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SEMI E54.3-0698 © SEMI 1998, 2004 9 Table 11 Query -Supported Gas Types Service Para meter Definitions Parameter Request/ Indication Response/ Confirmation Data Type Description Query Type M — Byte 0 = specific gas type …

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SEMI E54.3-0698 © SEMI 1998, 2004 8
whether the device supports references to gas standard number, gas standard symbol, or both. It is strongly
recommended that, if a device supports only one method of referencing gas types, it should be gas standard number.
8.4.2.2 A device may support any of these services, in whole or in part, as specified by the manufacturer. A
manufacturer may specify a subset of the service parameter values which is supported. The following table lists the
services sup-ported by the Sensor-AI-MF object instance:
Table 9 Sensor-AI-MF Object Services
Service Service Identifier Type Description
Perform Zero Offset S1 R Used to instruct the object to perform an automatic zeroing
operation.
Query-Supported Gas Types S2 R Used to query the device to determine whether a specific gas
calibration is supported.
Selected Programmed Gas
Type
S3 R Used to select the gas type and associated data to be used as
the current programmed gas calibration.
Insert Gas Type S4 R Used to add a gas type to the list of available gas types.
Delete Gas Type S5 R Used to remove a gas type from the list of available gas types.
Get Gas Calibration Data
Value
S6 R Used to request the value of a specific gas calibration data
value.
Set Gas Calibration Data
Value
S7 R Used to set the value of a specific gas calibration data value.
Autorange S8 R Used to enter the AUTORANGING state.
Reserved S9–S64 — Reserved for future expansion.
Manufacturer-Specified > S64 — Manufacturer-Specific services
8.4.2.3 Perform Zero Offset (Optional) — This service is used to instruct the Sensor-AI-MF object instance to
perform a one-time automatic zeroing operation on the device or to reset the offset attribute value to zero. This serv-
ice causes the automatic zeroing of the Sensor-AI-MF object instance value attribute by modifying the value of the
offset attribute in order to yield a value of zero for the value attribute. Table 10 describes the parameters specified
for this service.
Table 10 Perform Zero Service Parameter Definitions
Parameter
R
equest/Indicati
on
Response/
Confirmation
Data Type
Description
Command M — Byte Enumerated Byte:
0 = Set offset attribute to zero
1 = Calculate offset
2 = Cancel Zeroing
3–63 = Reserved
64–255 = Manufacturer-Specified
8.4.2.4 Query-Supported Gas Types Service (Optional) — This service is used to query the device to determine
whether a specific gas type, range, and units is supported. Supported, in this context, implies that the device contains
suitable gas calibration correction data or methods to correct the flow measurement for the specified gas type, range,
and units. The query can be made by referencing either gas standard number or gas standard symbol (see Section 5
for a definition of “gas standard number” and “gas standard symbol”). The entire list of supported gas standard
numbers or gas standard symbols (with ranges and units) can also be requested. The following table describes the
parameters specified for this service:
SEMI E54.3-0698 © SEMI 1998, 2004 9
Table 11 Query-Supported Gas Types Service Parameter Definitions
Parameter
Request/
Indication
Response/
Confirmation
Data Type
Description
Query Type M — Byte 0 = specific gas type
1 = all currently supported gas calibrations
2 = currently programmed gas calibration
Gas Standard Number C* — Unsigned Integer 0 = use standard gas symbol field
n = gas standard number
Gas Standard Symbol C* — Text String null character = not specified
text string = gas standard symbol
Full Scale Range C* — Real 0 = not specified
n = full scale range
Units C* — UINT Indication of the units associated with the full scale
range.
Valid Flag — M Byte 0 = Not Valid
1 = Valid
Size of List — M Unsigned Integer Number of gas calibrations in the list.
List of Gas Calibrations — M Array of
Structures
The list of gas calibrations.
* Parameter is Mandatory for Query Type = 0.
8.4.2.4.1 Query Type — This parameter is used to specify the type of service response. It is an enumerated byte that
can take on the following values:
0 = specific gas type
1 = all currently supported gas calibrations
2 = currently programmed gas calibration
3–63 = Reserved
64–255 = Manufacturer-Specified
8.4.2.4.2 Gas Standard Number — This parameter is used to specify a gas standard number, for which device
support is being queried. A value of “0” indicates that the following parameter “gas standard symbol” is used instead
to reference the gas type.
8.4.2.4.3 Gas Standard Symbol — This parameter is used to specify a gas standard symbol, for which device
support is being queried. If the gas standard number parameter has a value that is not zero, then this parameter will
have the value of null character.
8.4.2.4.4 Full Scale Range — This parameter is used to specify the full scale range, for which device support is
being queried. See Section 5 for a definition of “full scale range.” A value of “0” queries the device to return the
entire list of full scale ranges for the specified gas type.
8.4.2.4.5 Units — This parameter is used to specify the units associated with the full scale range specified in the
service request. Its values are defined in SEMI E54.1. The supported list includes:
SCCM
SLM
Percent
Volts
Millivolts
Counts
8.4.2.4.6 Valid Flag — The first parameter of a Query-Supported Gas Type service response is a byte that indicates
whether the requested gas type, range, and units are supported. If an entire list was requested, and at least one gas
calibration exists, this byte will have the value of “Valid.”
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8.4.2.4.7 Size of List — This parameter is an unsigned integer that specifies the number of gas calibrations in the list
that follows.
8.4.2.4.8 List of Gas Calibrations — This attribute is an array of structures that identifies the gas calibrations
supported in the device. The format of the structure is gas standard number, gas standard symbol (zero if not
supported), full scale range, and units.
8.4.2.5 Select Programmed Gas Type Service (Optional) — This service is used to select the gas type, range, and
units of the programmed gas calibration to be used by the device (see Section 5 for a definition of “programmed gas
calibration”). The following table describes the parameters specified for this service:
Table 12 Select Programmed Gas Type Service Parameter Definitions
Parameter
Request/
Indication
Response/
Confirmation
Data Type
Description
Gas Standard
Number
M — UINT 0 = use gas standard symbol field
n = gas standard number
Gas Standard
Symbol
M — Text String null character = not specified
text string = gas standard symbol
Range Select Mode M — Byte 0 = select highest full scale range
1 = use full scale range and units specified
2 = use full scale range and units greater than or equal to
specified
Full Scale Range C* — REAL Full scale range of which the select references.
Units C* — UINT Indication of the units associated with the full scale range.
* Parameter is Mandatory for Range Select Mode = 1 and 2.
8.4.2.5.1 Gas Standard Number — This parameter is used to specify a gas standard number, for which device
support is being queried. A value of “0” indicates that the following parameter “gas standard symbol” is used instead
to reference the gas type.
8.4.2.5.2 Gas Standard Symbol — This parameter is used to specify a gas standard symbol, for which device sup-
port is being queried. If the gas standard number parameter has a value that is not zero, then this parameter will have
the value of null character.
8.4.2.5.3 Range Select Mode — This parameter is used to specify the mode by which the programmed gas is se-
lected. It is an enumerated byte that can take on the following values:
0 = Select highest full scale range
1 = Use full scale range and units specified
2 = Use full scale range and units greater than or equal to specified
3–63 = Reserved
64–255 = Manufacturer-Specified
8.4.2.5.4 Full Scale Range — This parameter is used to specify the full scale range to be selected as the current
programmed gas calibration full scale range.
8.4.2.5.5 Units — This parameter specifies the units associated with the full scale range to be set as the current
programmed gas calibration being used by the device. If the Full Scale Range parameter has the value “0,” this pa-
rameter is not included in the request. Its values are defined in Section 8.4.2.2.
8.4.2.6 Insert Gas Type Service (Optional) — This service is used to add a gas calibration to the list of supported
gas calibrations. This service will typically be invoked while calibrating the device, since it has not specified what, if
any, gas calibration data or methods will be set as the new gas calibration. The Set Gas Calibration Data Value
service will generally be required to set the gas calibration data or methods after invoking this service. The
following table describes the parameters specified for this service: