.1, 5.1.1, 5.2.1, 5.4.3
HOCancelAccept .................................................................................................................................................... 5.4.3
HOCancelReady......................................................................................................................................5.3, 5.4.1, 5.4.3
HOCmd..........................................................................................................................................................5.4.2, 5.4.3
HOCmdParm..................................................................................................................................................5.4.2, 5.4.3
HOCommand...................................................................................................5.2.1, 5.4.1, 5.4.2, 5.4.3, A1-4.1–A1-4.3
HOErrorCode.................................................................................................................................................5.4.2, 5.4.3
HOErrorText........................................................................................................................................................... 5.4.2
HOHalt.................................................................................................................................................5.4.1, 5.4.2, 5.4.3
HOReady..............................................5.2.1, Figure 5.1, Figure 5.2, 5.3, 5.4.1, 5.4.2, A1-3.2, A1-4.1, A1-4.2, A1-4.4
HOStatus................................................................................................................................................................. 5.4.2
HOStatusCode......................................................................................................................................................... 5.4.2
HOVerify ..................................................................................................... 5.2.1, 5.4.2, 5.4.3, A1-4.1, A1-4.2, A1-4.4
HOVerify Response...................................................................................................................... 5.2.1, A1-4.1, A1-4.2
human transfer agent............................................................................................................................................ A1-4.5
I
INIT .............................................................................................................................................. A1-1.1, Table A1-1.2
input port.................................................................................................................................................................... 2.0
interactive............................................................................................................................2.0, 4.1, 4.1.1, 5.4.2, A1-4.2
interactive transfer........................................................................................................................ 2.0, 4.1, 4.1.1, A1-4.2
interference ...................................................................................................................................................... 2.0, 4.2.3
interfering................................................................................................................................................................... 2.0
L
linked lithography................................................................................................................................................ A1-4.4
location....................................................................................1.2, 2.0, 3.2, 4.1.1, 4.1.6, 4.2.2, 4.2.3, 4.4.2, 4.4.3, 5.4.2
M
macro level......................................................... 2.0, 3.1, 4.1.1, 4.2.1–4.2.1/Figure 4.3, 4.4, 5.1.2, 5.2.1, 5.1.2, A1-3.1
material location..............................................................................................2.0, 4.1.1, 4.1.7, 4.2.3, 4.4.3, 5.4.2, 5.4.3
micro command ................................................................................................................................................... A1-3.2
micro level .................................................................................... 2, 3.1, 3.3, 4, 4.1.1, 4.1.5, 4.2.1.2, Table 4.2, 5 (all)
micro move ....................................................................................................................................................5.1.1, 5.2.1
MoveTo................................................................................................................................................................... 5.4.3
moving ...........................................................................................................................................................2.0, 4A.1.2
N
NOT ABORTING........................................................................................................4.3.2, Table 4.3, 4.3.3, Table 4.4
NOT PAUSED........................................................................... 4.3.2–Table 4.3, 4.3.3, Table 4.4, A1-1.1, Table A1-1
NOT STOPPING ................................................................................................................................... 4.3.2, Table 4.3
O
ObjectID.........................................................................................................................................................4.4.2, 4.4.3
ObjID ........................................................................................................................................................Tables 4.5-4.7
ObjType ................................................................................................................................ 4.4.2- 4.43, Tables 4.5-4.7
output port........................................................................................................................................................ 2.0, 4.1.7
SEMI E32-0997 © SEMI 1994, 1997 44
ownership............................................................................................................................................ 2.0, 4.1.2, A1-4.3
P
parallel .......................................................................................1.3, 3.1, 4.1.3/ 4.1.4, 4.1.7, 4.1.6, 5.1.2, 5.2.2, 4.A.1.2
passive transfer.................................................................................................................... 2.0, A1-4.1, A1-4.3, A1-4.5
passive transfer partner ................................................................................................................................. 2.0, A1-4.1
pause .........................................................................................4.2.2, 4.3–4.3.1, 4.3.2, 4.3.2, Table 4.33, 4.4.3, A1-1.1
PAUSED........................................................................... 4.3.1, 4.3.2, Table 4.3, 4.3.3,Table 4.4, A1-1.1, Table A1-1
PAUSING ............................................................................... 4.3.1, 4.3.2, Table 4.3, 4.3.3, A1-1.1/ Table A1-1, A1-3
physical transfer............................................................................................................................2.0, 4.0, 4.2.1.2, 5.1.2
Pick ......................................................................................................................................................................... 5.4.3
Place................................................................................................................................3.0, 4.2.2, 4.3.1, 5.4.3, 4.A.1.2
port............................................................................................. 2.0, 3.2, 4.1.1–4.2.1.2, 4.2.2–4.3.1, 4.3.2, 4.3.3, 5.2.1,
......................................................................................................... 5.4.2, 5.4.3, A1-1–4A1.2, A1-3.1, A1-4.1–A1-4.3
PORT IDLE ......................................................................................................................................................... A1-3.1
port resources.......................................................................................................................................4.1.1, 4.2.2, 4.2.3
primary transfer partner ..........................4.1, 4.1.1, 4.2.3, Table 4.2, 4.4.3, 5.2.1, 5.4.1, 5.4.2, A1-4.1, A1-4.2, A1-4.4
program................................................................................................................................................................ A1-4.3
Q
queue.......................................................................4.1.6, 4.2.1.1, 4.2.2, Table 4.1, 4.2.3, 4.3.1, 4.3.2, Table 4.3, 4.4.3
queuing.................................................................................................................................................4.1.6, 4.2.2, 4.4.3
R
receiving port................................................................................................................................................ 2.0, A1-4.1
recipe.......................................................................................................................................4.1.5, 4.2.1.1, 4.4.2, 5.2.1
Release..........................................................................................................................4.1.1, 4.1.6, 4.2.3, 5.4.3, A1-1.1
report................................................................................................................................................4.2.2, 4.4.3, 4.A.1.2
resource..........................................................................................................................................................4.1.1, 4.1.7
resources ........................................................................................................................................................4.1.1, 4.1.4
RESTORE.................................................................................. 4.1.1–4.1.7, 4.1–4.2.2, 4.2.3, A1-3.1, A1-4.1, A1-4.2,
Retract..................................................................................................................................................................... 5.4.3
Retrieve................................................................................................................................................................... 5.4.3
robot.........................................................................................2.0, 3.0, 3.2, 4.1.4, 5.4.3, A1-1, 4A.1.2, A1-4.1, A1-4.3
S
secondary transfer partner.............................................................................4.1.1, 4.1.5, 4.2.1.1, 4.2.1.2, 5.4.2, A1-4.2
SECS...................................................................................................................................................1.2, 1.3, 4.4, 5.2.2
SECS-I .................................................................................................................................................................... 5.2.2
SECS-II...................................................................................................................................... 1.2, 1.3, Figure 1.1, 4.4
SELECT ATOMIC TRANSFER...............................................................................................4.2.2, Table 4.1.1, 4.3.2
sending port................................................................................................................................................................ 2.0
sequence...................................................................................4.1, 4.1.5, 4.1.7, 4.2.2, 4.2.3, 5.1.1, 5.1.2, 5.4.3, A1-4.3
sequential ................................................................................................................................................... 4.1.3, A1-4.3
sequential moves.................................................................................................................................................. A1-4.3
setup..................................................2.0, 4.1.1–4.1.5, 4.2.1–4.2.1.2, 4.2.3–4.3.1, 4.3.3, 5.2.1, A1-3.1, A1-4.1, A1-4.2
static.......................................................................................................................................2.0, 4.1.4, 4.2.3, Table 4.2
static port..........................................................................................................................................2.0, 4.2.3, Table 4.2
StatusCode .............................................................................................................................................................. 4.4.2
stop..........................................................................4.1.1, 4.2.2, 4.3, 4.3.1–4.3.2, 4.3.3, Table 4.4, 4.4.3, 5.4.1, A1-3.2
SEMI E32-0997 © SEMI 1994, 199745
STOPPING ............................................................................................................................................ 4.3.2, Table 4.3
Store....................................................................................................................................................................... 5.4.3
T
timeout ................................................................................................................................................................ A1-3.2
transfer ................................................................................... 1.2, 1.4, 2.0, 3.1–4.2.2, (4.2.2–4.4.1), 4.4.3, 5.1.1–5.2.1,
................................................................................................................................. 5.2, 5.3, 5.4.2, 5.4.3, A1-1–A1-4.4
transfer agent............................................................................................1.2, 2.0, 3.0, 4.1.3, 4.1.6, 4.1.7, 4.2.3, A1-4.5
Transfer Complete................................................................................................................................................ 4.2.1.2
transfer envelope...........................................................................................................................2.0, 5.1.1, 5.1.2, 5.4.1
transfer error ........................................................................................................................................................ A1-3.2
transfer job.................................... 3.1, 4.1.1, 4.1.4, 4.1.7, 4.2.1, 4.2.1.1, A1-1, A1-1.1, A1-2, A1-3.1, A1-3.2, A1-4.1
Transfer Job Acknowledge .................................................................................................................................. 4.2.1.1
TRANSFER JOB ACTIVE ...........................................................................................................................4.2.2, 4.3.2
TRANSFER JOB CANCELED....................................................................................................................4.3.2, 4.4.3
TRANSFER JOB CREATED..........................................................................................................1.4, 4.2.2, Table 4.1
TRANSFER JOB QUEUED........................................................................................4.2.2, Table 4.1, 4.3.2, Table 4.3
Transfer Job Started...............................................................................4.2.1.2, 4.2.2, Table 4.1, 4.4.3, A1-4.1, A1-4.2
transfer object ......................................3.2, 4.1.2, 4.1.7, AtomicSpec Table, 5.1.1, 5.2.1, 5.3, 5.4.2, 5.4.3, A1-2, A1-3
transfer partner................................................... 2, 3, 4.1, 4.1.1, 4.1.4, 4.1.5, 4.2.1, 4.2.1.1, 4.2.1.2, 4.2.2, 4.3.1, 4.4.3,
.................... 5, 5.1.1, 5.1.2, 5.2.1, 5.2.1, 5.2.2, 5.3, 5.4.1, A1-3, A1-3.1, A1-3.2, A1-4.4.1, A1-4.4, A1-4.4.1, A1-4.5
Transfer Ready............................................................................................................................................4.2.1.2, 4.2.3
transfer recipe.......................................................................................................................................4.1.5, 4.4.2, 5.2.1
transfer specification..................4, 4.1, 4.1.5, 4.2.1.1, 4.4.3, A1-3, A1-3.1, A1-3.2, A1-4.4.1, A1-4.3, A1-4.4, A1-4.5
transfer state model .............................................................................................................4.2.2, 4.2.3, Table 4.2, 4.3.3
transfer system controller...........................................................................................................................1.2, 2.0, 4.1.6
Transfer Verify........................................................................................................................................................ 4.2.3
TRANSFERRING ........................................................................................................................4.2.3, Table 4.2, 5.2.1
TRAtomicError....................................................................................................................................................... 4.4.3
TRAtomicID .................................................................................................................................................... Table 4.7
TRAtomicList .................................................................................................................................................. Table 4.6
TRAtomicState ................................................................................................................................................ Table 4.7
TRAutoStart..................................................................................................................................4.4.2, 4.4.3, Table 4.7
TRCmdParameter ..........................................................................................................................................4.4.2, 4.4.3
TRCmdType ..................................................................................................................................................4.4.2, 4.4.3
TRDirection ........................................................................................................................4.4.2, 4.4.3, 5.4.2, Table 4.7
TRErrorCode .................................................................................................................................................4.4.2, 4.4.3
TRErrorText............................................................................................................................................................ 4.4.2
TRJobID........................................................................................................................................................... Table 4.6
TRJobName ..................................................................................................................................4.4.2, 4.4.3, Table 4.6
TRJobState....................................................................................................................................................... Table 4.6
TRLink......................................................................................................................4.4.2, 4.4.3, 5.2.1, 5.4.2, Table 4.7
TRLocation .........................................................................................................................4.4.2, 4.4.3, 5.4.2, Table 4.7
TRObjID ..............................................................................................................................................4.4.2, 4.4.3, 5.4.2
TRObjName..................................................................................................................................................... Table 4.7
TRObjType .........................................................................................................................4.4.2, 4.4.3, 5.4.2, Table 4.7
TRPartner............................................................................................................................4.4.2, 4.4.3, 5.4.2, Table 4.7