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SEMI E58.1-0697 © SEMI 1997, 2003 3 NOTICE: SEMI makes no warranties or representatio ns as to the suitability of th e standards set forth herein for any particular application. Th e determination of the suitability of t…

SEMI E58.1-0697 © SEMI 1997, 2003 2

5 Service Parameter Mapping

5.1 Table 2 shows the mapping between service parameters defined by ARAMS and the data items defined by

SEMI E5. An additional mapping for the ARAMSStateChange and ResetAccumulators services is shown in Table 4

below.

Table 2 Service Parameter Mapping Table

Parameter Name SECS-II Data Item

AttrData ATTRDATA

AttrName ATTRID

ColHdr COLHDR

ErrorCode ERRCODE

ErrorText ERRTEXT

ObjSpec OBJSPEC

RequestStatus HCACK

TableAck TBLACK

TableCmd TBLCMD

TableElem TBLELT

TableID TBLID

TableType TBLTYP

5.2 Table 3 shows the data items in SECS-II messages that do not have a corresponding service parameter.

Table 3 Additional Data Item Requirement Table

Function SECS-II Data Item

Used to satisfy SECS-II conventions for linking a multi block inquiry with subsequent

multilock message.

DATAID

Used by S2F41 and S2F49 to indicate the ARAMSStateChange Service. RCMD=“ARAMSStateChange”

Used by S2F41 and S2F49 to indicate the ResetAccumulators Service. RCMD=“ResetAccumulators”

NOTE: The text strings specified in Table 3 for RCMD shall be recognized by the equipment, whether the equipment is or is not case-sensitive.

5.3 Table 4 provides the parameter mapping for the ARAMSStateChange and the S2,F41 and S2,F49 messages.

Table 4 Service Parameter Mapping (S2F41 and S2F49)

Parameter Name CPNAME CPVAL/CEPVAL (Form)

ARAMSCode “ARAMSCode” Text, 4 characters

ObjSpec “ObjSpec” Text. Conforms to data item OBJSPEC.

NOTE: in S2,F49, ObjSpec maps directly

to the data item OBJSPEC.

SymptomID “SympID” Unsigned integer

SymptomText “SympText” Text, 0–80 characters

NOTE: The text strings specified in Table 4 for CPNAME shall be recognized by the equipment, whether the equipment is or is not case-

sensitive.

SEMI E58.1-0697 © SEMI 1997, 2003 3

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

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the risk of infringement of such rights, are entirely their own responsibility.

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consent of SEMI.

SEMI E81-0600

PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK DOMAIN

ARCHITECTURE

This provisional specification was technically approved by the Global Information & Control Committee and

is the direct responsibility of the North American Information & Control Committee. Current edition

approved by the North American Regional Standards Committee on March 2, 2000. Initially available at

www.semi.org April 1999; to be published June 2000. Originally published June 1999.

1 Purpose

1.1 This document is an overview of the structure and

contents of a suite of documents representing an

application framework for the Computer Integrated

Manufacturing (CIM) systems as used in semiconductor

factories. A framework is a software infrastructure that

creates a common environment for integrating appli-

cations and sharing information in a given domain. The

purpose of this framework is to establish an industry

standard architecture for complex manufacturing

systems, leading to an open, multisupplier CIM system

environment. The framework described in this

specification is called the CIM Framework.

2 Scope

2.1 The intent of this document is to describe the

Manufacturing Execution Systems (MES) domain that

is the subject of the CIM Framework and to provide a

reference for concepts that are common to the set of

documents that specify the CIM Framework. The

Provisional Specification for CIM Framework Domain

Architecture defines the structure, relationships and

interworkings of the components that together comprise

the CIM Framework. This architecture defines the

partitioning of the CIM Framework components and the

responsibilities of each of those components. It also

specifies the common abstractions for manufacturing

jobs, material, and factory resources that are used

consistently throughout the CIM Framework as

unifying themes.

2.2 The CIM Framework Domain Architecture does

not address the dependencies on computing tech-

nologies needed to implement these components. These

aspects apply more to the realization of the components

as software artifacts than to their functionality in terms

of semiconductor manufacturing concepts. The

technical aspects of the CIM Framework architecture

are captured in a separate document, SEMI E96, Guide

for CIM Framework Technical Architecture.

2.3 This specification does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this specification to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

3 Limitations

3.1 The CIM Framework Specification must continue

to evolve to meet the needs of a competitive and vital

industry. The content of this framework represents a

significant amount of real development experience from

a number of commercial software suppliers and their

customers. These specifications reflect the product

architectures of those companies, as well as the

requirements of their customers.

3.2 As a SEMI Provisional Standard, the Specification

for CIM Framework Domain Architecture has specific

deficiencies that must be addressed before it may be

upgraded to full SEMI Standard status. These

deficiencies are:

• Ensuring consistency with the details of subsequent

related specifications that are based on this domain

architecture.

• Evolving from coarse-grained component partitions

to fine-grained components that provide

substitutability of smaller components.

• Expanding interfaces to include build-time

configuration functions.

• Providing fully validated models using the standard

Unified Modeling Language (UML) notation.

• Aligning the CIM Framework representation of

equipment and interfaces for interactions with

equipment automation software with emerging

standards in areas such as Object-Based Equipment

Model (OBEM) and Automated Material Handling

Systems (AMHS).

• Modifying the CIM Framework use of the “in”

parameter mode and operation return value to

include also the “out” and “inout” modes to better

accommodate implementations based on Microsoft

DCOM and IDL enhancements for pass-by-value

of objects.