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SEMI E42.1-0704 © SEMI 1996, 2004 7 Some equipment maintains more than one type of proces s program and may distingu ish between the different types either through pr oviding additional Stream 7 messages, th rough naming…

SEMI E42.1-0704 © SEMI 1996, 2004 6

followed by the attribute value, which may be a single item, a list of single items, or a list of complex items, such as

variable parameters. If a list, the keyword LIST precedes the values, each item in the list terminated with either a

comma or, for the last item, the eol character.

This becomes

ATTRIBUTEAttributeName “text”(eol) (single-value attributes)

ATTRIBUTEAttributeNameLIST“text”, “text”,...(eol)

for attributes consisting of lists of single items (e.g., LinkList or ExtRef).

If the keyword LIST if followed by eol, this indicates a list of complex items. The eol character, in this case, also is

used to terminate the individual items in the high-order list. An attribute consisting of a list of complex items should

identify the individual fields of each complex item. Those attributes containing variable parameters (e.g.,

Parameters) are of the form

ATTRIBUTEAttributeNameLIST(eol)

PARAMNAME“text”, PARAMSETTING“text”, PARAMRULE“text”(eol)

...

PARAMNAME“text”, PARAMSETTING“text”, PARAMRULE“text”(eol)

Each individual field within a complex attribute value is delimited with the quotation mark (“) character. The eol

character is used to terminate a section declaration, an attribute declaration, and a complex item within an attribute.

The recipe body is preceded with

SECTION “Body”(eol)

followed by the recipe body in the form normally used by the equipment.

In comparison of the two suggested formats, the advantage of the text form described in this section is that the

attributes are human-readable and printable and therefore the user is able to modify those attributes that are not

designated as read-only with a standard text editor.

The advantage of the SECS-II form (Figure 1) is that the equipment is more easily able to support a host that is only

capable of using Stream 7.

R1-2 RMS-Compliant Recipe Management with Stream 7 Equipment

For RMS-Compliant Recipe Management applications dealing with legacy Stream 7 equipment, the situation is

more restricted. While an RMS-compliant equipment may preserve attributes by bundling them inside the PPBODY

of a process program, this option is not available when the situation is reversed because the equipment determines

the permissible format(s) within the recipe. Therefore, all attributes of the recipe must be completely maintained by

the host. The host in this situation may provide a recipe namespace that is dedicated either to an individual

equipment installation, to a group of equipment capable of sharing the same process programs, or both.

If the equipment is compliant to Process Program Management as defined in SEMI E30 (GEM), then it will provide

a collection event when the process program is created, changed, or deleted. Hosts that provide a dedicated recipe

namespace for non-RMS equipment are able to use this event to trigger a process program upload and update the

corresponding recipe.

Most Stream 7 equipment use only a single type of process program. This defaults to the recipe class PROCESS.

The equipment is unaware of the internal fields used by the recipe identifier. If it preserves the contents of PPID and

does not impose its own restrictions, it may be desirable to use the format of the recipe identifier, in particular the

version component. This would allow version control at the host.

SEMI E42.1-0704 © SEMI 1996, 2004 7

Some equipment maintains more than one type of process program and may distinguish between the different types

either through providing additional Stream 7 messages, through naming conventions such as a “.ext” extension,

through program length, or other devices.

Downloading a process program in Stream 7 is equivalent to both the operation of “sending” a recipe to a different

namespace (at the equipment) and to downloading a recipe to the recipe executor for execution.

R1-2.1 Structuring PPBODY Using SECS-II Message Format — The second method of sending attributes within

PPBODY is to use a SECS-II message structure that is used to send and receive recipes. Figure 1 illustrates using

the structure of a managed recipe form S15,F13 and F16.

Note that cluster tools may provide full recipe namespace capabilities for its modules, including shared namespaces

for modules of a specific type. In this case, a cluster recipe may contain multiple agent-specific datasets (m > 1).

Other equipment may be able to use the structure for the execution recipe.

L,q (q = 1,2,3)

1. L,r (r = 0 or 2)

1. <RCPSECNM>

2. L,g (g = # generic attributes)

1. L,2

1. <RCPATTRID

2. <RCPATTRDATA

a. L,2

1. <RCPATTRID

2. <RCPATTRDATA

2. <RCPBODY>

3. L,m (m = # agent-specific datasets)

1. L,2

1. <RCPSECNM

2. L,b

1. L,2

1. <RCPATTRID

2. <RCPATTRDATA

b. L,2

1. <RCPATTRID

2. <RCPATTRDATA

m. L,2

1. <RCPSECNM

2. L,c

1. L,2

1. <RCPATTRID

2. <RCPATTRDATA

c. L,2

1. <RCPATTRID

2. <RCPATTRDATA

Figure 1

SECS-II Format for PPBODY

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

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