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SEMI E54.3-0698 © SEMI 1998, 2004 6 8.2.2.1 Device Type — An attribu te which uniquely identifies the type of the d evice on the network. The d evice type attribute is assigned as follows: Mass Flow Controller Device = “…

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SEMI E54.3-0698 © SEMI 1998, 2004 5
8.1.7 General Requirements
8.1.7.1 Device Objects — All objects are defined in terms of their object name and instance identifier. Identifiers
for all objects described in this document are summarized in Table 2.
Table 2 Mass Flow Device Objects
R
eferenced Document
Section
Object Name
Object
Identifier
MFC
Minimum
Instances
MFM
Minimum
Instances
Maximum Instances
8.2 Device Manager
(DM)
MFD1 1 1 1
8.3 Sensor Actuator
Controller (SAC)
MFD2 1 1 1
8.4 Sensor-AI-MF MFD3 1 1 Manufacturer-Specified
8.5 Sensor-AI-AT MFD4 0 0 Manufacturer-Specified
8.6 Assembly-MFM MFD5 0 0 1
8.7 Sensor-AI-Aux MFD6 0 0 Manufacturer-Specified
8.8 Actuator-AO-MF MFD7 1 0 Manufacturer-Specified
8.9 Controller MFD8 1 0 1
8.10 Local Link MFD9 2 0 Manufacturer-Specified
8.11 SISO MFD10 0 0 Manufacturer-Specified
8.12 SISO-Setpoint MFD11 0 0 Manufacturer-Specified
8.13 Assembly-MFC MFD12 0 0 Manufacturer-Specified
— Reserved MFD13–
MFD64
– – —
— Manufacturer-
Specified
> MFD64 – – —
8.1.7.2 Object Services — Not all object services listed in this document can necessarily be requested over the
network. They are included in this document because their behavior may generate network activity.
8.1.7.3 Object Behavior — For all service requests received over the network that are unsupported by the object, or
contain a parameter value which is beyond the supported range, or which is otherwise invalid, a network-specific
service error response is generated as specified in SEMI E54.1.
8.2 Device Manager Object (DM)
8.2.1 The Device Manager object instance is the device component responsible for managing and consolidating the
device operation as specified in SEMI E54.1. The following sections specify the components of the DM object that
are not specified in the Common Device Model.
8.2.2 Device Manager Object Attributes — Required and optional DM object instance attributes are listed in Table
3.
Table 3 DM Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Device Type A1 R Yes Refer to CDM (SEMI E54.1).
Exception Detail Alarm A13 R No Refer to CDM (SEMI E54.1).
Exception Detail Warning A14 R No Refer to CDM (SEMI E54.1).
Reserved A33–A64 — — Reserved for SDM future expansion.
Manufacturer-Specified > A64 — — Manufacturer-Specific attributes
SEMI E54.3-0698 © SEMI 1998, 2004 6
8.2.2.1 Device Type — An attribute which uniquely identifies the type of the device on the network. The device
type attribute is assigned as follows:
Mass Flow Controller Device = “MFC”
Mass Flow Meter Device = “MFM”
8.2.2.2 Exception Detail Alarm (Optional) — An attribute which identifies the detailed alarm status of the device.
Table 4 defines the bit assignments associated with the alarm exception detail.
Table 4 Exception Detail Alarm Bit Assignments
Bit Device-Specific Alarm [0]
0 Reserved
1 Indicated Flow High
2 Indicated Flow Low
3 Flow Controller
4 Flow Valve Actuator
5 Reserved
6 Reserved
7 Reserved
8.2.2.3 Exception Detail Warning (Optional) — An attribute which identifies the detailed warning status of the
device. Table 5 defines the bit assignments associated with the warning exception detail.
Table 5 Exception Detail Warning Bit Assignments
Bit Device-Specific Warning [0]
0 Reserved
1 Indicated Flow High
2 Indicated Flow Low
3 Flow Controller
4 Flow Valve Actuator
5 Reserved
6 Reserved
7 Reserved
8.2.2.4 Initial and Default Values
Table 6 DM Object Attribute Initial and Default Values
Attribute Initial Value Default Value Comment
Device Type MFC, MFM MFC, MFM MFM = Mass Flow Meter Device
MFC = Mass Flow Controller Device
Exception Detail Alarm 0 0
Exception Detail Warning 0 0
8.3 Sensor Actuator Controller Object (SAC) — The Sensor Actuator Controller object instance is the device
component responsible for coordinating the interaction of the mass flow device with the sensory/actuation/control
environment as specified in SEMI E54.1.
8.4 Sensor-AI-MF Object — The Sensor-AI-MF object inherits the attributes, services, and behavior of the Sensor-
AI as defined in SEMI E54.1. The Sensor-AI-MF object instance is the device component responsible for retrieving
a reading from a physical flow sensor, optionally correcting the reading with a manufacturer-specified algorithm, or
algorithms, then making the value available to feed the Controller object instance via a Local Link object instance.
SEMI E54.3-0698 © SEMI 1998, 2004 7
8.4.1 Sensor-AI-MF Object Attributes
Table 7 Sensor-AI-MF Object Attributes
Attribute Name
Attribute
Identifier
Access Network Required Form
Flow Totalizer A1 RW No REAL
Flow Hours A2 R No ULINT
Zero Offset Mode A5 RW No Enumerated Byte
Zeroing Status A6 R No Enumerated Byte
Autorange Status A7 R No Enumerated Byte
Reserved A8–A64 — — Reserved for future expansion
Manufacturer-Specified > A64 — — Manufacturer-Specific attributes
8.4.1.1 Flow Totalizer (Optional) — An attribute that maintains the volume of gas in standard cubic centimeters
(SCC) that has flowed through the device since the last time the flow totalizer attribute value was set to zero.
8.4.1.2 Flow Hours (Optional) — An attribute which identifies the number of hours that the device has been
flowing gas since the last time the flow hours attribute value was set to zero, as specified by the manufacturer. The
attribute is an unsigned long integer with a resolution of 1 hour.
8.4.1.3 Zero Offset Mode (Optional) — An attribute which specifies the zero offset formula to be applied to
produce the value attribute. This attribute is an enumerated byte that can take on one of the following values:
0 = Disable
1 = Enable Application of Formula
2 = Enable Automatic Zeroing
3–63 = Reserved
64–255 = Manufacturer-Specified
8.4.1.4 Zeroing Status (Optional) — An attribute which specifies whether the object is in the ZEROING substate.
This attribute is an enumerated byte that can take on one of the following values:
0 = Not Zeroing
1 = Zeroing
8.4.1.5 Autorange Status (Optional) — An attribute which specifies whether the object is in the AUTORANGING
sub-state. This attribute is an enumerated byte that can take on one of the following values:
0 = Not Autoranging
1 = Autoranging
8.4.1.6 Initial and Default Values
Table 8 Sensor-AI-MF Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Flow Totalizer LVV 0
Flow Hours LVV 0
Zero Offset Mode LVV Disable
Zeroing Status Not Zeroing Not Zeroing
Autorange Status LVV Not Autoranging
8.4.2 Sensor-AI-MF Object Services — The services provided by the Sensor-AI-MF object instance are defined in
SEMI E54.1. The Sensor-AI-MF object supports the additional services listed below.
8.4.2.1 All Gas Correction services are optional. Gas correction may be handled within the device as a pre-assigned
gas calibration or may not be implemented at all. If these services are available, it is manufacturer-specific as to