semi合集-English.pdf - 第2035页

SEMI E54.8-0305 © SEMI 1999, 2005 17 9.4.4 Services 9.4.4.1 The mapping of Service Ta gs and Identifiers is defined in § 7 for SAC. The same method appl ies here for the SDM. 9.4.4.2 The additional Services of Sensor-AI-…

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SEMI E54.8-0305 © SEMI 1999, 2005 16
Table 20 Sensor AI-MF Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
A1 160 Flow Totalizer
A2 161 Flow Hours
A5 164 Zero Offset Mode
A6 165 Zeroing Status
A7 166 Autorange Status
Table 21 Actuator AO-MF Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
A1 160 Valve Type
A2 161 Override
Table 22 Controller Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
A1 160 Valve Type
A2 161 Override
Table 23 SISO Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
A1 65 Input
A2 66 Output
A3 67 Data Type
Table 24 SISO Setpoint Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
A33 97 Ramp Type
A34 98 Ramp Rate
A35 99 Ratio
SEMI E54.8-0305 © SEMI 1999, 2005 17
9.4.4 Services
9.4.4.1 The mapping of Service Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.4.4.2 The additional Services of Sensor-AI-MF are mapped as described in Table 25.
Table 25 Sensor-AI-MF additional Service mapping
SEMI SDM
Service ID
Service Write Value to
Index 64
S1 Perform Zero Offset 11
S2 Query Supported Gas Type 12
S3 Select Programmed Gas Type 13
S4 Insert Gas Type 14
S5 Delete Gas Type 15
S6 Get Gas Calibration Data Value 16
S7 Set Gas Calibration Data Value 17
S8 Autorange 18
9.5 In-Situ Particle Monitor Device
9.5.1 Reference SEMI E54.10 for a complete specification of the SDM for In-Situ Particle Monitor Device (ISPM).
9.5.2 Objects
9.5.2.1 Consistent with SEMI E54.10 and ¶7.4 above, the DM and SAC objects are identified as Object 1 and
Object 2, respectively.
9.5.2.2 Notice that references for the Local Link Objects are not included; the existence of these objects are implied
by behavior and not explicitly included. Therefore, these objects are not accessible from the network.
9.5.2.3 Table 26 shows the mapping of the SDM.
9.5.2.4 Objects specified in SEMI E54.10 are listed under the heading NCS Module reference. Every instance is
allocated to a slot number. The configuration can be modeled in the GSD by using the Module reference as key for
the module description.
Table 26 In-Situ Particle Monitor Device Object Identifiers
SDM Object
Name
SDM Object ID NCS Module
reference
Sensor-AI-LCS ISPMD03 203
Sensor-AI-SLS ISPMD04 204
Sensor-AI- MNS ISPMD05 205
Sensor-AI-Counter ISPMD16 216
Assembly-ISPM#1 ISPMD17 217
Assembly-ISPM#2 ISPMD18 218
Assembly-ISPM#3 ISPMD19 219
Assembly-ISPM#4 ISPMD20 220
Assembly-ISPM#5 ISPMD21 221
Assembly-ISPM#6 ISPMD22 222
Assembly-ISPM#7 ISPMD23 223
Assembly-ISPM#8 ISPMD24 224
Assembly-ISPM#9 ISPMD25 225
SEMI E54.8-0305 © SEMI 1999, 2005 18
9.5.3 Attributes
9.5.3.1 The mapping of Attribute Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.5.3.2 Tables 27–32 show the mapping of the specific SDM attributes.
Table 27 DM Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
DmA33 96 Gain
DmA34 97 Filter Bandwidth
DmA35 98 Tool State
DmA36 99 Laser Status
DmA37 100 Flow Path
DmA38 101 Volume
DmA39 102 Volume Units
DmA40 103 Leak Status
DmA41 104 Time Stamp
Table 28 SAC Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
SacA65 129 Number of Bins
SacA66 130 Count Mode
SacA67 131 Duration
Table 29 Sensor AI-LCS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
LcsA1 160 Reading Valid
LcsA2 161 Full Scale
LcsA3 162 Alarm Settling Time
LcsA4 163 Warning Settling Time
Table 30 Sensor AI-SLS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
SlsA1 160 Reading Valid
SlsA2 161 Full Scale
SlsA3 162 Alarm Settling Time
SlsA4 163 Warning Settling Time