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SEMI E40-0705 © SEMI 1995, 2005 18 Parameter Name Definition Form: Possible Values ErrorCode Contains the code for th e specific error found. Enumerated: PRJobCreate, PRJobCreateEnh, PRJobMultiCreate: Parameters improper…

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SEMI E40-0705 © SEMI 1995, 2005 17
10 Messaging Services Detail
10.1 This section defines the messaging services required to implement the processing management concepts. The
messages were introduced in ¶8.1. These services are independent of the messaging protocol used. They may be
mapped to SECS-II (SEMI E5) or to other comparable protocols.
10.1.1 These messaging services define the messages to be used, the nature of the parameters contained within the
messages, and data type of the parameters. Not defined here is the internal structure of the actual messages as
transferred, including order of the parameters and how various data structures and data types are represented.
10.1.2 The service message notation used in the tables below is described in Conventions, ¶5.3.
10.2 Service List — The following messages are exchanged between host and equipment for the purpose of
accomplishing processing management tasks.
Table 4 Service List
Message Name Type Description
PRGetAllJobs R Get a list of the jobs and their states for all jobs which have not completed.
PRGetSpace R Get the number of jobs which can currently be created on the resource.
PRJobAlert N Notification by the processing resource that the process job is setting up, processing,
completed process, or that the job is completed.
PRJobCommand R Command which affects the process job.
PRJobCreate R Supervisor (service-user) request that a process job be performed.
PRJobCreateEnh R User request for job to be done. User assigns a unique job identifier.
PRJobDequeue R Removes (deletes) process job(s) from the queue.
PRJobEvent N Notification by the processing resource that a process-related event has occurred.
PRJobMultiCreate R Create several jobs which may be dissimilar. User assigns unique job identifiers.
PRJobSetRecipeVariable R User request for setting a new value to one of more recipe variable parameters.
PRJobSetStartMethod R Create a set of similar process jobs. User assigns unique job identifiers.
PRSetMtrlOrder R Request the service to use a specific methodology for processing order.
10.3 Parameter Dictionary
Table 5 Parameter Dictionary, Part 1
Parameter Name Definition Form: Possible Values
CmdParameter Parameter supporting a command type. Structure composed of:
CmdParmName
CmdParmValue
CmdParmName The name of the parameter. Text
CmdParmValue Value of the parameter. Varies per parameter
SEMI E40-0705 © SEMI 1995, 2005 18
Parameter Name Definition Form: Possible Values
ErrorCode Contains the code for the specific error found. Enumerated:
PRJobCreate, PRJobCreateEnh,
PRJobMultiCreate:
Parameters improperly specified
Insufficient parameters specified
Unsupported option requested
Busy (no queueing or queue full)
PRJobCreateEnh, PRJobMultiCreate:
Object identifier in use
PRJobCommand:
Parameters improperly specified
Insufficient parameters specified
Unsupported option requested
Command not valid for current state
PRJobComplete:
No material altered
Material partially processed
All material processed
Recipe specification related error
Failed during processing
Failed while not processing
Failed due to lack of material
Job aborted
Job stopped
Job cancelled
ErrorText Text in support of the error code. Text
PRAck Indicates whether the activity was successful. Boolean:
TRUE — Successful
FALSE — Unsuccessful
PRCmdName Indicates which process job command to perform. Text:
ABORT
STOP
CANCEL
PAUSE
RESUME
STARTPROCESS
PREventData Data related to the specific event. Varies per parameter reported
PREventID Identifier of the specific event which occurred. Enumerated:
Unique collection event ID for
Waiting for Material and Process Job State
Change events.
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Table 6 Parameter Dictionary, Part 2
Parameter Name Definition Form: Possible Values
PRJobID The unique identifier for a process job. It can be accessed as
the ObjID attribute of the process job. The host may provide
this identifier to the processing resource. In this case, the host
must guarantee uniqueness of job identifiers for all the
process jobs in the PROCESS JOB STATE in the equipment.
Text
PRJobList List of process job identifiers and their states. List of
Structure
PRJobID
PRJobState
PRJobMilestone Process job milestone. Enumerated:
PR Job Setup
PR Job Processing
PR Job Processing Complete
PR Job Complete
PR Job Waiting for Start
PRJobSpace Used to indicate the number of jobs that can currently be
created for the processing resource.
Integer
PRJobState A unique state of the process job according to the process job
state model.
Enumerated:
QUEUED/POOLED
SETTING UP
WAITING FOR START
PROCESSING
PROCESS COMPLETE
PAUSING
PAUSED
STOPPING
ABORTING
STOPPED
ABORTED
PRMtlName Textual identifier of the material being processed. Text: Unique for each material with respect
to the processing agent.
PRMtlType Identifies the type of material being processed. Enumerated
PRMtrlOrder Defines the order by which material in the process jobs
material list will be processed.
Enumeration:
ARRIVAL – process whichever material
first arrives.
OPTIMIZE – process in an order that
maximizes throughput.
LIST – follow the order in the list.
PRPauseEvent Variable containing information which is transferred to the
corresponding PRJob attribute. Shall conform to event
identifiers as defined in either SEMI E30 or E53.
(list of)
text
PRProcessStart Indicates that the processing resource start processing
immediately when ready.
Boolean:
TRUE – Automatic Start
FALSE – Manual Start
PRRecipe Specification of the process job recipe. Structure composed of:
PRRecipeMethod
RecID
(List of) RecipeVariable
PRRecipeMethod Indication of recipe specification type, whether tuning is
applied and which method is used.
Enumerated:
Recipe only
Recipe with VariableTuning