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SEMI E54.3-0698 © SEMI 1998, 2004 2 3.5 Operation over the entire range specified for an attribute within a specific object instance is not a requisite for compliance with this specification. 4 Referenced Standards 4.1 S…

SEMI E54.3-0698 © SEMI 1998, 2004 1

SEMI E54.3-0698 (Reapproved 0704)

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC

DEVICE MODEL FOR MASS FLOW DEVICE

This specification was technically reapproved by the Global Information & Control Committee and is the

direct responsibility of the North American Information & Control Committee. Current edition approved by

the North American Regional Standards Committee on March 14, 2004. Initially available at www.semi.org

May 2004; to be published July 2004. Originally published June 1998.

1 Purpose

1.1 This specification is part of a suite of standards

which specify the implementation of SEMI standards

for the Sensor/Actuator Network. The specific purpose

of this specification is to describe a network-

independent application model comprised of device

objects which are common to all Mass Flow Devices on

a semiconductor equipment Sensor/Actuator

communications network.

2 Scope

2.1 This specification specifically addresses the

minimum attributes, services, and behavior a Mass

Flow Controller (MFC) and Mass Flow Meter (MFM)

device must support to be interoperable on the

Sensor/Actuator Network.

2.2 This specification is intended to ensure a high-

degree of device interoperability on the Sensor/Actuator

Network, while still allowing flexibility for product

differentiation and technology evolution.

2.3 The model specified in this specification is used in

conjunction with the Sensor/Actuator Network

Common Device Model (CDM) to completely describe

the MFC or MFM as it appears from the network

interface.

2.4 This specification, together with the

Sensor/Actuator Network Standard, the

Sensor/Actuator Network Common Device Model, and

a Sensor/Actuator Network Communication

Specification, form a complete interoperability

specification for the MFC and MFM.

2.5 To comply with this specification, a device must

implement and support, at a minimum, the required

attributes, services, and behavior identified in these

documents. Support for optional attributes, services,

and behavior are not required to be compliant to this

specification. Optional attributes, services, and behavior

are specified in these documents to promote further

device interoperability as features evolve and are

adopted by more manufacturers. If optional attributes,

services, and behavior are implemented for this device,

they must be implemented as identified in this

document.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This specification is a companion to a suite of

specifications which together make up the

Sensor/Actuator Network Communication standard.

Therefore, using portions of this specification that relate

to network communications necessarily requires an

understanding of the associated network specification.

3.2 As this document is a specification for the Mass

Flow Device Model, it does not contain any definition

of objects, attributes, services, or behavioral

descriptions that are already defined in the

Sensor/Actuator Network Common Device Model

(CDM). Additional attributes, attribute assignments,

services, and/or service parameters that are Mass Flow

Device-specific and/or implementation-specific are

contained in this specification.

3.3 While this specification is sufficient to completely

describe the MFC or MFM as it appears from the

network, it does not fully describe behavior of the MFC

or MFM which is not visible from the network. This

allows flexibility in implementation techniques and

product differentiation between manufacturers.

Manufacturer-specific objects may be defined by the

manufacturer, but are, by definition, outside the scope

of this standard.

3.4 This specification is compatible, but not compliant,

with SEMI E39. This means that although this

specification does not require compliance with SEMI

E39, it is extensible such that implementations may be

developed that are fully compliant with both standards.

Note that the concepts and terminology of this

specification are compatible with those of SEMI E39.

However, SEMI E39 has specific requirements that are

intended for higher level applications and, thus, are not

applied to the Mass Flow Device Model.

SEMI E54.3-0698 © SEMI 1998, 2004 2

3.5 Operation over the entire range specified for an

attribute within a specific object instance is not a

requisite for compliance with this specification.

4 Referenced Standards

4.1 SEMI Standards

SEMI E12 — Standard for Standard Pressure,

Temperature, Density, and Flow Units Used in Mass

Flow Meters and Mass Flow Controllers

SEMI E18 — Guideline for Temperature Specifications

of the Mass Flow Controller

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services

SEMI E52 — Practice for Referencing Gases and Gas

Mixtures Used in Digital Mass Flow Controllers

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

4.2 IEEE Document

IEEE 754 — Floating Point Definition

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Terminology Defined in Standard for

Sensor/Actuator Network Common Device Model

(SEMI E54.1)

5.1.1 Attribute

5.1.2 Behavior

5.1.3 Byte

5.1.4 Character

5.1.5 Device

5.1.6 Device Manager (DM) Object

5.1.7 Device Model

5.1.8 Instance

5.1.9 Nibble

5.1.10 Object

5.1.11 S, A, and C Objects

5.1.12 Sensor Actuator Controller (SAC) Object

5.1.13 Service

1 Institute of Electrical and Electronics Engineers, IEEE Operations

Center, 445 Hoes Lane, P.O. Box 1331, Piscataway, New Jersey

08855-1331, USA. Telephone: 732.981.0060; Fax: 732.981.1721,

Website: www.ieee.org

5.1.14 State Diagram

5.2 Definitions

5.2.1 boolean (BOOL) — a binary bit representing 0

and 1 corresponding to FALSE and TRUE or

DISABLE and ENABLE respectively.

5.2.2 common device model (CDM) — refers to

Sensor/Actuator Network Common Device Model

(SEMI E54.1).

5.2.3 data type — an unsigned short integer formatted

as an enumerated byte to specify attribute data format.

The intended use of this attribute type is in cases where

an attribute, or set of attributes, may be defined,

allowing for more than one level of support (e.g., INT

or REAL). The following values are defined:

0 = INT

1 = REAL

2 = USINT

3 = SINT

4 = DINT

5 = LINT

6 = UINT

7 = UDINT

8 = ULINT

9 = LREAL

10–99 = reserved for CDM

100–199 = reserved for SDMs

200–255 = manufacturer-specified

5.2.4 data units — an unsigned integer formatted as an

enumerated byte to specify attribute data units. The

intended use of this attribute type is in cases where an

attribute, or set of attributes, may be defined, allowing

for more than one unit’s context. The values are defined

in an appendix of this document.

5.2.5 date — a data structure of four bytes used to

represent a calendar date. Table 1 defines the format of

the date data type.

Table 1 Date Format

Data # Description Range

0–1 Year Unsigned Integer

2 Month Unsigned Short

Integer(range of 1 to 12)

3 Day Unsigned Short

SEMI E54.3-0698 © SEMI 1998, 2004 3

Integer(range of 1 to 31)

5.2.6 double integer (DINT) — an integer, four bytes

long, in the range -2

to 2

–1.

5.2.7 enumerated byte — a byte with assigned meaning

to the values 0 through 255. May take on one of a

limited set of possible values.

5.2.8 full scale range — the defined 100% value of an

attribute in its assigned units. This value is not

necessarily the maximum value for the attribute. As an

example, the indicated flow attribute value may attain

120% of the full scale range.

5.2.9 gas calibration — a reference to a set of

parameters or methods which are used to calibrate or

correct the device for a particular gas type, range, and

units.

5.2.10 gas standard number — a number that refer-

ences a gas type. The number and its referenced gas

type are defined in SEMI E52.

5.2.11 gas standard symbol — a text symbol that

references a gas type. The symbol and its referenced

gas type are defined in SEMI E52.

5.2.12 last valid value (LVV) — the most recent value

successfully assigned to an attribute.

5.2.13 long integer (LINT) — an integer, eight bytes

long, in the range -2

to 2

-1.

5.2.14 long real (LREAL) — a double floating point

number, eight bytes long, as defined in IEEE 754.

5.2.15 manufacturer — in the context of this docu-

ment, this refers to the manufacturer of the device.

5.2.16 mass flow controller (MFC) — a self-contained

device, consisting of a mass flow transducer, control

valve, and control and signal-processing electronics,

commonly used in the semiconductor industry to

measure and regulate the mass flow of gas.

5.2.17 mass flow device (MFD) — a device which is

either a mass flow controller or mass flow meter.

5.2.18 mass flow meter (MFM) — a self-contained

device, consisting of a mass flow transducer and sig-

nal-processing electronics, commonly used in the

semiconductor industry to measure the mass flow of

gas.

5.2.19 null character — a byte with a value of zero.

5.2.20 programmed gas calibration — a reference to a

particular gas type, range, and units for which the

device is currently calibrated.

5.2.21 real (REAL) — a floating point number, four

bytes long, as defined by IEEE 754.

5.2.22 short integer (SINT) — an integer, one byte

long, in the range -128 to 127.

5.2.23 signed integer (INT) — an integer, two bytes

long, in the range -32768 to 32767.

5.2.24 text string — a string of one-byte characters.

See Section 5.1 for a definition of a character.

5.2.25 unsigned integer (UINT) — an integer, two

bytes long, in the range 0 to 65535.

5.2.26 unsigned short integer (USINT) — an integer,

one byte long, in the range 0 to 255.

6 Requirements

6.1 In order to implement this standard in a Mass Flow

Device, it is necessary to also implement SEMI E54.1

and one of the Sensor/Actuator Network

Communication standards. See Section 2 for more

information on a complete interoperability standard.

7 Conventions

7.1 This document embraces the Harel State Chart

notation, the transition table definition format, the

object attribute representation formats, service message

definition formats, and behavior definition formats as

specified in SEMI E54.1.

7.2 Figure 1 describes the convention for object

representation used throughout this specification.

OBJECT NAME

-------------------------

Attributes

-------------------------

Services

Figure 1

Object Representation

8 Device High Level Structure

8.1 General Description — The high level object view

of a Mass Flow Meter (MFM) device and a Mass Flow

Controller (MFC) Device is shown in Figure 2.

8.1.1 Note that the “MFM” and the “MFC” objects are

depicted in Figure 2 only for the purposes of illustrat-

ing a high level view of the device and its component

objects. In the context of this document, these objects

are not addressable, do not have addressable attributes,

do not have accessible services, nor do they exhibit any