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SEMI E54.10-0600 © SEMI 2000 21 Data Inde x Source O bject ID Source Attribu te ID Desc ription . ISPMD16 SaiA16 Sensor-AI-Counte r-ISPM #3 to Sensor-AI-Cou nter-ISPM #N-1 Valu e N ≤ 1024* ISPMD16 SaiA16 Sensor-AI-Counte…

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SEMI E54.10-0600 © SEMI 2000 20
Data Index Source Object ID Source Attribute ID Description
N ≤ 1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 26 Assembly-ISPM #4 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A35 Device Manager
Tool State
3 DM1 A41 Device Manager
Time Stamp
4 ISPMD2 SacA67 SAC
Duration
6 ISPMD2 SacA65 Sensor-AI-Counter
Number of Bins
7 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
8 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N ≤ 1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 27 Assembly-ISPM #5 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A35 Device Manager
Tool State
3 DM1 A41 Device Manager
Time Stamp
4 ISPMD2 SacA67 SAC
Duration
5 ISPMD3 SaiA16 Sensor-AI-LCS
Value (Laser Current Diagnostic)
6 ISPMD4 SaiA16 Sensor-AI-SLS
Value (Stray Light Diagnostic)
7 ISPMD5 SaiA16 Sensor-AI-MNS
Value (Median Noise Diagnostic)
8 – – Reserved (2 bytes)
9 ISPMD2 SacA65 SAC
Number of Bins
10 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
11 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
SEMI E54.10-0600 © SEMI 200021
Data Index Source Object ID Source Attribute ID Description
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N ≤ 1024*
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 28 Assembly-ISPM #6 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
Table 29 Assembly-ISPM #7 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A13 Device Manager
Exception Detail Alarm
Table 30 Assembly-ISPM #8 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A14 Device Manager
Exception Detail Warning
Table 31 Assembly-ISPM #9 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A13 Device Manager
Exception Detail Alarm
3 DM1 A14 Device Manager
Exception Detail Warning
Table 32 Assembly-ISPM #40 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A33 Device Manager
Gain
2 DM1 A13 Device Manager
Filter Bandwidth
3 ISPMD2 SacA65 SAC
Number of Bins
4 ISPMD3 SaiA73 Sensor-AI-LCS
Alarm Trip Point High (See NOTE 1.)
5 ISPMD3 SaiA76 Sensor-AI-LCS
SEMI E54.10-0600 © SEMI 2000 22
Data Index Source Object ID Source Attribute ID Description
Warning Trip Point High (See NOTE 1.)
6 ISPMD3 SaiA74 Sensor-AI-LCS
Alarm Trip Point Low (See NOTE 1.)
7 ISPMD3 SaiA77 Sensor-AI-LCS
Warning Trip Point Low (See NOTE 1.)
8 ISPMD4 SaiA73 Sensor-AI-SLS
Alarm Trip Point High (See NOTE 1.)
9 ISPMD4 SaiA76 Sensor-AI-SLS
Warning Trip Point High (See NOTE 1.)
10 ISPMD4 SaiA74 Sensor-AI-SLS
Alarm Trip Point Low (See NOTE 1.)
11 ISPMD4 SaiA77 Sensor-AI-SLS
Warning Trip Point Low (See NOTE 1.)
12 ISPMD5 SaiA73 Sensor-AI-MNS
Alarm Trip Point High (See NOTE 1.)
13 ISPMD5 SaiA76 Sensor-AI-MNS
Warning Trip Point High (See NOTE 1.)
14 ISPMD5 SaiA74 Sensor-AI-MNS
Alarm Trip Point Low (See NOTE 1.)
15 ISPMD5 SaiA77 Sensor-AI-MNS
Warning Trip Point Low (See NOTE 1.)
NOTE 1: Objects to which these attributes are linked are optional. If the associated object is not supported in the ISPM device, the data field for
the associated attribute in this assembly is set to zero and should be interpreted as having no meaning.
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