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SEMI E54.3-0698 © SEMI 1998, 2004 15 8.4.3.2 Sensor-A I-MF OPERATING Application Process – Flow Totalizer — The value of the flow totalizer attribute is incremented at a rate of once every cu bic centimeter of gas flow. …

SEMI E54.3-0698 © SEMI 1998, 2004 14

being set. The specific value to be set is the last parameter passed in the service request. The following table

describes the parameters specified for this service:

Table 18 Set Calibration Data Value Service Parameter Definitions

Parameter

Request/

Indication

Response/

Confirmation

Data Type

Description

Gas Standard Number M — INT -1 = current programmed gas calibration

0 = use gas standard symbol field

n = gas standard number

Gas Standard Symbol M — Text String null character = not specified

text string = gas standard symbol

Full Scale Range M — REAL 0 = not specified

n = full scale range

Units M — UINT Indication of the units associated with the full scale range.

Data Index M — Byte The identifier of the particular gas calibration datum within the

list of data values.

Size of List M — Byte This parameter specifies the number of values in the list that

follows.

Zero C — REAL zero offset

Span C — REAL span multiplier

Calibration Date C — Date The date of calibration for a particular gas type and full scale

range.

Calibration Gas Standard

Number

C — UINT The gas standard number representing the gas used to calibrate

the device.

Calibration Temperature C — REAL The standard temperature of calibration conditions.

Calibration Pressure C — REAL The standard pressure of the calibration conditions.

Manufacturer-Specified

Parameters

C — Manufacture

r-Specific

For a description of these parameters, see the preceding section.

8.4.2.10 Autorange Service (Optional) — This service is used to instruct the Sensor-AI-MF object instance to enter

the AUTORANGING state from the NOT AUTORANGING state or to enter the NOT AUTORANGING state from

the AUTORANGING state. The following table describes the parameters specified for this service:

Table 19 Autorange Service Parameter Definitions

Parameter

Request/

Indication

Response/

Confirmation

Data Type

Description

Command M — Byte Enumerated Byte:

0 = enter NOT AUTORANGING state

1 = enter AUTORANGING state

2–63 = Reserved

64–255 = Manufacturer-Specified

8.4.3 Sensor-AI-MF Object Behavior — The behavior exhibited by the Sensor-AI-MF object instance is inherited

from the Sensor-AI object defined in SEMI E54.1. Additional specific behavior associated with the Sensor-AI-MF

object is defined below.

8.4.3.1 Sensor-AI-MF OPERATING Application Process — A reading is retrieved from a physical flow sensor.

This reading may be corrected with a manufacturer-specified algorithm. This corrected reading becomes the input to

the offset and gain formula to generate the value attribute as referenced in SEMI E54.1.

8.4.3.1.1 For Gas Correction, the value retrieved is corrected with a manufacturer-specified algorithm using the

correction values, parameters, coefficients, or methods for the programmed gas calibration.

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8.4.3.2 Sensor-AI-MF OPERATING Application Process–Flow Totalizer — The value of the flow totalizer attribute

is incremented at a rate of once every cubic centimeter of gas flow. Whenever the flow totalizer attribute reaches its

maximum allowed value, it no longer is incremented and remains at the maximum value.

8.4.3.3 Sensor-AI-MF OPERATING Application Process–Flow Hours — The value of the flow hours attribute is

incremented at a rate of once every hour. Whenever the flow hours attribute reaches its maximum allowed value, it

no longer is incremented and remains at the maximum value.

8.4.3.4 Sensor-AI-MF ZEROING Application Process — The Zeroing application process is described as follows:

Certain manufacturer-specified service requests may be sent to other objects. The value of offset is set such that

value is nulled to zero. The Sensor-AI-MF object instance determines, using a manufacturer-specified method, when

a Zeroing application process is completed.

8.4.3.4.1 If a Perform Zero Offset: Command = 2 (cancel) service request is received while in the ZEROING state,

the original value of the offset attribute is restored, and the process is considered Failed. If a Perform Zero Offset:

Command = 0 (set offset attribute to zero) service request is received while in the ZEROING state, the offset

attribute is set to zero, and the process is considered Failed. If a Perform Zero Offset: Command = 1 (calculate

offset) service request is received while in the ZEROING state, the process is simply restarted.

8.4.3.4.2 Upon completion, the appropriate Pass or Fail service response is reported to the requesting object

instance, and an internal Operate service request to this object is generated.

8.4.3.4.3 The Sensor-AI-MF object instance supports the additional behavior sub-states (defined in Figure 3) within

the OPERATING state. Table 20 defines the additional sub-states, and Table 21 defines the additional state

transitions specified for this object.

NOT

ZEROING

OPERATI NG

Figure 3

Sensor-AI-MF Object Behavior Additional Sub-States

Table 20 Sensor-AI-MF Object Behavior State Descriptions

State Description

NOT ZEROING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.

ZEROING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.

Additionally, the Sensor-AI-MF object instance is running the Sensor-AI-MF ZEROING application process.

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Table 21 Sensor AI-MF Object Behavior State Transition Matrix

# Current State Trigger New State Action Comments

4 NORMAL

OPERATING

Get Attribute, Set Attribute,

Restore Defaults request,

Perform Zero Offset request

(command ≠ 1)

NORMAL

OPERATING

Get Attribute, Set Attribute,

Restore Defaults appropriate

response

Valid for all sub-

states of NORMAL

OPERATING.

13 NOT ZEROING Perform Zero Offset request

(command = 1)

ZEROING Run the ZEROING application

process. Set zeroing status to

Zeroing.

14 ZEROING Operate request or Perform

Zero Offset request

(command ≠ 1)

NOT ZEROING Resume the OPERATING

application process. Set zeroing

status to Not Zeroing. Report

appropriate service response.

The mechanism for

reporting is

network-specific.

15 ZEROING Perform Zero Offset request

(command = 1)

ZEROING Restart the ZEROING

application process.

8.4.3.5 Sensor-AI-MF AUTORANGING Application Process — The Sensor-AI-MF object instance supports the

additional behavior sub-states (defined in Figure 4) within the OPERATING state. Table 22 defines the additional

sub-states, and Table 23 defines the additional state transitions specified for this object.

8.4.3.5.1 The object instance is automatically selecting gas calibrations based on a manufacturer's specified method.

This method may include a determination based on the value of the value attribute and/or on the value of the

setpoint value attribute.

NOT

AUTORANGING

OPERATING

Figure 4

Sensor-AI-MF Object Behavior Additional Sub-States

Table 22 Sensor-AI-MF Object Behavior State Descriptions

State Description

NOT AUTORANGING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.

AUTORANGING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.

Additionally, the Sensor-AI-MF object instance is running the Sensor-AI-MF AUTORANGING

application process (defined above).