semi合集-English.pdf - 第2147页

SEMI E54.15-0305 © SEMI 2005 19 9.3.1 Device Manager –– The presentat ion of the extended IS PM De vice Manager (DM) object instance attributes and services are as indicated in Table 27. Table 27 DM Object Instance Attri…

100%1 / 7923
SEMI E54.15-0305 © SEMI 2005 18
Table 24 SISO-Setpoint Object Instance Attributes and Services
SISO-Setpoint
Class ID = 135, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
161 Ramp Type A33
162 Ramp Rate A34
163 Ratio A35
Services
ID Service Name SDM Tag
--- No additional services defined --
9.2.11 Assembly-MFC –– The presentation of the Assembly Mass Flow Controller (Assembly-MFC) object
instance attributes and services are as indicated in Table 25.
Table 25 Assembly-MFC Object Instance Attributes and Services
Assembly-MFC
Class ID = 136, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
01 Data A1
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3 Specific Device Model For In-Situ Particle Monitor Device –– These sections detail the network mapping
required to support the Specific Device Model for In-Situ Particle Monitor (ISPM) Devices (see SEMI E54.10 ¶4.1).
Table 26 summarizes the In-Situ Particle Monitor Device Object types. Subsequent Tables 27 to 42 details the
attributes and services associated with each In-Situ Particle Monitor Device object type.
Table 26 In-Situ Particle Monitor Device Object Types
SDM Object
Identifier
Object Name SafetyBUS p Class
ID
ISPMD1 (DM) Device Manager 1
ISPMD2 (SAC) Sensor Actuator Controller 2
ISPMD3 Sensor-AI-LCS 137
ISPMD4 Sensor-AI-SLS 138
ISPMD5 Assembly-AI-MNS 139
ISPMD16 Sensor-AI-Counter 140
ISPMD17 Assembly-ISPM#1 141
ISPMD18 Assembly-ISPM#2 142
ISPMD19 Assembly-ISPM#3 143
ISPMD20 Assembly-ISPM#4 144
ISPMD21 Assembly-ISPM#5 145
ISPMD22 Assembly-ISPM#6 146
ISPMD23 Assembly-ISPM#7 147
ISPMD24 Assembly-ISPM#8 148
ISPMD25 Assembly-ISPM#9 149
ISPMD64 Assembly-ISPM#48 150
SEMI E54.15-0305 © SEMI 2005 19
9.3.1 Device Manager –– The presentation of the extended ISPM Device Manager (DM) object instance attributes
and services are as indicated in Table 27.
Table 27 DM Object Instance Attributes and Services
Device Manager Object (DM)
Class ID = 01, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
128 Gain A33
129 Filter Bandwidth A34
130 Tool State A35
131 Laser Status A36
132 Flow Path A37
133 Volume A38
134 Volume Units A39
135 Leak Status A40
136 Time Stamp A41
Services
ID Service Name SDM Tag
33 Laser On S1
35 Laser Off S2
9.3.2 Sensor Actuator Controller (SAC) –– The presentation of the extended ISPM Sensor Actuator Controller
(SAC) object attributes and services are as indicated in Table 28.
Table 28 SAC Object Instance Attributes and Services
Sensor, Actuator, Controller Object (SAC)
Class ID = 02, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
65 Number of Bins SacA65
66 Count Mode SacA66
67 Duration SacA67
Services
ID Service Name SDM Tag
33 Clear Counts S33
9.3.3 Sensor-AI-LCS –– The presentation of the Sensor Analog Input Laser Current Sensor (Sensor-AI-LCS) object
instance attributes and services are as indicated in Table 29.
Table 29 Sensor-AI-LCS Object Instance Attributes and Services
Sensor-AI-LCS
Class ID = 137, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
128 Reading Valid LcsA1
129 Full Scale LcsA2
130 Alarm Settling Time LcsA3
131 Warning Settling Time LcsA4
SEMI E54.15-0305 © SEMI 2005 20
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.4 Sensor-AI-SLS –– The presentation of the Sensor Analog Input Stray Light Sensor (Sensor-AI-SLS) object
instance attributes and services are as indicated in Table 30.
Table 30 Sensor-AI-SLS Object Instance Attributes and Services
Sensor-AI-SLS
Class ID = 138, Instance ID = 1
Attributes
ID Attribute Name SDM Tag
128 Reading Valid SlsA1
129 Full Scale SlsA2
130 Alarm Settling Time SlsA3
131 Warning Settling Time SlsA4
Services
ID Service Name SDM Tag
-- No additional services defined --
9.3.5 Sensor-AI-MNS –– The presentation of the Sensor Analog Input Medium Noise Sensor (Sensor-AI-MNS)
object instance attributes and services are as indicated in Table 31.
Table 31 Sensor-AI-MNS Object Instance Attributes and Services
Sensor-AI-MNS
Class ID = 139, Instance ID = 01
Attributes
ID Attribute Name SDM Tag
128 Reading Valid MnsA1
129 Full Scale MnsA2
130 Alarm Settling Time MnsA3
131 Warning Settling Time MnsA4
Services
ID Service Name SDM Tag
-- No additional services defined --