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SEMI E81-0600 © 1999, 2 000 8 Object Communica tions (CO RBA or DCOM ) Object Object Obj ect Sub- Comp onent Object Object Object Object Object Object Ob ject O bject Object App lication 1 Applicat ion N Component Compon…

define the business process workflows, business logic

and user interfaces for the applications. They provide

functionality that is often product- or site-specific. This

functionality should not be included in an industry-wide

standard for common components. Rather, it should be

accommodated through the extendibility and reuse

mechanisms of the common components.

6.3.3.6 Component Granularity and Incremental

Standard Conformance

6.3.3.6.1 The CIM Framework components are the

smallest elements of standardization of functional

interface and behavior. The CIM Framework specifies

relatively fine-grained components (in terms of their

functional scope) as in the SEMATECH CIM

Framework Specification Version 2.0 [CIMFW]. These

components are larger than objects (their specification

is in terms of an object model with typically three to

five objects) but more fine-grained than traditional

MES applications. However, the initial SEMI CIM

Framework standards also identify components that are

more coarse-grained, aligning with current MES

product boundaries. These coarse-grained components

contain fine-grained sub-components in their

specifications, as in Figure 3 (typically two to four sub-

components per coarse-grained component).

6.3.3.6.2 The coarse-grained components encapsulate

the detail of the internal objects, relationships and sub-

components by selectively exposing, hiding or

abstracting some object methods and relationships. The

coarse-grained components are specified with the detail

of the sub-component and object interfaces and

behavior, but standard conformance is in two levels;

first-level conformance is to the interfaces of the

coarse-grained components (not requiring exposure of

the encapsulated detail), and second-level conformance

is to the detail of the sub-components.

6.4 CIM Framework Functional Scope

6.4.1 The term Manufacturing Execution System

(MES) represents an abstraction for a collection of

software implementations. While there are examples of

implementations that provide significant coverage of

MES functionality, the industry trend is toward supplier

focus on areas of core competency. In many cases this

will result in a supplier offering for a subset of the MES

domain, or a partitioned offering of separable products

by a single source. Large, more monolithic

implementations are gradually evolving toward this

model of component packaging for smaller

implementations. Ideally, MES scoping should

correspond to natural boundaries that have emerged in

representative products that border the “In

MES”/“Outside MES” dividing line. It is that capability

within MES scope that will be provided by the CIM

Framework.

6.4.2 The following list identifies so me criteria that

may be used to help scope MES within the larger

context of manufacturing enterprise systems often

called Computer Integrated Manufacturing.

Object Communications (CORBA, DCOM, etc.)

Object

Events

Common Services and Facilities

(CORBAservices and CORBAfacilities or COM+ or other)

Names Persist

Transact

Distributed

Computing

Infrastructure

Common

Components

Object

Component

Object

Component

Object Object Object Object

Standard Component Interfaces

Application

Objects

Conformant Extensions

Object

Application 1 Application N

CIM

Framework

Components

. . .

• Interoperable

• Substitutable

• Extendible

•Flexible

• Reusable

Figure 2

CIM Framework Component Architecture

Object Communications (CORBA or DCOM)

Object

Sub-

Component

Object

Object Object Object Object

Object

Application 1 Application N

Component

Events Names Persist

Transact

. . .

Component

Sub-

Component

Sub-

Component

Sub-

Component

Figure 3

Components and Sub-Components

6.4.3 Thus, a component is “In MES” scope and

within the CIM Framework scope, if

• it provides a job abstraction to manage work

currently in progress across the manufacturing

facility,

• it represents the convergence of product and

process specifications, material, and manufacturing

resources through execution of production jobs,

• it provides facility level planning and scheduling of

manufacturing production activities,

• it provides access to historical data and reporting of

occurrences that changed the state of the products,

the production facility or its resources,

• it allows coordinated actions to control factory

resources,

• it allows abstraction representations of production

facilities and their resources,

• it enables automated update of manufacturing

parameters (settings) through data collection and

analysis of manufacturing processes, and

• it supports quality management through capture of

key metrics (e.g., yield, throughput, cycle-time and

utilization).

6.4.4 A component is “Outside MES” scope, thus

outside CIM Framework scope, if

• it controls or manipulates the internal state or

operation of a piece of manufacturing equipment,

• it deals with the business interactions between the

manufacturing enterprise and external enterprises

such as customers or suppliers,

• it manipulates the product or process definition

with a focus on product design rather than

execution of the manufacturing process,

• it focuses on the creation and manipulation of

what-if models of factory or product state,

• it isn’t directly concerned with transforming

material from an initial (raw or partially

completed) state to a more valuable product, and

• it is primarily used in support of laboratory analysis

that is not directly integrated into the

manufacturing process (e.g., off-line metrology).

6.4.5 Examples applying the MES definition and

scoping criteria might be derived from the following

high-level interactions.

6.4.5.1 “In MES” Scope

• A product request for production of goods (partial

or finished) is offered to one facility which

responds with a delivery commitment.

• A production job is created, along with a grouping

structure for the target product.

• A production job is split into subjobs and maybe

merged again.

• A production job is rerouted to a different resource

due to specific circumstances.

• A production job is assigned to a set of resources,

allocated required material, and dispatched for

execution.

• A change in state of product, resources or material

resulting in a change to delivery commitments is

reported.

• A change to a manufacturing process results in

alteration of the execution of a production job.

• A production job is assigned to specific set of

manufacturing machines due to their machine

resource capabilities.

• A value for a process specification is changed due

to gathered values of a influencing quality control

process.

• Material is made available for use or is moved to a

new physical location within the facility.

• Material is exchanged between different positional

containers due to e.g., contamination control

(cleaning of a positional container).

• A manufacturing machine is taken down for main-

tenance and becomes unavailable for job execution.

• A resource of a multiple resource machine is taken

down and becomes unavailable, but not the whole

machine.

6.4.5.2 “Outside MES” Scope

• A product is defined and engineered for production

 Product and Process Engineering.

• A facility is qualified to produce a given product

 Release for Production.

• An order is released for production  represented

as a demand from Order Management System.

• A consumable is running out of stock  an order is

released for delivery to the facility  Enterprise

Resource Tracking.

• The facilities (or series of facilities) capable of

producing the needed product are analyzed and the

demand is matched with available supply

(including capacity for future production) 

Enterprise Planning System.

• A piece of manufacturing equipment obtains a

recipe and enacts a manufacturing process on

material  Equipment Automation.

• Material movement equipment controls the

transport of material to a specified destination 

Equipment Automation.

• Modeling data representing a hypothetical change

in factory state is manipulated and analyzed to

determine the effects of the changes  Modeling

and Simulation.

• Material is packed for transport from the front-end

facility to the back-end facility and a carrier is noti-

fied of shipping order  Transportation Logistics.

• A customer order is divided into two product

requests involving two facilities to meet the

requested delivery date  Release for Production.

• The layout of equipment locations within the

factory is modified to accommodate a new tool 

Factory Design.

6.4.6 Multiple levels of packaging framework

functionality are supported by the specification so that a

variety of applications from multiple suppliers with

potentially intersecting capabilities can be

accommodated. This means that, given a specific

framework binding to a set of computer and software

system technologies, an application can be instantiated

and executed in this environment and will register itself

as a set of well-known objects that provide a core set of

framework specified services.

6.4.7 The CIM Framework specification defines a set

of functional components designed to work together to

form an integrated manufacturing system. The CIM

Framework components cover the functionality of

Manufacturing Execution Systems (MES). MES is a

factory-wide function that drives material processing on

equipment to produce products, and it manages all the

resources to accomplish this.

6.4.8 Figure 4 shows the functional scope of the CIM

Framework. The left-hand side represents engineering

aspects of manufacturing systems, such as configura-

tion, while the right-hand side indicates where MES

falls within manufacturing operations. The CIM Frame-

work covers operations of manufacturing execution to a

larger degree and configuration to a lesser degree.