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SEMI E58-0703 © SEMI 1997, 2003 9 8.1 SEMI E10 Equipment Stat es — Figure 1 co ntains a diagram of SE MI E10 equip ment states usi ng the Harel notation. SEM I E10 divi des total t ime into six basic states: PRODUCTIVE, …

SEMI E58-0703 © SEMI 1997, 2003

1.7.6.1 The columns labeled Req/Ind and Rsp/Conf

link the parameters to the direction of the message. The

message sent by the initiator is called the “Request”.

The receiver terms this message the “Indication”. The

receiver may then send a “Response”, which the

original sender terms the “Confirmation”.

1.7.6.2 The following codes appear in the Req/Ind and

Rsp/Conf columns and are used in the definition of the

parameters (e.g., how each parameter is used in each

direction):

“M” - Mandatory parameter — Must be given a

valid value.

“C” - Conditional parameter — May be defined in

some circumstances and undefined in others.

Whether a value is given may be a completely

optional or may depend on the value of other

parameters.

“U” - User-defined parameter

“-” — The parameter is not used.

“=” — (For response only) Indicates that the value

of this parameter in the response must match that in

the primary (if defined).

7 Overview

1.8 This section provides an overview of how

ARAMS will be applied and the capabilities that

ARAMS defines.

1.9 Systems that are used to track equipment

performance should be based on SEMI E10’s

definitions of the six basic equipment states. The

tracking systems typically rely on factory personnel to

manually enter SEMI E10 state changes. Individual

factories may have further company-specific and/or

facilities-specific refinements of the states. For

example, the basic equipment state may be

“unscheduled downtime” with a refinement of “waiting

for parts”. In addition to entering a state change, the

operator (who may be the production operator, a

process engineer, an equipment engineer, or a supplier

field service engineer) may select from a pre-defined

set of behaviors (symptoms) that prompted the change

of state, such as “smoke observed”.

1.10 Specifications provided by ARAMS are intended

to support the integration of equipment systems with

factory tracking systems. For this purpose, equipment

needs to be cognizant of the ARAMS states and

substates, must know its current state, and must follow

common rules for determining if equipment-initiated

transitions can be made. In addition, the user needs to

be able to interact with the tracking system at either the

host system’s console or the equipment’s operator

console. This requires that the operator be able to enter

certain information at the equipment’s console: a new

state or substate request, and specific observed behavior

that prompted the request. The host system is then

notified that a change in state has occurred.

1.11 Integrated systems are able to provide more

accurate data for those state changes than the equipment

alone is able to detect. While the user is still required to

initiate state changes for other conditions, this can be

accomplished either directly at the equipment’s console

or remotely at the host tracking system terminal.

1.12 Exchange of information is accomplished

through standardization of the meaning and form of

data and the specification of the message services for

the exchange. ARAMS provides generic definitions for

the common substates described in SEMI E10. ARAMS

also defines two tables and the message services

required for the equipment and host to exchange tables.

The first table contains a set of ARAMS substate

definitions (an ARAMS code identifying the substate)

and a corresponding description. The second table

defines a set of symptoms with a numeric symptom

identifier and a corresponding description.

1.13 While the above discussion assumes that the

equipment is interacting with host systems, the

ARAMS state model only requires interactions with a

“user”, which might be either a local operator or a host

system.

8 State Models

1.14 This section defines the formal state model for

ARAMS, called the ARAMS State Model, which is

required for ARAMS compliance. To clarify the

relationships between this state model and the

equipment’s operations, it introduces a second state

model, called the General Equipment Operations

Model, which is used for purposes of illustration. The

General Equipment Operations Model is assumed to

exist in some form but is not required for ARAMS

compliance.

1.14.1 This document follows the convention of using

upper-case to denote the formal names of states.

Informal references may use lower case. For example,

the ARAMS states SCHEDULED DOWNTIME and

UNSCHEDULED DOWNTIME may be referred to as

downtime states.

1.14.2 Detailed requirements for equipment behavior

are provided in Section 16.

NOTE 6: Although the equipment is unable to detect a

condition of no power, it is able to detect when the

INITIALIZING state has been entered and is able to

differentiate between a hard reset (Transition 6) and a soft re-

boot (Transition 5).

SEMI E58-0703 © SEMI 1997, 2003 9

8.1 SEMI E10 Equipment States — Figure 1 contains a

diagram of SEMI E10 equipment states using the Harel

notation. SEMI E10 divides total time into six basic

states: PRODUCTIVE, ENGINEERING, STANDBY,

SCHEDULED DOWNTIME, UNSCHEDULED

DOWNTIME, and NON-SCHEDULED TIME. These

six states are shown in Figure 1 with solid lines.

1.14.3 OPERATIONS TIME, UPTIME,

DOWNTIME, and MANUFACTURING TIME are

derived by grouping states defined in SEMI E10 and

are useful for classification purposes, but formally they

are not considered as SEMI E10 equipment states. Time

in these groupings can be derived by summing the time

in their corresponding states, based on Figure 1.

NOTE 7: Figure 1 uses shadings to show derived states. It is

not intended as a formal state model.

1.14.4 MANUFACTURING TIME includes time

spent in PRODUCTIVE and STANDBY. UPTIME

includes the time spent in MANUFACTURING TIME

and ENGINEERING. DOWNTIME includes the time

spent in SCHEDULED DOWNTIME and

UNSCHEDULED DOWNTIME.

1.14.5 In SEMI E10, precise rules governing state

transitions are not required. The ARAMS model, in

contrast, is intended to be used by automated equipment

capable of detecting internal conditions. Conditions for

each valid state transition are defined, both those

initiated by equipment and those determined by

interactions between the user and the equipment.

8.2 ARAMS State Model Definition — This section

contains the formal definition of the ARAMS State

Model, consisting of three parts:

• A diagram of the ARAMS State Model (Figure 2),

using Harel notation,

• a description of each state and the behavior of the

equipment within that state, and

• a table of transitions (Table 1) showing the

previous state before the transition, the trigger for

the transition, the new state after the transition, a

description of any actions to be taken upon entry,

and comments concerning the new state.

8.2.1 ARAMS State Model Diagram — Figure 2

contains the diagram of the ARAMS State Model.

8.2.2 Descriptions of ARAMS States — This section

provides brief descriptions of the basic states for model

completeness.

NOTE 8: These are informal descriptions included for the

completeness of the ARAMS State Model. They do not

replace the formal definitions in SEMI E10.

TOTAL TIME

OPERATIONS TIME

NON-

SCHEDULED

TIME

STANDBY

PRODUCTIVE

MANUFACTURING

TIME

UPTIME

ENGINEERING

SCHEDULED

DOWNTIME

UNSCHEDULED

DOWNTIME

Figure 1

SEMI E10 Equipment States in Harel Notation

8.2.2.1 TOTAL TIME — The TOTAL TIME state

includes 100% of real time; the sum of the time in the

six basic SEMI E10 states, including time when the

equipment is powered down. PRODUCTIVE,

STANDBY, and ENGINEERING are called uptime,

and SCHEDULED DOWNTIME and

UNSCHEDULED DOWNTIME are called downtime.

8.2.2.2 MANUFACTURING — The ARAMS State

Model includes MANUFACTURING as a user-

selectable superstate of PRODUCTIVE and STAND-

BY. When the user selects MANUFACTURING, the

equipment automatically transitions to either

PRODUCTIVE or STANDBY, depending upon its

internal status at the time.

1.14.5.1.1 Equipment is fault-free during

MANUFACTURING.

NOTE 9: MANUFACTURING is not a SEMI E10

equipment state.

8.2.2.3 PRODUCTIVE — The PRODUCTIVE state

covers the time spent by the equipment in performing

its intended function. This also includes time spent

loading and unloading product. PRODUCTIVE is an

uptime manufacturing state.

1.14.5.1.2 The equipment is in PRODUCTIVE when,

and only when, it is in MANUFACTURING, its

equipment production criteria are satisfied, and it is

busy performing its intended function.

NOTE 10: Although by definition, the equipment is only

considered to be “performing its intended function” in the

PRODUCTIVE state, equipment processing cycles may occur

in any of the basic SEMI E10 states except STANDBY.

8.2.2.4 STANDBY — The STANDBY state is an

uptime manufacturing state that covers the time the

equipment is waiting to enter the PRODUCTIVE state.

1.14.5.1.3 The equipment enters this state

automatically from the PRODUCTIVE state whenever

it is in the MANUFACTURING superstate and the

requirements for PRODUCTIVE do not apply. This

includes periods during which it detects a normal

standby condition, such as no work, no operator, etc.

During STANDBY, the equipment monitors conditions

for PRODUCTIVE. When all requirements for

PRODUCTIVE are satisfied, then it transitions

automatically to PRODUCTIVE.

8.2.2.5 ENGINEERING — The ENGINEERING state

is an uptime state that is selected by the user for process

and equipment engineering purposes, such as process

development or characterization.

1.14.5.1.4 Because the equipment may be pushed

deliberately outside of its normal operating conditions,

faults that may occur in the ENGINEERING state do

not trigger equipment-initiated transitions to

UNSCHEDULED DOWNTIME. The equipment may

also be powered off while in ENGINEERING.

8.2.2.6 UNSCHEDULED DOWNTIME — The

UNSCHEDULED DOWNTIME state is used for

unplanned downtime activities, such as maintenance,

setups, conversions, change of consumables, factory-