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SEMI E81-0600 © 1999, 2 000 7 define t he bus iness p rocess workflo ws, bu siness logic and user interf ace s for th e applications. T hey provide functionality that is often product- or site -specific. This functionali…

• process definitions and routings,

• equipment data sampling schemes and storage

schema,

• personnel qualifications,

• and many others.

6.3 CIM Framework Foundational Concepts

6.3.1 This section provides an explanation of the basic

concepts of framework, component, and sub-component

as used in the CIM Framework Domain Architecture.

6.3.2 Framework

6.3.2.1 A framework is a software infrastructure that

provides a common environment for the development

and integration of applications and sharing of

information in a given problem domain. The CIM

Framework is a particular type of framework based on

an object-oriented model of semiconductor wafer

manufacturing. It specifies manufacturing objects and

object interaction protocols that enable building

semiconductor CIM applications from a framework of

compatible, substitutable application components.

6.3.2.2 The heart of the framework is a set of

semiconductor manufacturing abstractions (e.g., Wafer,

Specification, Machine) and services (e.g., get wafer

location, set specification parameter, get machine

utilization) that are typically embodied in applications

(e.g., material management, specification management,

machine control). The implementations of these

abstractions are delivered on distributed computer

platforms (e.g., workstations, servers) which use

standard software system technologies (e.g.,

communications, database, and user interface). The

current CIM Framework is specifically targeted at

manufacturing information management and control for

both the planning and operational phases of

semiconductor wafer fabrication.

6.3.3 Component Architecture

6.3.3.1 The CIM Framework specifies software

functions that are common across MES applications and

serve to integrate those MES applications into a

coherent system. The CIM Framework software

architecture is based on components. Components are

software building blocks—“chunks” of functionality

that make up software applications. By specifying

standard interfaces and behavior of common MES

components, manufacturers can assemble systems from

components from multiple suppliers and they can

evolve those systems by extending the common

components and by substituting old components with

improved components that implement the same

interfaces and behavior in improved and extended

ways. The CIM Framework defines a manufacturing

execution system architecture whose components can

be assembled in many ways and driven by many

business processes and operational policies.

6.3.3.2 Figure 1 shows the CIM Framework architec-

ture as a layered system, with the CIM Framework cov-

ering the middle layer of that system. Figure 2 details

the layers, showing the components and their interact-

ion and extension. The following subsections provide

an introduction to the CIM Framework architecture.

Infrastructure

Common

Components

Application

Objects

CIM Framework

Domain Specifications

Figure 1

CIM Framework Layering

6.3.3.3 Infrastructure

6.3.3.3.1 The infrastructure provides the distributed

computing environment for the application. These

services include operating system, communications,

data storage, user interface, event distribution,

exception management, etc. The CIM Framework

assumes infrastructure services and facilities defined by

the Object Management Group®’s (OMG) Object

Management Architecture (OMA) or by the Microsoft®

DCOM and COM+ architecture and it can be mapped to

other infrastructures such as those for Java™. SEMI

E96 addresses the infrastructure layer.

6.3.3.4 Common Components

6.3.3.4.1 Common components are the functional

entities common across MES applications. For

example, material tracking, machine management, and

scheduling applications all need a common, shareable

concept of wafer groups (lots), machines, and process

recipes. The common components provide a shared

model for these entities, enabling quicker development

and integration of material tracking, machine

management, scheduling and other applications. They

specify the data and behavior of these components

required for interoperability between the applications.

6.3.3.5 Application Objects

6.3.3.5.1 The application objects provide the applica-

tion functionality beyond the common components.

These application objects provide application-specific

data and behavior (such as the specific scheduling

algorithms or the specific recipe management

functions), building on the common component data

and behavior that allows the application to interoperate

with other applications. The application objects also

define the business process workflows, business logic

and user interfaces for the applications. They provide

functionality that is often product- or site-specific. This

functionality should not be included in an industry-wide

standard for common components. Rather, it should be

accommodated through the extendibility and reuse

mechanisms of the common components.

6.3.3.6 Component Granularity and Incremental

Standard Conformance

6.3.3.6.1 The CIM Framework components are the

smallest elements of standardization of functional

interface and behavior. The CIM Framework specifies

relatively fine-grained components (in terms of their

functional scope) as in the SEMATECH CIM

Framework Specification Version 2.0 [CIMFW]. These

components are larger than objects (their specification

is in terms of an object model with typically three to

five objects) but more fine-grained than traditional

MES applications. However, the initial SEMI CIM

Framework standards also identify components that are

more coarse-grained, aligning with current MES

product boundaries. These coarse-grained components

contain fine-grained sub-components in their

specifications, as in Figure 3 (typically two to four sub-

components per coarse-grained component).

6.3.3.6.2 The coarse-grained components encapsulate

the detail of the internal objects, relationships and sub-

components by selectively exposing, hiding or

abstracting some object methods and relationships. The

coarse-grained components are specified with the detail

of the sub-component and object interfaces and

behavior, but standard conformance is in two levels;

first-level conformance is to the interfaces of the

coarse-grained components (not requiring exposure of

the encapsulated detail), and second-level conformance

is to the detail of the sub-components.

6.4 CIM Framework Functional Scope

6.4.1 The term Manufacturing Execution System

(MES) represents an abstraction for a collection of

software implementations. While there are examples of

implementations that provide significant coverage of

MES functionality, the industry trend is toward supplier

focus on areas of core competency. In many cases this

will result in a supplier offering for a subset of the MES

domain, or a partitioned offering of separable products

by a single source. Large, more monolithic

implementations are gradually evolving toward this

model of component packaging for smaller

implementations. Ideally, MES scoping should

correspond to natural boundaries that have emerged in

representative products that border the “In

MES”/“Outside MES” dividing line. It is that capability

within MES scope that will be provided by the CIM

Framework.

6.4.2 The following list identifies so me criteria that

may be used to help scope MES within the larger

context of manufacturing enterprise systems often

called Computer Integrated Manufacturing.

Object Communications (CORBA, DCOM, etc.)

Object

Events

Common Services and Facilities

(CORBAservices and CORBAfacilities or COM+ or other)

Names Persist

Transact

Distributed

Computing

Infrastructure

Common

Components

Object

Component

Object

Component

Object Object Object Object

Standard Component Interfaces

Application

Objects

Conformant Extensions

Object

Application 1 Application N

CIM

Framework

Components

. . .

• Interoperable

• Substitutable

• Extendible

•Flexible

• Reusable

Figure 2

CIM Framework Component Architecture

Object Communications (CORBA or DCOM)

Object

Sub-

Component

Object

Object Object Object Object

Object

Application 1 Application N

Component

Events Names Persist

Transact

. . .

Component

Sub-

Component

Sub-

Component

Sub-

Component

Figure 3

Components and Sub-Components

6.4.3 Thus, a component is “In MES” scope and

within the CIM Framework scope, if

• it provides a job abstraction to manage work

currently in progress across the manufacturing

facility,

• it represents the convergence of product and

process specifications, material, and manufacturing

resources through execution of production jobs,

• it provides facility level planning and scheduling of

manufacturing production activities,

• it provides access to historical data and reporting of

occurrences that changed the state of the products,

the production facility or its resources,

• it allows coordinated actions to control factory

resources,

• it allows abstraction representations of production

facilities and their resources,

• it enables automated update of manufacturing

parameters (settings) through data collection and

analysis of manufacturing processes, and

• it supports quality management through capture of

key metrics (e.g., yield, throughput, cycle-time and

utilization).

6.4.4 A component is “Outside MES” scope, thus

outside CIM Framework scope, if

• it controls or manipulates the internal state or

operation of a piece of manufacturing equipment,

• it deals with the business interactions between the

manufacturing enterprise and external enterprises

such as customers or suppliers,

• it manipulates the product or process definition

with a focus on product design rather than

execution of the manufacturing process,

• it focuses on the creation and manipulation of

what-if models of factory or product state,

• it isn’t directly concerned with transforming

material from an initial (raw or partially

completed) state to a more valuable product, and

• it is primarily used in support of laboratory analysis

that is not directly integrated into the

manufacturing process (e.g., off-line metrology).

6.4.5 Examples applying the MES definition and

scoping criteria might be derived from the following

high-level interactions.

6.4.5.1 “In MES” Scope

• A product request for production of goods (partial

or finished) is offered to one facility which

responds with a delivery commitment.