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15 Recipe Management Compliance

15.1 Areas of Compliance

15.2 Managed Recipe

15.3 Managed Recipe Compliance Table

15.4 Recipe Namespace Management

15.4.1 Recipe Namespace

15.4.2 Recipe Namespace Manager

15.4.3 Recipe Namespace Management

Compliance Table

15.5 Compliance for Distributed Recipe Namespace

Management

15.5.1 Distributed Recipe Namespace

15.5.2 Distributed Recipe Namespace Manager

15.5.3 Distributed Recipe Namespace

Management Compliance Table

15.6 Distributed Recipe Namespace Segment

15.6.1 Distributed Recipe Namespace Segment

Compliance Table

15.7 Distributed Recipe Namespace Recorder

15.7.1 Distributed Recipe Namespace Recorder

Compliance Table

15.8 Execution Recipe Compliance

15.8.1 Execution Recipe Compliance Table

15.9 Recipe Executor

15.9.1 Recipe Executor Compliance Table

16 Glossary of Terms

Related Information 1

R1-1 RMS Standardized Objects

R1-2 RMS Requirement/Concepts Map

R1-3 Background

R1-3.1 Traceability

R1-3.2 Recipe Life Cycle

R1-3.3 Recipe Editing

R1-3.4 Recipe Sharing

R1-3.5 Protection and Process Control

R1-3.6 Recipe Selection

R1-4 Example of a Factory Implementation of

Approval Levels

R1-5 Examples of Variable Parameters

R1-6 Applications of Object Services

R1-6.1 Scope

R1-6.2 Filter

R1-6.3 Complex Attributes

R1-7 Examples of RMS Application

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SEMI E42-0704 © SEMI 1995, 2004 7

SEMI E42-0704

RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND

MESSAGE SERVICES

This standard was editorially modified in September 1999 to conform to its non-provisional status. Changes

were made to Section 1.2.

1 Introduction

This standard defines the concepts required for

management of recipes, the operations or behavior

provided by the Recipe Management Standard (RMS),

and the messages through which services are provided

through an interface between the provider and the user

of these services.

1.1 Purpose — The purpose of this standard is twofold:

• To enable applications software to be developed

that can assume the existence of standard concepts,

behaviors, and message services that collectively

form Recipe Management and that take advantage

of them.

• To enable software to be developed to offer the

Recipe Management capabilities.

1.2 Scope — This is a standard that defines concepts,

behavior, and services to support the integration of

automated recipe management within a semiconductor

factory. These services are applicable to a variety of

relationships, including both traditional

host/equipment and cluster tool controller/attached

module communications and control.

The standard provides a set of communications services

which allows such systems to transfer and manage

recipes to ensure the correct processing of material

within semiconductor manufacturing equipment and

systems. RMS also requires compliance to SEMI E39

(Object Services Standard (OSS): Concepts, Behavior,

and Services) for completeness.

This document describes several different hierarchical

relationships: supervisory agents and their supervised

agents, recipes and their subrecipes, and recipe classes

and their subclasses. Such hierarchical relationships

provide a natural organizational and classification

structure that is reflected in many different kinds of

systems, such as telephone switching systems and

directory trees. It is the intent of this standard to support

logical hierarchical relationships rather than to require

that strict hierarchical relationships be implemented in

systems architecture.

RMS places no restriction on where the set of defined

services is implemented.

1.3 Referenced Documents

1.3.1 Semiconductor Equipment and Materials

International (SEMI)

1.3.1.1 SEMI Equipment Automation/Hardware

Volume

SEMI E10 — Standard for Definition and Measurement

of Equipment Reliability, Availability, and

Maintainability (RAM)

1.3.1.2 SEMI Equipment Automation/Software 2

Volume

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E53 — Event Reporting

1.3.2 Other References

James Rumbaugh, Michael Blaha, William Premerlani,

Frederick Eddy, William Lorensen, Object-Oriented

Modeling and Design, Englewood Cliffs, New Jersey:

Prentice-Hall, 1991.

D. Harel, Statecharts: A Visual Formalism for Complex

Systems, Science of Computer Programming 8, 1987.

1.4 Definitions — Basic definitions for objects,

services, and form are provided in SEMI E39, Sections

4.1 through 4.4. This section provides additional

definitions.

Definitions in Section 1.4.3 are specific to RMS.

1.4.1 Services

service provider — An application (a component of an

agent) responsible for providing services to the service

user.

service user — (service consumer) An application that

uses the services provided.

1 Semiconductor Equipment and Materials International (SEMI), 805

East Middlefield Road, Mountain View, CA 94043, 650.964.5111,

FAX 650.967.5375