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SEMI E54.3-0698 © SEMI 1998, 2004 5 8.1.7 General Requirements 8.1.7.1 Device Objects — All objects are define d in terms of their obj ect name and i nstance identifier. Identifiers for all objects described in this docu…

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SEMI E54.3-0698 © SEMI 1998, 2004 4
defined behavior. These objects are only included in the
figures to aid in the visualization of the device.
8.1.2 This document defines in detail all of the
component objects unique to the MFC and the MFM
devices. References, rather than definitions, are
included for the DM, the SAC, and other objects
defined in SEMI E54.1.
8.1.3 Many of the objects defined in this document
inherit properties from other objects. The properties
inherited include attribute, service, and behavior
definitions. These other objects are specified here or in
SEMI E54.1.
8.1.4 This document provides for future extensions, as
well as manufacturer-specific enhancements, by
reserving object attribute identifiers and object service
identifiers. Specifically, all object definitions in this
document specify or reserve the first 64 attribute
identifiers (A1 through A64) and the first 64 service
identifiers (S1 through S64), allowing manufacturers to
specify identifiers beyond these ranges. Additionally,
byte-enumerated attributes are specified or reserved
from 0 to 63, allowing manufacturers to specify
enumerations beyond this range (64 to 255).
8.1.5 Mass Flow Meter (MFM) Device Description —
A Mass Flow Meter device profile is composed of the
component objects and object relationships shown in
Figure 2.
8.1.6 Mass Flow Controller (MFC) Device Description
— A Mass Flow Controller device profile is composed
of (1) all of the component objects and object
relationships of the Mass Flow Meter Device in
addition to (2) the component objects and object
relationships as shown in Figure 2.
SAC
(defined in CDM)
DM
(defined in CDM)
MFM Device
Controller
(defined in CDM)
Actuator-AO-MF
--------------------
ValveType
Override
Assembly-MFM
-----------------
Sensor-AI-MF
-------------------------
FlowTotalizer
FlowHours
ZeroingStatus
ZeroOffsetMode
AutoRangeStatus
-------------------------
PerformZeroOffset
AutoRange
QuerySupportedGasType
SelectProgrammedGasType
InsertGasType
DeleteGasType
GetGasCalibrationDataValue
SetGasCalibrationDataValue
MFC Device
Sensor-AI-Aux
------------------
Assembly-MFC
--------------------
SISO-Setpoint
-------------------
RampType
RampRate
Ratio
SISO
------------------
Input
Output
DataType
Sensor-AI
(defined in CDM)
Sensor-AI
(defined in CDM)
Local Link
(defined in CDM)
Local Link
(defined in CDM)
Local Link
(defined in CDM)
Actuator-AO
(defined in CDM)
Sensor-AI-AT
------------------
Sensor-AI
(defined in CDM)
Assembly
(defined in CDM)
Assembly
(defined in CDM)
Figure 2
Mass Flow Meter Device and Mass Flow Controller Device
High Level Structure
SEMI E54.3-0698 © SEMI 1998, 2004 5
8.1.7 General Requirements
8.1.7.1 Device Objects — All objects are defined in terms of their object name and instance identifier. Identifiers
for all objects described in this document are summarized in Table 2.
Table 2 Mass Flow Device Objects
R
eferenced Document
Section
Object Name
Object
Identifier
MFC
Minimum
Instances
MFM
Minimum
Instances
Maximum Instances
8.2 Device Manager
(DM)
MFD1 1 1 1
8.3 Sensor Actuator
Controller (SAC)
MFD2 1 1 1
8.4 Sensor-AI-MF MFD3 1 1 Manufacturer-Specified
8.5 Sensor-AI-AT MFD4 0 0 Manufacturer-Specified
8.6 Assembly-MFM MFD5 0 0 1
8.7 Sensor-AI-Aux MFD6 0 0 Manufacturer-Specified
8.8 Actuator-AO-MF MFD7 1 0 Manufacturer-Specified
8.9 Controller MFD8 1 0 1
8.10 Local Link MFD9 2 0 Manufacturer-Specified
8.11 SISO MFD10 0 0 Manufacturer-Specified
8.12 SISO-Setpoint MFD11 0 0 Manufacturer-Specified
8.13 Assembly-MFC MFD12 0 0 Manufacturer-Specified
— Reserved MFD13–
MFD64
– – —
— Manufacturer-
Specified
> MFD64 – – —
8.1.7.2 Object Services — Not all object services listed in this document can necessarily be requested over the
network. They are included in this document because their behavior may generate network activity.
8.1.7.3 Object Behavior — For all service requests received over the network that are unsupported by the object, or
contain a parameter value which is beyond the supported range, or which is otherwise invalid, a network-specific
service error response is generated as specified in SEMI E54.1.
8.2 Device Manager Object (DM)
8.2.1 The Device Manager object instance is the device component responsible for managing and consolidating the
device operation as specified in SEMI E54.1. The following sections specify the components of the DM object that
are not specified in the Common Device Model.
8.2.2 Device Manager Object Attributes — Required and optional DM object instance attributes are listed in Table
3.
Table 3 DM Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Device Type A1 R Yes Refer to CDM (SEMI E54.1).
Exception Detail Alarm A13 R No Refer to CDM (SEMI E54.1).
Exception Detail Warning A14 R No Refer to CDM (SEMI E54.1).
Reserved A33–A64 — — Reserved for SDM future expansion.
Manufacturer-Specified > A64 — — Manufacturer-Specific attributes
SEMI E54.3-0698 © SEMI 1998, 2004 6
8.2.2.1 Device Type — An attribute which uniquely identifies the type of the device on the network. The device
type attribute is assigned as follows:
Mass Flow Controller Device = “MFC”
Mass Flow Meter Device = “MFM”
8.2.2.2 Exception Detail Alarm (Optional) — An attribute which identifies the detailed alarm status of the device.
Table 4 defines the bit assignments associated with the alarm exception detail.
Table 4 Exception Detail Alarm Bit Assignments
Bit Device-Specific Alarm [0]
0 Reserved
1 Indicated Flow High
2 Indicated Flow Low
3 Flow Controller
4 Flow Valve Actuator
5 Reserved
6 Reserved
7 Reserved
8.2.2.3 Exception Detail Warning (Optional) — An attribute which identifies the detailed warning status of the
device. Table 5 defines the bit assignments associated with the warning exception detail.
Table 5 Exception Detail Warning Bit Assignments
Bit Device-Specific Warning [0]
0 Reserved
1 Indicated Flow High
2 Indicated Flow Low
3 Flow Controller
4 Flow Valve Actuator
5 Reserved
6 Reserved
7 Reserved
8.2.2.4 Initial and Default Values
Table 6 DM Object Attribute Initial and Default Values
Attribute Initial Value Default Value Comment
Device Type MFC, MFM MFC, MFM MFM = Mass Flow Meter Device
MFC = Mass Flow Controller Device
Exception Detail Alarm 0 0
Exception Detail Warning 0 0
8.3 Sensor Actuator Controller Object (SAC) — The Sensor Actuator Controller object instance is the device
component responsible for coordinating the interaction of the mass flow device with the sensory/actuation/control
environment as specified in SEMI E54.1.
8.4 Sensor-AI-MF Object — The Sensor-AI-MF object inherits the attributes, services, and behavior of the Sensor-
AI as defined in SEMI E54.1. The Sensor-AI-MF object instance is the device component responsible for retrieving
a reading from a physical flow sensor, optionally correcting the reading with a manufacturer-specified algorithm, or
algorithms, then making the value available to feed the Controller object instance via a Local Link object instance.