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SEMI E54.8-0305 © SEMI 1999, 2005 19 Table 31 Sensor AI-MNS Object A tt ribute Identifiers SEMI SDM Attribute ID PROFIBUS Index Attribute MnsA1 160 Reading Valid MnsA2 161 Full Scale MnsA3 162 Alarm Settling Time MnsA4 1…

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SEMI E54.8-0305 © SEMI 1999, 2005 18
9.5.3 Attributes
9.5.3.1 The mapping of Attribute Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.5.3.2 Tables 27–32 show the mapping of the specific SDM attributes.
Table 27 DM Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
DmA33 96 Gain
DmA34 97 Filter Bandwidth
DmA35 98 Tool State
DmA36 99 Laser Status
DmA37 100 Flow Path
DmA38 101 Volume
DmA39 102 Volume Units
DmA40 103 Leak Status
DmA41 104 Time Stamp
Table 28 SAC Object Additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
SacA65 129 Number of Bins
SacA66 130 Count Mode
SacA67 131 Duration
Table 29 Sensor AI-LCS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
LcsA1 160 Reading Valid
LcsA2 161 Full Scale
LcsA3 162 Alarm Settling Time
LcsA4 163 Warning Settling Time
Table 30 Sensor AI-SLS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
SlsA1 160 Reading Valid
SlsA2 161 Full Scale
SlsA3 162 Alarm Settling Time
SlsA4 163 Warning Settling Time
SEMI E54.8-0305 © SEMI 1999, 2005 19
Table 31 Sensor AI-MNS Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
MnsA1 160 Reading Valid
MnsA2 161 Full Scale
MnsA3 162 Alarm Settling Time
MnsA4 163 Warning Settling Time
Table 32 Sensor AI-Counter Object Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
CounterA1 160 Reading Valid
CounterA2 161 Full Scale
CounterA3 162 Alarm Settling Time
CounterA4 163 Warning Settling Time
CounterA5 164 Upper Size
CounterA6 165 Lower Size
9.5.4 Services
9.5.4.1 The mapping of Service Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.5.4.2 The additional Services of DM are mapped as described in Table 33.
Table 33 DM additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 96
DmS1 Laser On 11
DmS2 Laser Off 12
9.5.4.3 The additional Services of SAC are mapped as described in Table 34.
Table 34 SAC Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
SacS1 Clear Counts 11
9.6 Endpoint Device
9.6.1 Reference SEMI E54.11 for a complete specification of the SDM for Endpoint Devices.
9.6.2 Date-and-Time data structure shall be mapped to PROFIBUS data type Time Of Day. An Offset of 4383 has
to be added to Time Of Day day value to obtain the number of days since 1/1/72 (Time Of Day base is 1/1/84).
9.6.3 Objects
9.6.3.1 Consistent with SEMI E54.11 and ¶7.4 above, the DM and SAC objects are identified as Object 1 and
Object 2, respectively.
9.6.3.2 Notice that references for the Local Link Objects are not included; the existence of these objects are implied
by behavior and not explicitly included. Therefore, these objects are not accessible from the network.
SEMI E54.8-0305 © SEMI 1999, 2005 20
9.6.3.3 Table 35 shows the mapping of the SDM.
9.6.3.4 Objects specified in SEMI E54.11 are listed under the heading NCS Module reference. Every instance is
allocated to a slot number. The configuration can be modeled in the GSD by using the Module reference as key for
the module description.
9.6.3.5 The Sensor-BI-TH-EP can occur more than once. This shall be modeled in GSD in that way, that this
Module ID can be placed in several slots.
Table 35 Endpoint Device Object Identifiers
SDM Object
Name
SDM Object ID NCS Module
reference
Sensor-BI-TH-EP EPD3 203
Assembly-EPD#1 EPD4 204
Assembly- EPD#2 EPD5 205
Assembly- EPD#3 EPD6 206
Assembly- EPD#4 EPD7 207
9.6.4 Attributes
9.6.4.1 The mapping of Attribute Tags and Identifiers is defined in §7 for SAC. The same method applies here for
the SDM.
9.6.4.2 Tables 36 and 37 show the mapping of the specific SDM attributes.
Table 36 DM Object additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
SacA65 129 Number of Endpoint Objects
Table 37 Sensor-BI-TH-EP Object additional Attribute Identifiers
SEMI SDM
Attribute ID
PROFIBUS
Index
Attribute
EpA1 160 Minimum Time
EpA2 161 Maximum Time
EpA3 162 Target Time
EpA4 163 Elapsed Time
EpA5 164 Time Stamp
EpA6 165 Recipe Identifier
EpA7 166 Step Identifier