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SEMI E40-0705 © SEMI 1995, 2005 16 9 Object Definitions 9.1 Processin g managem ent defines one standard o bject, the Proces s Job. 9.2 Process Job Object Definition — The process job is a dy namic object created by the …

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SEMI E40-0705 © SEMI 1995, 2005 15
# Current State Trigger New State Action(s)
6 PROCESSING Material processing completed. PROCESS
COMPLETE
PR Job Processing Complete event is
triggered.
The processing resource performs all
required resource post-conditioning.
Await material departure.
7 Any POST
ACTIVE sub-
state
Job material departs from the
equipment OR the process job
becomes extinct because the
process job is replaced by another
process job that specifies the same
material when no control job is
used.
(Extinction) PR Job Complete event is triggered. The
process job is deleted.
8 EXECUTING The processing resource initiated a
process pause action.
(it received a PAUSE command or
initiated an internal pause)
PAUSING The processing resource pauses at the first
convenient time.
9 PAUSING The processing resource paused
the job.
PAUSED None.
10 PAUSE The processing resource resumed
the job.
EXECUTING The processing resource resumes the
activity that was paused.
11 EXECUTING The processing resource initiated a
process stop action.
(it received a STOP command or
initiated an internal stop)
STOPPING The processing resource stops the current
execution activity at the first convenient
time.
12 PAUSE The processing resource initiated a
process stop action.
(it received a STOP command or
initiated an internal stop)
STOPPING The processing resource stops the current
execution activity at the first convenient
time.
13 EXECUTING The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
14 STOPPING The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
15 PAUSE The processing resource initiated a
process abort action.
(it received an ABORT command
or initiated an internal abort)
ABORTING The processing resource terminates the
current execution activity immediately.
16 ABORTING The abort procedure is completed.
For some equipment, substrates are
moved out into a safe location as
part of the error recovery.
ABORTED
17 STOPPING The stop procedure is completed
and all material is in a safe
condition.
STOPPED
18 QUEUED/
POOLED
“CANCEL,” “ABORT,” or
“STOP” command received.
(no state) Remove the process job from the
queue/pool.
PR Job Complete event is triggered.
Delete the process job.
SEMI E40-0705 © SEMI 1995, 2005 16
9 Object Definitions
9.1 Processing management defines one standard object, the Process Job.
9.2 Process Job Object Definition — The process job is a dynamic object created by the processing resource as
requested by the supervisor. It tracks progress of the operations required and is deleted by the processing resource
automatically upon completion. The process job is uniquely identified by the PRJobID attribute. The object attribute
notation used in the table below is described in Conventions, ¶5.2.
9.2.1 The attributes in Table 2 shall be accessible using Object Services Standard (SEMI E39).
Table 2 Process Job Attributes
Attribute Name Definition Rqmt Access Form
ObjID An identifier for the service user. It is set when the
process job is created.
Y RO Text
ObjType The object type. Y RO Text:
“PROCESSJOB”
PauseEvent List of event identifiers that cause the equipment to
automatically transition to the PAUSING/PAUSED
states when one of the listed events is triggered.
N RO List of:
EventID
PRJobState A unique sub-state of the job according to the process
job state model in Figure 4.
Y RO Enumerated:
QUEUED/POOLED
SETTING UP
WAITING FOR START
PROCESSING
PROCESS COMPLETE
PAUSING
PAUSED
STOPPING
ABORTING
STOPPED
ABORTED
PRMtlNameList List of identifiers of the material being processed. Y RO List of:
PRMtlName
PRMtlType Identifies the type of material being processed. Y RO Enumerated
PRProcessStart Indicates that the processing resource start processing
immediately when ready.
N RO Boolean:
TRUE — Automatic start
FALSE — Manual start
PRRecipeMethod Indication of recipe specification type, whether using
is applied and which method is used.
Y RO Enumerated:
Recipe only
Recipe with Variable Tuning
RecID Identifier of the recipe applied. Y RO Text
RecVariableList List of variables supporting a recipe method. N RO List of: RecipeVariable
9.2.2 A number of the ProcessJob attributes are composite data types. The constituent data is defined in Table 3.
Table 3 Attribute Data Definitions
Data Itentifier Description Form
PRMtlName Textual identifier of the material being processed. Text
RecipeVariable Variables supporting a recipe method. Structure composed of:
RecipeVarName
RecipeVarValue
RecipeVarName The name of the recipe variable. Text
RecipeVarValue Value of the recipe variable. Depends on variable
SEMI E40-0705 © SEMI 1995, 2005 17
10 Messaging Services Detail
10.1 This section defines the messaging services required to implement the processing management concepts. The
messages were introduced in ¶8.1. These services are independent of the messaging protocol used. They may be
mapped to SECS-II (SEMI E5) or to other comparable protocols.
10.1.1 These messaging services define the messages to be used, the nature of the parameters contained within the
messages, and data type of the parameters. Not defined here is the internal structure of the actual messages as
transferred, including order of the parameters and how various data structures and data types are represented.
10.1.2 The service message notation used in the tables below is described in Conventions, ¶5.3.
10.2 Service List — The following messages are exchanged between host and equipment for the purpose of
accomplishing processing management tasks.
Table 4 Service List
Message Name Type Description
PRGetAllJobs R Get a list of the jobs and their states for all jobs which have not completed.
PRGetSpace R Get the number of jobs which can currently be created on the resource.
PRJobAlert N Notification by the processing resource that the process job is setting up, processing,
completed process, or that the job is completed.
PRJobCommand R Command which affects the process job.
PRJobCreate R Supervisor (service-user) request that a process job be performed.
PRJobCreateEnh R User request for job to be done. User assigns a unique job identifier.
PRJobDequeue R Removes (deletes) process job(s) from the queue.
PRJobEvent N Notification by the processing resource that a process-related event has occurred.
PRJobMultiCreate R Create several jobs which may be dissimilar. User assigns unique job identifiers.
PRJobSetRecipeVariable R User request for setting a new value to one of more recipe variable parameters.
PRJobSetStartMethod R Create a set of similar process jobs. User assigns unique job identifiers.
PRSetMtrlOrder R Request the service to use a specific methodology for processing order.
10.3 Parameter Dictionary
Table 5 Parameter Dictionary, Part 1
Parameter Name Definition Form: Possible Values
CmdParameter Parameter supporting a command type. Structure composed of:
CmdParmName
CmdParmValue
CmdParmName The name of the parameter. Text
CmdParmValue Value of the parameter. Varies per parameter