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SEMI E54.16-0705 © SEMI 2005 39 9.3.12 Assembly-ISPM#4 — The presentation of the Assembly #4 In -Situ Particle Monito r (Assembly-ISPM#4) object instance attributes is as i ndicated in Tabl e 69. The presentation of Asse…

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Table 64 Assembly-ISPM#1 Object Instance Network Services
Assembly-ISPM#1
Profile ID = 180.84, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.10 Assembly-ISPM#2 — The presentation of the Assembly #2 In-Situ Particle Monitor (Assembly-ISPM#2)
object instance attributes is as indicated in Table 65. The presentation of the Assembly-ISPM#2 object services are
indicated in Table 66.
Table 65 Assembly-ISPM#2 Object Instance Network Variables
Assembly-ISPM#2
Profile ID = 180.85, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 66 Assembly-ISPM#2 Object Instance Network Services
Assembly-ISPM#2
Profile ID = 180.85, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.11 Assembly-ISPM#3 — The presentation of the Assembly #3 In-Situ Particle Monitor (Assembly-ISPM#3)
object instance attributes is as indicated in Table 67. The presentation of Assembly-ISPM#3 object services are
indicated in Table 68.
Table 67 Assembly-ISPM#3 Object Instance Network Variables
Assembly-ISPM#3
Profile ID = 180.86, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 68 Assembly-ISPM#3 Object Instance Network Services
Assembly-ISPM#3
Profile ID = 180.86, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
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9.3.12 Assembly-ISPM#4 — The presentation of the Assembly #4 In-Situ Particle Monitor (Assembly-ISPM#4)
object instance attributes is as indicated in Table 69. The presentation of Assembly-ISPM#4 object services are
indicated in Table 70.
Table 69 Assembly-ISPM#4 Object Instance Network Variables
Assembly-ISPM#4
Profile ID = 180.87, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 70 Assembly-ISPM#4 Object Instance Network Services
Assembly-ISPM#4
Profile ID = 180.87, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.13 Assembly-ISPM#5 — The presentation of the Assembly #5 In-Situ Particle Monitor (Assembly-ISPM#5)
object instance attributes is as indicated in Table 71. The presentation of Assembly-ISPM#5 object services are
indicated in Table 72.
Table 71 Assembly-ISPM#5 Object Instance Network Variables
Assembly-ISPM#5
Profile ID = 180.88, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 72 Assembly-ISPM#5 Object Instance Network Services
Assembly-ISPM#5
Profile ID = 180.88, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.14 Assembly-ISPM#6 — The presentation of the Assembly #6 In-Situ Particle Monitor (Assembly-ISPM#6)
object instance attributes is as indicated in Table 73. The presentation of Assembly-ISPM#6 object services are
indicated in Table 74.
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Table 73 Assembly-ISPM#6 Object Instance Network Variables
Assembly-ISPM#6
Profile ID = 180.89, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 74 Assembly-ISPM#6 Object Instance Network Services
Assembly-ISPM#6
Profile ID = 180.89, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.15 Assembly-ISPM#7 – The presentation of the Assembly #7 In-Situ Particle Monitor (Assembly-ISPM#7)
object instance attributes is as indicated in Table 75. The presentation of Assembly_ISPM#7 object services are
indicated in Table 76.
Table 75 Assembly-ISPM#7 Object Instance Network Variables
Assembly-ISPM#7
Profile ID = 180.90, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 76 Assembly-ISPM#7 Object Instance Network Services
Assembly-ISPM#7
Profile ID = 180.90, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.16 Assembly-ISPM#8 — The presentation of the Assembly #8 In-Situ Particle Monitor (Assembly-ISPM#8)
object instance attributes is as indicated in Table 77. The presentation of Assembly-ISPM#8 object services are
indicated in Table 78.
Table 77 Assembly-ISPM#8 Object Instance Network Variables
Assembly-ISPM#8
Profile ID = 180.91, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.