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SEMI E54.##-0705 © SEMI 2005 18 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of the st…

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SEMI E54.##-0705 © SEMI 2005 17
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Minimum number of the n is one and possible maximum number is 1024.
9.4.2.2 Additional objects may be defined by the manufacturer in the Device Profile for a given device.
9.4.3 Attributes and Services
9.4.3.1 Attributes
The mapping of Attribute tags and Identifiers is defined in ¶7.5.3.2 for the CDM. Basically the
same definitions are applied for attributes in the Endpoint Detector SDM.
9.4.3.2 Services
The mapping of Service tags and Identifiers is defined in ¶7.6.2.2 for the CDM. Basically the
same definitions are applied for attributes in the Endpoint Detector SDM.
9.4.3.3 EPD Specific Attributes and Services
Some objects appear in EPD SDM use additional attributes and/or
additional services.
9.4.3.3.1 SAC Object
Additional attributes and services are mapped as following tables.
Table 29 SAC Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
SacA65 33 Number of Endpoint Objects
Table 30 SAC Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S33 33 Reset Endpoint
S34 34 Download Recipe
S35 35 Upload Recipe
S36 36 Calibrate
9.4.3.3.2 Sensor-BI-TH-EP Object
Additional attributes and services are mapped as following tables.
Table 31 Sensor-BI-TH-EP Object Attribute Identifiers
Attribute ID
SDM A-LINK
Attribute Name
EpA1 192 Minimum Time
EpA2 193 Maximum Time
EpA3 194 Target Time
EpA4 195 Elapsed Time
EpA5 196 Time Stamp
EpA6 197 Recipe Identifier
EpA7 198 Step Identifier
Table 32 Sensor-BI-TH-EP Object Service Identifiers
Service ID
SDM A-LINK
Service Name
S1 16 Endpoint On
S2 17 Endpoint Off
S3 18 Endpoint Start
S4 19 Endpoint Suspend
S5 20 Endpoint Resume
SEMI E54.##-0705 © SEMI 2005 18
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
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SEMI E58-0703 © SEMI 1997, 2003 1
SEMI E58-0703
AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on October 19, 2000. Initially available at www.semi.org
January 2001; to be published March 2001. Originally published June 1997.
NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of
SEMI E58.1.
CONTENTS
1 Purpose
1.2 Background and Motivations
2 Scope
3 Referenced Documents
4 Terminology
4.1 Acronyms
4.2 General Terms
4.3 Data Types
5 Basic Requirements
6 Conventions
6.1 State Model Methodology
6.2 Object Attribute Representation
6.3 Service Message Representation
6.3.1 Service Resource Definition
6.3.2 Service Parameter Dictionary
6.3.3 Service Message Definition
7 Overview
8 State Models
8.2 SEMI E10 Equipment States
8.3 ARAMS State Model Definition
8.3.1 ARAMS State Model Diagram
8.3.2 Descriptions of ARAMS States
8.3.2.1 TOTAL TIME
8.3.2.2 MANUFACTURING
8.3.2.3 PRODUCTIVE
8.3.2.4 STANDBY
8.3.2.5 ENGINEERING
8.3.2.6 UNSCHEDULED DOWNTIME
8.3.2.7 SCHEDULED DOWNTIME
8.3.2.8 NON-SCHEDULDED TIME
8.3.3 ARAMS Substates
8.3.4 State Transitions
8.4 General Equipment Operations Model
8.4.2 State Definitions
8.4.2.1 POWER-OFF
8.4.2.2 POWER-ON
8.4.2.3 INITIALIZING
8.4.2.4 READY
8.4.2.5 IDLE
8.4.2.6 BUSY
8.4.3 General Equipment Operations Model
Table of Transitions
8.5 State Model Relationships
8.5.2 IDLE and BUSY
8.5.3 Non-Manufacturing States
9 ARAMS Substate Codes
9.2 Reserved Codes
9.3 Additional Codes
9.4 Valid ARAMS Substate Code
9.5 Manufacturing Code
10 ARAMS Tables
10.2 Definition of Tables
10.2.1 Table Types and Identifiers
10.2.2 Table Row Definition
10.2.3 Table Attributes
10.2.4 Additional Requirements
10.3 ARAMS Substate Table