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SEMI E36.1-0704 © SEMI 2004 13 <rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/> </rdfs:Class> <rdf:Property rdf:about="http://www.semi.org/e36/schema#releaseDate&quot…

SEMI E36.1-0704 © SEMI 2004 12

RELATED INFORMATION 2

E36 METADATA SCHEMA

NOTICE: This related information is not an official part of SEMI E36.1 and was derived from the work of the

North American Information & Control Committee. This related information was approved for publication by full

letter ballot on March 14, 2004.

R2-1 E36 Metadata Schema

R2-1.1 The following is the schematic description of the Level 1 and Level 2 requirements. The description is

presented in the form of an RDF schema, compatible with the schema definitions available at the website listed in

section 3.2b

R2-1.2 E36 Metadata Schema XML Representation

<?xml version="1.0" encoding="UTF-8"?>

<rdf:RDF

xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"

xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#"

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#E36Item"/>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Configuration">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Manual">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Recipe">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Procedure">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Component">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Narrative">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#ErrorCode">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Media">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#SafetyItem">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Company">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Publisher">

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Configuration">

SEMI E36.1-0704 © SEMI 2004 13

<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>

</rdfs:Class>

<rdf:Property rdf:about="http://www.semi.org/e36/schema#releaseDate">

<rdfs:domain rdf:resource="http://www.semi.org/e36/schema#E36Item"/>