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SEMI E54.15-0305 © SEMI 2005 1 SEMI E54.15-0305 SENSOR/ACTUATOR NE TWORK COMMUNICATION SPECIFICATION FOR SafetyBUS p This specification was technically approved by the Globa l Information & Control Committee and is t…

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SEMI E54.14-0305 © SEMI 2005 22
9.6.5.3 The additional Services of Sensor BI-EP are mapped as described in Table 38.
Table 38 Sensor BI-EP Additional Service Mapping
SEMI SDM Service
ID
Service Write Value to
Index 64
EpS1 Endpoint On 11
EpS2 Endpoint Off 12
EpS3 Endpoint Start 13
EpS4 Endpoint Suspend 14
EpS5 Endpoint Resume 15
10 Related Documents
10.1 IEEE Standards
6
IEEE 802.3 — Information technology – Telecommunications and information exchange between systems – Local
and metropolitan area networks – Specific requirements – Part 3: Carrier sense multiple access with collision
detection (CSMA/CD) access method and physical layer specifications
IEEE 802.1D — Information technology – Telecommunications and information exchange between systems –
Local and metropolitan area networks – Common Specification – Media Access Control (MAC) Bridges
IEEE 802.1Q — Information technology – Telecommunications and information exchange between systems –
Local and metropolitan area networks – Common Specification – Virtual Bridged Local Area Networks
10.2 Internet Engineering Task Force Standards
7
RFC 768 — UDP: User Datagram Protocol; IETF, available at <http://www.ietf.org>
RFC 791 — IP: Internet Protocol; IETF, available at <http://www.ietf.org>
RFC 1541 — DHCP: Dynamic Host Configuration Protocol; IETF, available at <http://www.ietf.org>
10.3 Other Documents
C706, CAE Specification DCE1.1: Remote Procedure Call (RPC); OSF available at <http://www.opengroup.org/
onlinepubs/9629399/toc.htm>
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
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7 Internet Engineering Task Force, c/o Corporation for National Research Initiatives 1895 Preston White Drive, Suite 100 Reston, VA 20191-
5434, USA. Telephone: 1.703.620.8990, Fax 1.703.620.9071, Website: www.ietf.org
Copyright by SEMI® (Semiconductor Equipment and Materials
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consent of SEMI.
SEMI E54.15-0305 © SEMI 2005 1
SEMI E54.15-0305
SENSOR/ACTUATOR NETWORK COMMUNICATION SPECIFICATION
FOR SafetyBUS p
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on December 10, 2005. Initially available at www.semi.org
February 2005; to be published March 2005.
1 Purpose
1.1 This standard defines a communication specification based on the SafetyBUS p protocol to enable
communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI
specified device models (common and device specific) in a semiconductor manufacturing equipment.
1.2 Background and Motivation
1.2.1 SafetyBUS p is a device level network which provides a simple, inexpensive, fast, and deterministic means of
exchanging data among industrial devices (e.g., sensors and actuators) and higher level devices such as controllers
(e.g., programmable control systems) while at the same time providing for the communication of information at a
high priority level to support reliable operations. SafetyBUS p provides:
A solution to low-level device networking,
Access to intelligence present in low-level devices,
Networking between higher level controllers,
Master/Slave and Peer-to-Peer communication capabilities, and
Serial communication of device-critical information.
1.2.2 SafetyBUS p specifies a communication model and protocol. The Physical and Data Link Layer definitions
are defined by the Controller Area Network (CAN) technology. The CAN specification provides the Media Access
Control (MAC) methodology and physical signaling characteristics.
1.2.3 This document enables communications between intelligent devices on a SEMI compliant SAN by providing
a presentation mapping of common and specific device network visible structure and behavior to SafetyBUS p
network.
1.2.4 This Network Communication Standard specification for SafetyBUS p is not intended to be a safety guideline
for using SafetyBUS p technology. This document specifies a SAN communications standard specification based
on the Object Communication Specification (OCS) for the SafetyBUS p Protocol. This SAN is structured in
compliance with SEMI E54.1.
2 Scope
2.1 This document specifies the protocol and services that compliant intelligent devices shall support to exchange
information over the SafetyBUS p semiconductor equipment sensor/actuator network.
2.2 This document specifies the utilization of the SafetyBUS p protocol to present externally visible device
structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models
(SDMs), on a SafetyBUS p network.
2.3 This document is used in conjunction with a SEMI standard SAN Common Device Model specification, one or
more SEMI standard Specific Device Model (SDM) specifications (e.g. for a mass flow device), the SafetyBUS p
Object Communications Specification Reference Guide. Together, they describe the SafetyBUS p protocol, the
externally visible data structures and behaviors of devices utilizing the SafetyBUS p networking capability in a
SEMI compliant SAN system.
SEMI E54.15-0305 © SEMI 2005 2
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This document specifies a semiconductor equipment SAN based solely on SafetyBUS p and is a companion
document to the Object Communication Specification for the SafetyBUS p Protocol; thus a complete specification
of this standard necessarily includes the SafetyBUS p protocol specifications. There are other semiconductor
equipment SAN communications options. The specifications for these options are not included.
3.2 This standard specifies enhancements that provide additional capabilities over and above those currently
required by SafetyBUS p. In order to avoid document consistency problems, information in the Object
Communication Specification for the SafetyBUS p Protocol that relate to this standard is not repeated in this
document. This document is limited to describing enhancements or limitations to the SafetyBUS p specifications
that are imposed by this standard specification.
4 Referenced Standards
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard For Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification For Sensor/Actuator Network Specific Device Model For Mass Flow Device
SEMI E54.10 — Specification For Sensor/Actuator Network Specific Device Model For An In-Situ Particle
Monitor Device
SEMI E54.11 — Specification For Sensor/Actuator Network Specific Device Model For An Endpoint Device
4.2 ISO Standards
1
ISO 7498 — Basic Reference Model for Open Systems Interconnection
4.3 SafetyBUS p Club International
2
Specification — Object Communication Specification (OCS) for the SafetyBUS p Protocol Version 1.1
April 09, 2004 may be accessed on the SafetyBUS p Club International web site http://www.safetybus.com/semi/
Reference Guide — Pilz Automation Technology – Guide to Programmable Safety Systems, February 2002
Volume 2, 1
st
Edition
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Terminology that is common to all of the documents in this SAN standard may also be defined in the Sensor
/Actuator Network Standard (see reference SEMI E54 ¶4.1). Terminology may be reproduced here which is defined
in other SEMI documents.
5.2 Abbreviations and Acronyms
5.2.1 CAN — Controller Area Network
5.2.2 CDM — Common Device Model
5.2.3 DM — Device Manager (object)
1 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch
2 SafetyBUS p Club International Partner Association, Robert-Bosch-Str. 30, 73760 Ostfildern, Germany ,Telephone (+49) 711 3409-118, Fax:
(+49) 711 3409-449, website: www.safetybus.com