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SEMI E38.1-95 © SEMI 1995 5 NOTICE: These st andards do not purport to addres s safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriate safety…

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SEMI E38.1-95 © SEMI 1995 4
APPENDIX 1
APPLICATION NOTES
NOTE: This appendix was approved as a part of SEMI E38.1 by full letter ballot procedure.
A1-1 Example Configuration
The following example shows configuration of a cluster
tool consisting of an existing process module with a
new cluster controller and other modules.
The cluster consists of a Cluster Controller, two Process
Modules (PM1, PM2), and a combined
Transport/Cassette Module (TM/CM).
A1-1.1 IP Addresses — IP addresses are chosen so that
they are unique to each platform on the network and
consistent with the conventions used at the facility. For
this example, the convention is to use 192.25.63.X for
IP Addresses, where X is between 0 and 255. PM1 had
an existing IP address of 192.25.63.122, which will not
be changed. IP addresses starting at 205 are unused and
thus available. Thus, the following IP addresses are
chosen:
Cluster Controller 192.25.63.205
TM and CM 192.25.63.206
PM1 192.25.63.122
PM2 192.25.63.207
As part of the configuration, the IP Address of each
module is identified as shown above, on all of the
platforms. This configuration depends on the TCP/IP
software used on the respective platforms.
A1-1.2 Port Numbers — TCP reserves port numbers
below 1024 in RFC1340. There are no other TCP/IP
programs on any of the platforms in the cluster using
port number in the range 2000-10000, so the following
port numbers are chosen:
2000 first TM
5000 first CM
8000 first PM
8001 second PM
The cluster controller is always a client and initiates the
connections, so no port number assignment is required.
A1-1.3 Session ID Assignment — Before defining the
Session ID’s, recall that the following connections are
required:
Client Server
CC TM
CC CM
CC PM1
CC PM2
CM TM
PM1 TM
PM2 TM
The Session ID’s are arbitrary. PM1 already has ID’s
which are as follows:
PM1 IDs
Clients
Object Services 1 CC, TM
Processing Management 100 CC
Recipe Management 101 CC
Material Movement 102 CC, TM
Exception Management 103 CC
Event Reporting 104 CC
The other modules have not yet been set, so we choose
to begin with ID 64.
The session IDs are established as follows:
PM2 Ids
Clients
Object Services 1 CC, TM
Processing Management 64 CC
Recipe Management 65 CC
Material Movement 66 CC, TM
Exception Management 67 CC
Event Reporting 68 CC
TM IDs
Clients
Object Services 1 CC
Material Movement 64 CC
Exception Management 65 CC
Event Reporting 66 CC
CM IDs
Clients
Object Services 1 CC, TM
Material Movement 64 CC, TM
Exception Management 65 CC
Event Reporting 66 CC
SEMI E38.1-95 © SEMI 19955
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
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change without notice.
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Copyright by SEMI® (Semiconductor Equipment and Materials
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SEMI E39-0703 © SEMI 1995, 2003 1
SEMI E39-0703
OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOR, AND
SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Information & Control Committee on March 12, 2003. Initially available at www.semi.org
May 2003; to be published July 2003. Originally published in 1995; previously published November 2002.
CONTENTS
1 Purpose
2 Scope
3 Referenced Standards
4 Terminology
4.1 Definitions
4.2.1 Requirements
4.2.2 Objects
4.2.3 Services
4.2.4 Data Type
5 Conventions
5.1 OMT Object Information Model
5.2 Object Attribute Representation
5.3 Service Message Representation
6 Background
7 Applicable Documents
8 Basic Concepts and Behavior
8.2 Object Attributes
8.2.3 Use of Text
8.2.4 Object Type
8.2.5 Object Identifier
8.2.6 Object Handle
8.3 Object Definition
9 Object Relationships
9.2 Object Hierarchy
9.3 Scope and Ownership
9.4 Multiple Inheritance Hierarchy
10 Additional Operations
10.2 Create and Delete
10.2.1 Create
10.2.2 Delete
10.3 Attachment
10.3.3 Attach
10.3.4 Attach Set Attributes
10.3.5 Detach
10.3.6 Reattach
10.3.7 Attach Supervised Object
10.3.8 Detach Supervised Object
11 Services and Scenarios
11.2 Scope
11.3 Filtering
11.4 Object Services Parameter Dictionary
11.5 Get and Set Attributes
11.6 GetType
11.7 GetAttrName
12 Additional Services
12.2 Object Services Parameter Dictionary
12.3 Create
12.4 Delete
12.5 Attach
12.6 AttachSetAttr
12.7 Detach
12.8 Reattach
12.9 AttachSupervisedObject
12.10 DetachSupervisedObject
12.11 ObjectAction
12.12 ObjectActionCompletion Notification
12.13 Get Service Names
12.14 Get Service Parameters
13 Applications
13.2 Get All of an Object' s Attributes