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SEMI E42-0704 © SEMI 1995, 2004 109 15.9 Recipe Executor — Table 15.15 de scribes requireme nts for com pliance for the recipe executor . The recipe executor exhibits RMS compliance through its attributes, behavior, and …

SEMI E42-0704 © SEMI 1995, 2004 108

15.8 Execution Recipe Compliance — This section defines RMS compliance for the execution recipe. An execution

recipe exhibits RMS compliance (1) through its attributes and (2) through its structure when transferred.

Table 15.13 describes the requirements for compliance to the execution recipe.

Table 15.13 Section References for Execution Recipe Capabilities

Capability Reference Fundamental

Mandatory and required attributes Table 6.1 Y

Recipe identifier (namespace, class, name, version) 6.3.3 Y

Preservation of designated downloaded attributes 6.3.5 Y

Change management (ChangedBody) (required if recipe executor can change

recipes)

6.3.1, Table 6.1 Y

Recipe modification EditedBy Table 6.1 N

Variable parameters (ExecLinkParam) Table 6.1 N

Multi-part recipe (LinkList) Table 6.1 N

Recipe compression (SrcRcpID) Table 6.1 N

Verification signature (VerificationID) Table 6.1, 11.2.2.2 N

15.8.1 Execution Recipe Compliance Table — Table 15.14 provides a statement of compliance for the execution

recipe.

Table 15.14 Execution Recipe Compliance Table

RMS Compliance Statement

Fundamental RMS Requirements Implemented RMS Compliant

Mandatory and required attributes ❒ Yes ❒ No

Recipe identifier (namespace, class, name, version) ❒ Yes ❒ No

Preservation of designated downloaded attributes ❒ Yes ❒ No

Change management ❒ Yes ❒ No

❒ Yes

❒ No

Additional Capabilities Implemented RMS Compliant

Recipe Modification ❒ Yes ❒ No ❒ Yes ❒ No

Variable Parameters ❒ Yes ❒ No ❒ Yes ❒ No

Multi-Part Recipe ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Compression ❒ Yes ❒ No ❒ Yes ❒ No

Verification Signature ❒ Yes ❒ No ❒ Yes ❒ No

Do not mark YES unless all fundamental RMS requirements are implemented.

Additional capabilities may not be marked RMS compliant unless all fundamental RMS requirements are implemented.

SEMI E42-0704 © SEMI 1995, 2004 109

15.9 Recipe Executor — Table 15.15 describes requirements for compliance for the recipe executor. The recipe

executor exhibits RMS compliance through its attributes, behavior, and services.

Table 15.15 Section References for Recipe Executor Capabilities

Capability Reference Fundamental

Fundamental compliance to execution recipe 15.x Y

OSS services for execution recipe attributes 11.1 Y

OSS services for recipe executor attributes 11.1 Y

Unique recipe identifier 6.6 Y

Protection of recipe execution area 6.5 Y

Change control 6.6, 11.2.10, 11.2.10.5 Y

Recipe download and vertify (RMEDnLdVer) 11.2.1, 14.3 Y

Recipe verify (RMEVerify) 11.2.2, 14.4 Y

Recipe rename (RMERename) 11.2.4, 14.6 Y

Get available storage (RMESpaceInquire) 11.2.5, 14.7 Y

Recipe delete (RMEDelete) 11.2.6, 14.8 Y

Recipe select (RMESelect) 11.2.7, 11.2.7.1, 11.2.7.6,

11.2.7.6.1, 14.9

Recipe de-select 11.2.8, 14.10 Y

Recipe validation 11.2.7.2 Y

Variable parameters 11.2.7.4 Y

Recipe upload (RMEUpload) 11.2.3, 14.5 Y

Get recipe descriptor 11.2.9, 14.11 Y

Action completion notification 14.12 Y

Recipe delegation 11.2.7.3 N

Recipe creation 6.6.1, 11.2.10.2, 11.4 N

Recipe compression 6.6.2, 11.2.2.1, 11.2.10.3,

11.4

Recipe modification 6.6.3, 11.2.10.1, 11.4 N

Save last values 6.6.4, 11.2.10.4 N

SEMI E10 Productive state minimum approval (ProdApprove) 6.7, Table 6.2 N

SEMI E10 Productive state minimum certification (ProdCertify) 6.7, Table 6.2 N

Cycle units (RunCycleUnit) Table 6.2 N

Variable parameters (RecipeSelectParameters) Table 6.2 N

Change notification (RMEChange) 14.12 N

SEMI E42-0704 © SEMI 1995, 2004 110

15.9.1 Recipe Executor Compliance Table — Table 15.16 provides a statement of compliance for the recipe

executor.

Table 15.16 RMS Compliance Statement

RMS Compliance Statement

Fundamental RMS Requirements Implemented RMS Compliant

RMS Compliant Execution Recipe ❒ Yes ❒ No

Basic Requirements ❒ Yes ❒ No

OSS Services for Execution Recipe ❒ Yes ❒ No

OSS Services for Recipe Executor ❒ Yes ❒ No

Unique Recipe Identifier ❒ Yes ❒ No

Protection of Recipe Execution Area ❒ Yes ❒ No

Change Control ❒ Yes ❒ No

Recipe Download and Verify ❒ Yes ❒ No

❒ Yes

❒ No

Fundamental RMS Requirements Implemented RMS Compliant

Recipe Verify ❒ Yes ❒ No

Recipe Rename ❒ Yes ❒ No

Get Available Storage ❒ Yes ❒ No

Recipe Delete ❒ Yes ❒ No

Recipe Select ❒ Yes ❒ No

Recipe De-Select ❒ Yes ❒ No

Recipe Validation ❒ Yes ❒ No

Variable Parameters ❒ Yes ❒ No

Recipe Upload ❒ Yes ❒ No

Get Recipe Descriptors ❒ Yes ❒ No

Action Complete Notification ❒ Yes ❒ No

Additional Capabilities Implemented RMS Compliant

Recipe Delegation ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Creation ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Compression ❒ Yes ❒ No ❒ Yes ❒ No

Recipe Modification ❒ Yes ❒ No ❒ Yes ❒ No

Save Last Values ❒ Yes ❒ No ❒ Yes ❒ No

SEMI E10 Productive State Minimum Approval ❒ Yes ❒ No ❒ Yes ❒ No

SEMI E10 Productive State Minimum Certification ❒ Yes ❒ No ❒ Yes ❒ No

Cycle Units ❒ Yes ❒ No ❒ Yes ❒ No

Change Notification ❒ Yes ❒ No ❒ Yes ❒ No

Do not mark YES unless all fundamental RMS requirements are implemented.

Additional capabilities may not be marked RMS compliant unless all fundamental RMS requirements are implemented.