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SEMI E54.10-0600 © SEMI 2 000 4 8.1.7 G eneral Requir ements 8.1.7.1 Device Objects — All objects a r e de fin ed in terms of their object nam e and Class/Object identifier. Identifiers for all objects de scribed in this…

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SEMI E54.10-0600 © SEMI 20003
Data Item Description Range
1/1/72 (UINT)
7 Conventions
7.1 This document embraces the conventions and
notations stated in Section 6 of SEMI E54.1 [3].
8 Device High Level Structu re
8.1 General Description
8.1.1 The high-level object view of an In-Situ Particle
Monitor (ISPM) Device is shown in Figure 1.
8.1.2 Note that the “ISPM” device object is depicted
in Figure 1 only for the purposes of illustrating a high
level view of the device and its component objects. In
the context of this document, this object is not
addressable, does not have addressable attributes, does
not have accessible services, and does not exhibit any
defined behavior.
8.1.3 In the remainder of this section, this document
defines in detail all of the component objects unique to
the ISPM device. References, rather than definitions,
are included for the DM, the SAC, and other objects
defined in SEMI E54.1 [3].
8.1.4 Many of the objects defined in this document
inherit properties from other objects. The properties
inherited include attribute, services, and behavior
definitions. These other objects are specified here or in
SEMI E54.1 [3].
8.1.5 This document provides for future extensions as
well as manufacturer specific enhancements by
reserving object attribute identifiers and object service
identifiers. Specifically, all object definitions in this
document specify or reserve the first 64 attribute
identifiers (A1 through A64) and the first 64 service
identifiers (S1 through S64) allowing manufacturers to
specify identifiers beyond these ranges. Additionally,
byte enumerated attributes are specified or reserved
from 0 to 63 allowing manufacturers to specify an
enumeration beyond this range (64 to 255).
8.1.6 In-Situ Particle Monitor (ISPM) Device
Description
8.1.6.1 An In-Situ particle Monitor device profile is
composed of the component objects and object
relationships shown in Figure 1.
1+
ISPM Device
Sensor-AI-LCS
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
Sensor-AI
(defined in CDM)
Sensor-AI-SLS
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
Sensor-AI-MNS
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
SAC (See NOTE 1)
Number of Bins
Count Mode
Duration
-----------
Clear Counts
DM (See NOTE 1)
Gain
Filter Bandwidth
Tool State
Laser Status
Flow Path
Volume
Volume Units
Leak Status
Time Stamp
----------------
Laser On
Laser Off
Assembly
(defined in CDM)
Assembly-ISPM #1
Sensor-AI-Counter
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
Upper Size
Low Size
Assembly-ISPM #2
Assembly-ISPM #9
•
•
•
Assembly-ISPM #48
(See
NOTE
2)
NOTE 1: The DM and SAC are taken from the CDM. Additional attributes and services are added to support the ISPM device.
NOTE 2: Assembly-ISPM #1 and Assembly-ISPM #6 objects are required. Other Assembly-ISPM objects are optional.
Figure 1
In-Situ Particle Monitor Device High Level Structure
SEMI E54.10-0600 © SEMI 2000 4
8.1.7 General Requirements
8.1.7.1 Device Objects — All objects are defined in terms of their object name and Class/Object identifier.
Identifiers for all objects described in this document are summarized in Table 2.
Table 2 In-Situ Particle Monitor Device Objects
Referenced Document Section Object Name Class/Object Identifier Minimum # Maximum #
8.2 Device Manager (DM) ISPMD1 1 1
8.3 Sensor Actuator Controller (SAC) ISPMD2 1 1
8.5 Sensor-AI-LCS ISPMD3 0 1
8.6 Sensor-AI-SLS ISPMD4 0 1
8.7 Sensor-AI-MNS ISPMD5 0 1
8.8 Sensor-AI-Counter ISPMD16 1 1024
8.9 Assembly-ISPM#1 ISPMD17 1 1
8.9 Assembly-ISPM#2 ISPMD18 0 1
8.9 Assembly-ISPM#3 ISPMD19 0 1
8.9 Assembly-ISPM#4 ISPMD20 0 1
8.9 Assembly-ISPM#5 ISPMD21 0 1
8.9 Assembly-ISPM#6 ISPMD22 1 1
8.9 Assembly-ISPM#7 ISPMD23 0 1
8.9 Assembly-ISPM#8 ISPMD24 0 1
8.9 Assembly-ISPM#9 ISPMD25 0 1
8.9 Assembly-ISPM#48 ISPMD64 0 1
— Reserved ISPM26–ISPM63 — —
— Manufacturer Specified > ISPM64 — —
8.1.7.2 Object Services — Not all object services listed in this document can necessarily be requested over the
network. They are included in this document because their behavior may generate network activity.
8.1.7.3 Object Behavior — For all service requests received over the network that are not supported by the object,
or contain a parameter value which is beyond the supported range, or which is otherwise invalid, a network specific
service error response is generated.
8.2 Device Manager Object (DM) — The Device Manager object is the device component responsible for
managing and consolidating the device operation as specified in SEMI E54.1 [3]. The following sections specify the
components of the DM object that are not specified in SEMI E54.1 or require further definition than specified in
SEMI E54.1.
8.2.1 Device Manager Object Attributes — Required and optional DM object attributes are listed in Table 3.
Table 3 DM Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Device Type A1 R Yes refer to CDM [1]
Exception Detail Alarm A13 R No refer to CDM [1]
Exception Detail Warning A14 R No refer to CDM [1]
Gain A33 RW * No REAL
Filter Bandwidth A34 RW * No REAL
Tool State A35 R No USINT, enumerated
Laser Status A36 R Yes USINT, enumerated
Flow Path A37 RW No USINT
Volume A38 R No REAL
Volume Units A39 R No Byte, enumerated
SEMI E54.10-0600 © SEMI 20005
Attribute Name Attribute Identifier Access Network Required Form
Leak Status A40 R No Byte, enumerated
Time Stamp A41 RW No Date_And_Time
Reserved A42–A64 — — Reserved for SDM future expansion
Manufacturer Specified > A64 — — Manufacturer Specific attributes
NOTE 1: “*” Indicates that the specific attribute is nonvolatile. Nonvolatile requires that the current attribute value be maintained through a
component power cycle.
8.2.1.1 Device Type — An attribute that uniquely
identifies the type of the device on the network. The
device type attribute is assigned as follows:
In-Situ Particle Monitor Device = “ISPM”
8.2.1.2 Exception Detail Alarm (Optional) — An
attribute which identifies the detailed alarm status of the
device. Table 4 defines the bit assignments associated
with the alarm exception detail.
Table 4 Exception Detail Alarm Bit Assignments
Bit Device Specific Alarm[0]
0 Reserved
1 Interlock
2 Sensor Not Detected
3 Leak Detected
4 Reserved
5 Sensor Type Changed
6 Reserved
7 Reserved
Bit Device Specific Alarm[1]
0 High Laser Current
1High Stray Light
2 High Median Noise
3 High Calibration
4 High Fill Rate
5 High Flow Rate
6 Reserved
7 Reserved
Bit Device Specific Alarm[2]
0 Low Laser Current
1Low Stray Light
2 Low Median Noise
3 Low Calibration
4 Low Fill Rate
5 Low Flow Rate
6 Reserved
7 Reserved
8.2.1.3 Exception Detail Warning (Optional) — An
attribute which identifies the detailed warning status of
the device. Table 5 defines the bit assignments
associated with the warning exception detail.
Table 5 Exception Detail Warning Bit Assignments
Bit Device Specific Warning[0]
0Reserved
10
20
30
4Reserved
50
6Reserved
7Reserved
Bit Device Specific Warning[1]
0 High Laser Current
1High Stray Light
2 High Median Noise
3 High Calibration
4 High Fill Rate
5 High Flow Rate
6Reserved
7Reserved
Bit Device Specific Warning[2]
0 Low Laser Current
1Low Stray Light
2 Low Median Noise
3 Low Calibration
4 Low Fill Rate
5 Low Flow Rate
6Reserved
7Reserved
8.2.1.4 Manufacturer Exception Detail Size (Optional)
— An attribute that specifies the number of exception
detail bytes included in the alarm or warning details.