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SEMI E42-0704 © SEMI 1995, 2004 51 attribute Linked to TRUE. Figure 8.3 illustrates the LINKAGE stat e of the recipe. For a descri ption of the transitions, see Table 8.1 in Section 8.3. Figure 8.3 Link State Model For m…

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of the attributes of the original are copied directly.

These operations are included in Namespace

Management in Section 9.4.1.

8.2.2.1 Create Recipe — A recipe is created when a

recipe body is first entered into a namespace and

assigned a new identifier. The recipe's mandatory

attributes are set. All other attributes take on their

default values. The values for the attributes

BodyLength

, EditTime, and EditedBy are required to be

provided by the initiator of the create operation. The

attribute BodyFormat

is also provided at this time if it is

not in source form (i.e., if BodyFormat

has a non-

default value).

A newly created recipe has an active state model

(Figure 8.7). The recipe is in the UNVERIFIED,

UNLINKED, UNAPPROVED, UNPROTECTED, and

UNCERTIFIED states.

The create recipe operation is invoked with the

RMNCreate service.

8.2.2.2 Update Recipe — The update operation is

identical to that of create except that an unprotected

recipe with the specified identifier already exists, and

the new body replaces the existing body. Attributes

concerning the body are provided by the initiator of the

request, as for the create operation. All non-mandatory

attributes are cleared (reset to their default values).

Any existing agent-specific datasets are discarded.

The update recipe operation is invoked with the

RMNUpdate service.

8.2.3 Recipe Building — Building a recipe is a two-step

process. First the recipe is verified and then linked.

8.2.3.1 Verify Recipe — The verify operation is the

only time it is necessary to parse the contents of the

recipe body until the recipe is executed. The primary

purpose of this process is to ensure that the syntactical

and lexical structure of the body is correct. One or more

checks for semantic correctness may also be performed

as part of the verification operation, but this is not

required.

Actual verification is performed by a member agent's

recipe executor at the request of a namespace

manager. For this reason, this operation is also

discussed under namespace management in Section

9.4.7.

Recipes may be stored in a namespace in an incomplete

or unfinished form. For recipes in source form, the

verification procedure shall be performed only at the

request of the user. It shall not be performed

automatically.

There are four attributes affected by the verification

operation: Verified

, EstRunTime, ExtRef, and

Parameters

The boolean generic attribute Verified

is used to

indicate the recipe's state with respect to this procedure.

Verified

is cleared when a recipe is first created and

whenever it is updated. Verified

is set TRUE only when

the recipe passes the verification by a recipe executor.

A recipe is considered to be verified if, and only if, the

Verified attribute is TRUE. Figure 8.2 illustrates the

recipe's VERIFICATION state. For a description of the

transitions, see Table 8.1 in Section 8.3.

Figure 8.2

Verification State Model

The values for the attributes EstRunTime

, ExtRef,

Parameters

, and VerificationID are returned (where set)

by the recipe executor when the verification has been

successful. If the operation is unsuccessful, they shall

be cleared.

ExtRef

contains a list of all external references found

within the body of the recipe by the recipe executor.

These references may be explicit

or implicit, leaving

the class and/or version unspecified.

The verify recipe operation is invoked with the

RMNAction service.

8.2.3.2 Link Recipe — The link operation is a required

operation that may be requested at any time by the

operator or supervisor. Successful completion of the

link operation indicates that the recipe is ready for

execution. For single-part recipes without variable

parameters, linking consists only of setting the generic

SEMI E42-0704 © SEMI 1995, 2004 51

attribute Linked to TRUE. Figure 8.3 illustrates the

LINKAGE state of the recipe. For a description of the

transitions, see Table 8.1 in Section 8.3.

Figure 8.3

Link State Model

For multi-part recipes, this operation also collects

external references and variable parameter definitions

into the LinkList

and LinkParam attributes, to be used

by the recipe executor at run-time.

External references contained within multi-part recipes

are not required to specify the class of the subrecipe

when the class is the same as that of the parent recipe.

Where class is omitted in a recipe identifier in the

ExtRef attribute, the link operation is responsible for

adding the class of the parent recipe in the identifier

added to the LinkList

parameter, as the parent/child

relationship cannot be derived from the final contents of

LinkList

External references are assumed to refer to recipes

within the same namespace and are not required to give

explicit versions unless they specify a different

namespace. This ensures that the user will be able to

link together the “best choice” subrecipes. The exact

value of versions of such references is determined only

at the time the main recipe is linked.

The link operation is performed on a main recipe. That

is, it only modifies attributes of the main recipe. It

resolves all external references within that recipe and

within any of its subrecipes according to well-defined

rules for determining default versions at the time of the

link. At the same time, variable parameter definitions

are collected. The resulting explicit references are

placed in the LinkList

attribute, variable parameter

definitions are placed in LinkParam

, the ApprovalLevel

attribute is cleared, the Linked

attribute is set to TRUE,

and the main recipe is then said to be linked.

Subrecipes are not affected by this operation.

Subrecipes of a main recipe have no knowledge of

parents or of linkages. As a result, it is possible to

delete or change a subrecipe with an unintended

detrimental impact on a linked recipe set. Factory

policy may designate certain levels of approval to mean

“this recipe is used by (linked into) one or more

protected recipes.”

For multi-part recipes, linking starts at the main recipe

and works through all chains of referenced subrecipes

to determine the complete set of identifiers that will

comprise the recipe as a whole. The link operation is a

mechanical procedure that may be performed at any

time.

Successful linking implies that all referenced subrecipes

have been located and parsed for further references

until all references are exhausted. The link operation

shall fail when any recipe or subrecipe within the

namespace either is unverified or cannot be located.

If the same parameter name is used to define a

parameter in more than one recipe of a set of recipes

that are linked together, the name shall represent the

same parameter and have the same parameter

definition in all recipes in the set, to avoid ambiguity.

Parameters with the same parameter name and

differing definitions shall cause, at a minimum, a

warning to the user when the link operation completes.

For purposes of comparison of results, the order of

references in LinkList

and LinkParam at the completion

of the link operation shall conform to the results when

the following sequence is used:

1. Copy the contents of ExtRef

from the main recipe to

LinkList

, resolving class and version to each recipe

identifier as needed. For support of variable

parameters, also copy the contents of Parameters to

LinkParam. If ExtRef is empty, then LinkList is also

empty and the parsing process is complete.

2. If LinkList

is not empty, begin with the first

reference in LinkList

as the link target reference.

3. If the link target reference lies within the same

namespace, resolve the class and version if

necessary. (Note: the referenced recipe must be

already present within the namespace at the time the

link is performed, or else the link fails.) If the link

target reference specifies a different namespace, go

to Step (6) — the link operation of this chain

terminates (without error) without an attempt to

locate the actual recipe or its ExtRef

attribute. If the

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recipe is located, then it is called the link target

recipe.

4. Determine the contents of the Verified

attribute of

the link target recipe. If Verified

is FALSE, the link

operation fails immediately.

5. Determine the contents of the ExtRef

attribute of

the link target recipe. Remove any references that

duplicate those already contained in LinkList

resolve class and version as needed, and append the

result to LinkList

. If variable parameters are

supported, also determine the contents of

Parameters

in the link target recipe, remove

parameters already defined in LinkParam

, and

append the result to LinkParam

6. Set the link target reference to the next reference in

LinkList

and repeat steps (3) through (6) until all

references in LinkList

have been processed.

For recipes with no external references, the LinkList

list will be empty. Similarly, for recipes with no

variable parameters, the LinkParam

list will be empty.

The effect of allowing incomplete recipe versions to be

specified within a recipe body, and determined only

when the main recipe is linked, means that a linked

recipe set (the set of recipes linked together) produced

on one occasion may not be the same as those produced

on a different occasion. Therefore, it is necessary to

protect the contents of the LinkList

attribute from

inadvertent change.

For this reason, the link operation cannot be performed

on a read-only recipe with the Linked

attribute already

set from a previous link. Any attempt to link an already

linked read-only recipe either shall be denied or a new

copy of that recipe shall be generated with a new

identifier, which may then be automatically approved

and linked.

The link recipe operation is invoked with the

RMNAction service.

8.2.3.3 Unlink Recipe — A linked recipe that is not

write-protected may also be unlinked. The unlink

operation clears the generic attributes Linked

LinkList

, and LinkParam. If the recipe has agent-

specific datasets, the attributes Certified

and AgentSpec

LinkParam are cleared. If no other non-required agent-

specific attributes have a non-default value, the agent-

specific dataset is removed.

The unlink recipe operation is invoked with the

RMNAction service.

8.2.3.4 Modify Variable Parameters — The recipe

attributes Parameters

, LinkParam, and

AgentSpec

_LinkParam each consist of a list of

parameter definitions. Each parameter definition

contains the parameter name, parameter initial value,

and the parameter restriction (if any) specified for that

parameter by a formal definition within the recipe

body.

In order to “tune” a recipe so that it produces the same

result on all executing agents of the same type, it may

be necessary to provide a different initial value or a

different parameter restriction for one or more

parameters for individual executing agents. The agent-

specific attribute AgentSpec_LinkParam

is used to

provide this capability.

AgentSpec_LinkParam

is an optional agent-specific

attribute that contains a list of alternate parameter

definitions for one or more of the variable parameters

included in the definitions in the generic attribute

LinkParam

of a linked recipe. A special editing facility

may be provided to allow an authorized user to add,

delete, or modify parameter definitions to

AgentSpec_LinkParam.

Parameter definitions initially are added individually to

AgentSpec_LinkParam

by copying the definition for

that parameter from LinkParam

. The initial value or

restriction then may be modified by the user, subject to

the absolute restrictions, such as minima and maxima,

imposed by the executing agent's supplier. The initial

value may be changed to any value within the

parameter domain.

Any modification of the restriction shall cause the

certification level to be cleared in the Certified

attribute. This is required because of the potential

impact on fab operations of a change in the restriction.

The UNITS in the restriction of a numeric parameter

may be modified within constraints imposed by the use

of the parameter and the executing agent's supplier. For

example, a two-byte unsigned integer named WaitTime

that is used to set a variable time delay period may

permit units of either “min” (minutes) or “s” (seconds).

It is desirable, but not required, that suppliers of

executing agents support different options for

specifications of UNITS. The possible options for each

potential variable parameter shall be documented by

the supplier.