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SEMI E54.9-0303 © SEMI 2000, 2003 11 Table 22 SISO Object Instance Attributes and Services SISO Class ID = 134, Instance = 01 Attributes ID Attribute Name SDM Tag 128 Input A1 129 Output A2 130 Data Type A3 Services ID S…

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SEMI E54.9-0303 © SEMI 2000, 2003 10
Table 16 Sensor-AI-AT Object Instance Attributes
and Services
Sensor-AI-AT
Class ID = 130, Instance = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.3 Assembly-MFM –– The presentation of the
Assembly Mass Flow Meter (Assembly-MFM) object
instance attributes and services are as indicated in Table
17.
Table 17 Assembly-MFM Object Instance Attributes
and Services
Assembly-MFM
Class ID = 131, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.4 Sensor-AI-Aux –– The presentation of the Sensor
Analog Input Auxiliary (Sensor-AI-Aux) object
instance attributes and services are as indicated in Table
18.
Table 18 Sensor-AI-Aux Object Instance Attributes
and Services
Sensor-AI-Aux
Class ID = 132, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.5 Actuator-AO-MF –– The presentation of the
Actuator Analog Output Mass Flow (Actuator-AO-MF)
object instance attributes and services are as indicated
in Table 19.
Table 19 Actuator-AO-MF Object Instance
Attributes and Services
Actuator-AO – MF
Class ID = 133, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Valve Type A1
129 Override A2
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.6 Controller –– The presentation of the extended
Controller (Ca) object instance attributes and services
are as indicated in Table 20.
Table 20 Controller Object Instance Attributes and
Services
Controller
Class ID = 39, Instance ID = 01 through q
Attributes
ID Attribute Name SDM Tag
128 Alarm Settling Time CaA21
129 Warning Settling Time CaA24
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.7 Local Link –– The presentation of the extended
Local Link (Lnk) object instance attributes and services
are as indicated in Table 21.
Table 21 Local Link Object Instance Attributes and
Services
Local Link
Class ID = 4, Instance ID = 01 through j
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.8 SISO –– The presentation of the Single Input
Single Output (SISO) object instance attributes and
services are as indicated in Table 22.
SEMI E54.9-0303 © SEMI 2000, 2003 11
Table 22 SISO Object Instance Attributes and
Services
SISO
Class ID = 134, Instance = 01
Attributes
ID Attribute Name SDM Tag
128 Input A1
129 Output A2
130 Data Type A3
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.2.9 SISO-Setpoint –– The presentation of the Single
Input Single Output Setpoint (SISO-Setpoint) object
instance attributes and services are as indicated in Table
23.
Table 23 SISO-Setpoint Object Instance Attributes
and Services
SISO-Setpoint
Class ID = 135, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
161 Ramp Type A33
162 Ramp Rate A34
163 Ratio A35
Services
ID Service Name SDM Tag
--- No additional services defined. --
9.2.10 Assembly-MFC –– The presentation of the
Assembly Mass Flow Controller (Assembly-MFC)
object instance attributes and services are as indicated
in Table 24.
Table 24 Assembly-MFC Object Instance Attributes
and Services
Assembly-MFC
Class ID = 136, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined. --
Services
ID Service Name SDM Tag
-- No additional services defined. --
9.3 Specific Device Model For In-Situ Particle Monitor
Device — These sections detail the network mapping
required to support the Specific Device Model for In-
Situ Particle Monitor (ISPM) Devices. Table 25
summarizes the In-Situ Particle Monitor Device Object
types. Subsequent Tables 26 to 40 details the attributes
and services associated with each In-Situ Particle
Monitor Device object type.
Table 25 In-Situ Particle Monitor Device Object
Types
SDM Object
Identifier
Object Name Modbus
Class ID
ISPMD1 (DM) Device Manager 1
ISPMD2 (SAC) Sensor Actuator Controller 2
ISPMD3 Sensor-AI-LCS 137
ISPMD4 Sensor-AI-SLS 138
ISPMD5 Sensor-AI-MNS 139
ISPM16 Sensor-AI-Counter 140
ISPMD17 Assembly-ISPM#1 141
ISPMD18 Assembly-ISPM#2 142
ISPMD19 Assembly-ISPM#3 143
ISPMD20 Assembly-ISPM#4 144
ISPMD21 Assembly-ISPM#5 145
ISPMD22 Assembly-ISPM#6 146
ISPMD23 Assembly-ISPM#7 147
ISPMD24 Assembly-ISPM#8 148
ISPMD25 Assembly-ISPM#9 149
9.3.1 Device Manager (DM) –– The presentation of the
extended ISPM Device Manager (DM) object attributes
and services are as indicated in Table 26.
Table 26 DM Object Instance Attributes and
Services
Device Manager Object (DM)
Class ID = 01, Instance ID = 01
Attributes
ID Attribute Name CDM Tag
128 Gain DmA33
129 Filter Bandwidth DmA34
130 Tool State DmA35
131 Laser Status DmA36
132 Flow Path DmA37
133 Volume DmA38
134 Volume Units DmA39
135 Leak Status DmA40
136 Time Stamp DmA41
Services
ID Service Name CDM Tag
33 Laser On DmS1
35 Laser Off DmS2
SEMI E54.9-0303 © SEMI 2000, 2003 12
9.3.2 Sensor Actuator Controller (SAC) –– The
presentation of the extended ISPM Sensor Actuator
Controller (SAC) object attributes and services are as
indicated in Table 27.
Table 27 SAC Object Instance Attributes and
Services
Sensor, Actuator, Controller Object (SAC)
Class ID = 02, Instance ID = 01
Attributes
ID Attribute Name CDM Tag
65 Number of Bins SacA65
66 Count Mode SacA66
67 Duration SacA67
Services
ID Service Name CDM Tag
33 Clear Counts SacS33
9.3.3 Sensor-AI-LCS –– The presentation of the Sensor
Analog Input Laser Current Sensor (Sensor-AI-LCS)
object attributes and services are as indicated in Table
28.
Table 28 Sensor-AI-LCS Object Instance Attributes
and Services
Sensor-AI-LCS
Class ID = 137, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid LcsA1
129 Full Scale LcsA2
130 Alarm Settling Time LcsA3
131 Warning Settling Time LcsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.4 Sensor-AI-SLS –– The presentation of the Sensor
Analog Input Stray Light Sensor (Sensor-AI-SLS)
object attributes and services are as indicated in Table
29.
Table 29 Sensor-AI-SLS Object Instance Attributes
and Services
Sensor-AI-SLS
Class ID = 138, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid SlsA1
129 Full Scale SlsA2
130 Alarm Settling Time SlsA3
Sensor-AI-SLS
Class ID = 138, Instance ID = 1 through r
131 Warning Settling Time SlsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.5 Sensor-AI-MNS –– The presentation of the
Sensor Analog Input Medium Noise Sensor (Sensor-AI-
MNS) object attributes and services are as indicated in
Table 30.
Table 30 Sensor-AI-MNS Object Instance Attributes
and Services
Sensor-AI-MNS
Class ID = 139, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid MnsA1
129 Full Scale MnsA2
130 Alarm Settling Time MnsA3
131 Warning Settling Time MnsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.6 Sensor-AI-Counter –– The presentation of the
Sensor Analog Input Counter (Sensor-AI-Counter)
object attributes and services are as indicated in Table
31.
Table 31 Sensor-AI-Counter Object Instance
Attributes and Services
Sensor-AI-Counter
Class ID = 140, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Reading Valid CounterA1
129 Full Scale CounterA2
130 Alarm Settling Time CounterA3
131 Warning Settling Time CounterA4
132 Upper Size CounterA5
133 Lower Size CounterA6
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.7 Assembly-ISPM#1 –– The presentation of the
Assembly #1 In-Situ Particle Monitor (Assembly-
ISPM#1) object attributes and services are as indicated
in Table 32.