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SEMI E36-0704  1995, 2004 2 • associated information models such as SGML and XML Document Type Definit ions (DTDs) and schema, and • the documentation for t hese information m odels, including at least a com prehensive …

SEMI E36-0704  1995, 2004

SEMI E36-0704

SEMICONDUCTOR EQUIPMENT MANUFACTURING INFORMATION

TAGGING SPECIFICATION

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on December 18, 1998. Initially available at www.semi.org

February 1999; to be published June 1999. Originally published 1995; previous published revision February

1998.

This document replaces SEMI E36-0298 in its entirety.

NOTICE: The designation of this standard was updated during the 0704 publishing cycle to reflect the creation of

SEMI E36.1.

NOTE: The Document Type Definitions, schemas, and

documentation defined in other parts of Semiconductor

Equipment Manufacturing Information Tagging may be

used freely without permission or payment of royalties

or other licensing charge, provided this source and/or its

associated specifications are cited.

1 Purpose

The purpose of Semiconductor Equipment

Manufacturing Information Tagging is to define a

markup philosophy, a markup framework, and an

information markup which is rich enough to facilitate:

• Electronic interchange and distribution of

information;

• Quality hardcopy printing and screen display of

information;

• Consistent high-precision online searching; and

• Reuse and repurposing of information for such

applications as integrating source material into

training material and online support applications.

The intent of this document is to create an information

interchange specification, not an authoring specification

or an electronic presentation specification.

Semiconductor Equipment Manufacturing Information

Tagging will define the markup necessary for

exchanging documents electronically, for facilitating

retrieval of information content, and for validating

information interchanges.

2 Scope

2.1 Information Scope - Semiconductor Equipment

Manufacturing Information Tagging is intended to

cover the types of technical and commercial

information typically needed to support the selection,

installation, use, and maintenance of semiconductor

manufacturing equipment.

The following list gives examples of information types

within scope; this list is not exhaustive.

• Operations Manuals/Guides — typically used by

equipment operators at customer sites to perform

the tasks for which the equipment was designed.

• Installation Manuals — typically used by supplier

and customer engineers to install the equipment at

the customer site.

• Maintenance Manuals — typically used by trained

maintenance technicians at customer sites to

perform repair and upkeep of equipment.

• Maintenance Schedules — typically used by site

coordinators and customer facility managers to

schedule and document normal preventive

maintenance.

• Spares/Parts Lists — typically used by on-site field

service engineers and customers to maintain a

sufficient stocking level to ensure prompt delivery

of parts.

• Repair/Troubleshooting Manuals — typically used

by equipment operators and qualified maintenance

technicians to identify and correct equipment

problems.

• Release Notes — typically used by operators,

technicians and system administrators to identify

changes in software configuration.

• Training Manuals — typically used by supplier

training personnel and customers to train operators

and maintenance technicians.

Additional information on potential use and re-use of

these information types in electronic form can be found

in the Auxiliary Information for this specification.

2.2 Content of SEMI E36 - Semiconductor Equipment

Manufacturing Information Tagging will be issued in

three parts:

• this base document,

SEMI E36-0704  1995, 2004

• associated information models such as SGML and

XML Document Type Definitions (DTDs) and

schema, and

• the documentation for these information models,

including at least a comprehensive Tag Library.

Semiconductor Equipment Manufacturing Information

Tagging does not include implementation advice,

suggestions, or notes on how to implement the models

described here. This material will be presented in the

form of Auxiliary Information associated with

Semiconductor Equipment Manufacturing Information

Tagging.

Semiconductor Equipment Manufacturing Information

Tagging by design does not include tutorials on SGML,

XML, how to use the defined elements or modules, or

how to create document content.

2.3 SGML and XML – Any documents marked up

according to Semiconductor Equipment Manufacturing

Information Tagging will be “valid” XML documents:

that is, “well-formed” XML documents that have an

associated document type declaration and that comply

with the constraints expressed therein. Since valid

XML documents are by definition type-valid SGML

documents, such documents will be valid SGML

documents as well.

Initially, information models will be maintained in both

XML and SGML, with all changes made in parallel.

SEMI will issue a dual set of models whenever a

change is made, and both will always be (within the

limits of their syntax) the same. Although parallel

maintenance is unfortunate, it is intended to make it

easier for members to create documents using current

SGML or XML tools. As Web-SGML

implementations and alternative XML schema syntax

become more common, modules may be maintained in

other syntactic forms.

2.4 Examples of SEMI Content Specifications - There

are other SEMI standards and specifications that

regulate the content of a document. Semiconductor

Equipment Manufacturing Information Tagging is

expressly not in conflict with any of them, since it

specifies only how to identify the content present in the

documents, and in some contexts, how to electronically

structure the content. Semiconductor Equipment

Manufacturing Information Tagging does not address

what information is to be included. Examples of SEMI

content-related or content guideline-related standards

and specifications can be seen in section 7.

3 Referenced Documents

Semiconductor Equipment Manufacturing Information

Tagging references the following information

standards, which should be referred to in their entirety

for full details:

3.1 ISO Standards

International Standard for SGML; ISO-8879-1986 as

modified by Amendment 1, of 1988

HyTime Standard ISO 10744 revision 2, which is

referenced for hypertext linking

3.2 Other references

The Extensible Markup Language (XML)V 1.0

Recommendation of the World Wide Web Consortium

(W3C)

The draft W3C specifications for Extensible Linking

Language (XLL).

4 Terminology

4.1 Attribute - An attribute is a markup construct that

resides within the start tag of an element to provide

additional information about the element. (Note: the

start tag is the tag that is placed directly before the

element in the datastream and determines where the

element begins.)

4.2 Conforming Authoring Application - A conforming

authoring application must be able to produce

conforming documents. There is no requirement that all

internal work in the application be performed in the

markup described by Semiconductor Equipment

Manufacturing Information Tagging, only that the end

product, exported for interchange, must be a

conforming document.

4.3 Conforming Document - A conforming document is

one that meets the markup rules and specific

information models defined in Semiconductor

Equipment Manufacturing Information Tagging for the

class of document. This specification comprises three

parts: this base document, a set of information models,

and the documentation for those models. A conforming

document must conform to all three parts.

A conforming document created by one application

must be interchangeable with a conforming application

without significant information loss.

NOTE: Explicit rendering instructions such as font

family and type size are not considered to be significant

information.

ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-

1211 Genevè 20, Switzerland. http://www.iso.ch

World Wide Web Consortium, Massachusetts Institute of

Technology Laboratory for Computer Science, 545 Technology

Square, Cambridge, MA 02139. http://www.w3.org

SEMI E36-0704  1995, 2004

4.4 Conforming Element - A conforming element is

one that uses the names and markup rules defined in

Semiconductor Equipment Manufacturing Information

Tagging for the class of element. A conforming element

created by a conforming application must be

interchangeable with another conforming application

without information loss.

4.5 Conforming Rendering Application - Rendering

(presentation) is the process and means by which the

elements in a document shall be made visually or

otherwise understandable to the end user, for example,

printing a document on paper, browsing a series of

elements on screen, or stating a series of elements

through voice synthesis. A conforming rendering

application must be able to print or display conforming

documents without significant loss of information. The

presentation should be consistent with the intent of the

originating system.

A conforming rendering application may not impose

structural requirements that are not required by the

DTD or other document models as stated in the second

part of Semiconductor Equipment Manufacturing

Information Tagging. For example, a rendering engine

may not require an element which is optional in the

models or require an attribute that is implied. A

rendering application may require that the rules in this

Base Specification and those in the Tag Library are

followed.

For example, if the DTDs say that an element is

optional, a Rendering Application may not require that

it be present. If the Tag Library says that the contents

of an element must be some particular information, the

Rendering Application may require that it be so. More

specifically, if the <description> element is optional, a

Rendering Application may not fail to process a

document because it does not contain <description>s.

If the Tag Library says that the contents of a

“datechanged” attribute is a date in YYYYMMDD

format, a Rendering Application may fail if the attribute

does not contain a valid date.

4.6 Document - A logical assembly of elements, that, if

correctly ordered, is a means of transmitting an

internally consistent piece of information. A document

is made up of one or more elements which must all be

contained in one “root” element.

4.7 Document Class - A document class consists of all

of the documents or information fragments that follow a

single set of markup rules, including the same elements

and element relationships. In general, a class of

documents can be considered to be documents that are

nearly the same in structure and have similar types of

content. A document class is usually (but not

necessarily) defined by a structural model (such as a

DTD or Schema) that governs its existence.

4.8 Document Exchange - For SEMI E36, “document

exchange” is synonymous with “document interchange”

(see definition).

4.9 Document Interchange - Document interchange

entails passing one or more elements, usually as a

document, from one conforming system to one or more

other systems (also known as “exchange”).

4.10 Document Model - “Document model” is a term

for a set of structural rules that describe the legal

markup for a particular class of documents. DTDs and

Schema are types of document models.

4.11 Document Type Definition (DTD) - A DTD is a

document model or list of markup rules, which may be

used in both SGML and XML. As specified in the

SGML standard, ISO 8879, a DTD is:

“Rules, determined by an application, that apply

SGML to the markup of documents of a particular

type. A document type definition includes a formal

specification, expressed in a document type

declaration, of the element types, element

relationships and attributes and references that can

be represented by markup. It thereby defines the

vocabulary of the markup for which SGML defines

the syntax.” (ISO 8879 4.105)

4.12 Element - An element is one named, contiguous

piece of information in the information stream. Usually

the data within an element has a semantic or structural

relationship as well, for example a person’s surname, an

error code, a pointer to external data, a paragraph, or a

procedure that contains steps. In the previous version

of this specification (i.e., in SEMI E36-95) an element

is also referred to as an “information component.”

An element is:

• A uniquely addressable unit of information within

the document; and/or

• An identifier to an addressable unit of information

outside the document.

4.13 Markup - For Semiconductor Equipment

Manufacturing Information Tagging, markup is defined

as additional data characters that are added to data to

provide information about the data and make the data

more useable. The markup described by Semiconductor

Equipment Manufacturing Information Tagging is

internal markup, that is, markup which resides in the

same data stream as the data — in specific SGML and

XML markup.

4.14 Nonconforming Document - A non-conforming

document is one that does not use the markup properly