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SEMI E81-0600 © 1999, 2 000 10 Enterprise Manu factur ing Exec ution Equi pmen t Modeling, Config uration , Simula tion, Analysis Manufact uring Opera tions Manufact uring Syst em Engineeri ng Figure 4 Boundaries o f the…
SEMI E81-0600 © 1999, 20009
• A production job is created, along with a grouping
structure for the target product.
• A production job is split into subjobs and maybe
merged again.
• A production job is rerouted to a different resource
due to specific circumstances.
• A production job is assigned to a set of resources,
allocated required material, and dispatched for
execution.
• A change in state of product, resources or material
resulting in a change to delivery commitments is
reported.
• A change to a manufacturing process results in
alteration of the execution of a production job.
• A production job is assigned to specific set of
manufacturing machines due to their machine
resource capabilities.
• A value for a process specification is changed due
to gathered values of a influencing quality control
process.
• Material is made available for use or is moved to a
new physical location within the facility.
• Material is exchanged between different positional
containers due to e.g., contamination control
(cleaning of a positional container).
• A manufacturing machine is taken down for main-
tenance and becomes unavailable for job execution.
• A resource of a multiple resource machine is taken
down and becomes unavailable, but not the whole
machine.
6.4.5.2 “Outside MES” Scope
• A product is defined and engineered for production
Product and Process Engineering.
• A facility is qualified to produce a given product
Release for Production.
• An order is released for production represented
as a demand from Order Management System.
• A consumable is running out of stock an order is
released for delivery to the facility Enterprise
Resource Tracking.
• The facilities (or series of facilities) capable of
producing the needed product are analyzed and the
demand is matched with available supply
(including capacity for future production)
Enterprise Planning System.
• A piece of manufacturing equipment obtains a
recipe and enacts a manufacturing process on
material Equipment Automation.
• Material movement equipment controls the
transport of material to a specified destination
Equipment Automation.
• Modeling data representing a hypothetical change
in factory state is manipulated and analyzed to
determine the effects of the changes Modeling
and Simulation.
• Material is packed for transport from the front-end
facility to the back-end facility and a carrier is noti-
fied of shipping order Transportation Logistics.
• A customer order is divided into two product
requests involving two facilities to meet the
requested delivery date Release for Production.
• The layout of equipment locations within the
factory is modified to accommodate a new tool
Factory Design.
6.4.6 Multiple levels of packaging framework
functionality are supported by the specification so that a
variety of applications from multiple suppliers with
potentially intersecting capabilities can be
accommodated. This means that, given a specific
framework binding to a set of computer and software
system technologies, an application can be instantiated
and executed in this environment and will register itself
as a set of well-known objects that provide a core set of
framework specified services.
6.4.7 The CIM Framework specification defines a set
of functional components designed to work together to
form an integrated manufacturing system. The CIM
Framework components cover the functionality of
Manufacturing Execution Systems (MES). MES is a
factory-wide function that drives material processing on
equipment to produce products, and it manages all the
resources to accomplish this.
6.4.8 Figure 4 shows the functional scope of the CIM
Framework. The left-hand side represents engineering
aspects of manufacturing systems, such as configura-
tion, while the right-hand side indicates where MES
falls within manufacturing operations. The CIM Frame-
work covers operations of manufacturing execution to a
larger degree and configuration to a lesser degree.
SEMI E81-0600 © 1999, 2000 10
Enterprise
Manufacturing Execution
Equipment
Modeling,
Configuration,
Simulation,
Analysis
Manufacturing
Operations
Manufacturing
System
Engineering
Figure 4
Boundaries of the CIM Framework: Manufacturing
Execution
6.4.9 The CIM Framework specifies the MES
functional responsibilities for semiconductor wafer
fabrication. It does not include responsibilities for
semiconductor packaging, assembly and test, but it was
designed to accommodate extensions into this phase of
semiconductor manufacturing.
6.4.10 Using the definition of component as found in
Section 6.3.3, the components of the CIM Framework
provide the following functionality found within MES
configuration and execution:
• Product Management: manages product material
and material groups.
• Durables Management: manages durable materials
such as reticles and material carriers.
• Consumables Management: manages consumable
materials such as gases and chemicals.
• Specification: manages product specifications and
process flows.
• Factory Operations: drives efficient use of factory
resources to manufacture products while meeting
overall factory objectives.
• Scheduling: supports factory operations and other
functions to optimize use of resources in manu-
facturing products and meeting factory objectives.
• Equipment Tracking and Maintenance: tracks
equipment state and usage and manages equipment
maintenance.
• Production Machine: manages execution of
manufacturing process steps on process and
metrology equipment.
• Recipe Management: provides factory-wide
management and use of processing recipes.
• Advanced Process Control: executes run-to-run
process control and fault detection strategies.
• Material Transport and Storage: moves and stores
material.
• Factory Labor: manages labor resources and
qualifications.
• Factory Services: provides support functions
common across components, such as access
security, document management/change control,
and history storage and retrieval.
6.4.11 Section 7 lists the functional responsibilities of
each of these components by MES configuration (called
build-time) and execution (called run-time). The
separation of the CIM Framework into components
reflects anticipated boundaries of MES products,
enabling integration of products from multiple suppliers
into a coherent, integrated MES.
Advanced
Process
Control
Production
Machine
Transport
and
Storage
Object Communications (CORBA or DCOM)
Factory
Services
Product
Management
Specification
Factory
Labor
Equipment
Tracking &
Maintenance
Factory
Operations
Planning Finance Distribution
Metrology
Equipment
Process
Equipment
Transport
Equipment
Storage
Equipment
Manufact.
System
Engineering
Process
Engineering
Device
Engineering
Manufacturing
Execution
Equipment
Enterprise
Engineering
SEMI equipment
integration standards
(SECS, GEM, ARAMS,
RMS, MMMS, etc.)
Figure 5
MES Component Integration
SEMI E81-0600 © 1999, 200011
6.4.12 As Figure 5 shows, the CIM Framework
specifies MES interfaces enabling integration between
MES components, that is integration within the MES.
The CIM Framework does not directly address
integration between the MES and external functions.
External functions, such as enterprise functions and
engineering functions, can interact with the MES using
the CIM Framework-specified intra-MES interfaces and
communications mechanisms. Interaction between MES
functions and manufacturing equipment can use
existing SEMI equipment integration standards such as
SECS II (SEMI E5), GEM (SEMI E30), ARAMS
(SEMI E58), RMS (SEMI E42), and MMMS (SEMI
E32). Equipment can also implement CIM Framework
components such as Production Machine and
Equipment Tracking and Maintenance within the
equipment, integrating with the MES (the equipment
host) through CIM Framework component interfaces.
6.4.13 The Object Management Group’s
Manufacturing Domain Task Force is adopting
standards for Enterprise, MES, Machine Control and
Engineering applications (MfgDTF). Other related
activity within the OMG includes its efforts regarding
workflow (Workflow) and component architectures.
SEMI tracks these through a liaison with the OMG.
6.4.14 The CIM Framework focuses on the common
software functions that serve to integrate MES. It
specifies components for factory resources, materials,
specifications and factory control, and it establishes a
functional and technical architecture so the components
can be assembled to meet many functional needs and
driven by company-specific business process,
workflows and operation rules. The CIM Framework
enables, but does not define, workflow and business
logic to drive component behavior, nor does it define
user interfaces (including decision support and
reporting). Workflow, business logic and user interface
are considered use-specific and thus outside an industry
consensus standard. In addition, the CIM Framework
specifies application interfaces to the MES functions,
but does not specify the implementation of those
functions.
6.4.15 What Is in the CIM Framework Specification
6.4.15.1 This section provides additional information
about the CIM Framework suite of documents. A brief
description of each document is given below.
6.4.15.2 Specification for CIM Framework Domain
Architecture (this document)
• Contains introductory information and an overview
of the CIM Framework specifications.
• Specifies the functional partitioning and functional
responsibilities of CIM Framework components.
• Specifies common architecture patterns that
functionally integrate CIM Framework
components.
• Provides graphical and textual specification
notation conventions for all CIM Framework
components.
• Provides citations for related specifications or
documents referenced within the CIM Framework.
6.4.15.3 SEMI E96, Guide for CIM Framework
Technical Architecture
• documents the CIM Framework component
interoperability architecture based on distributed
computing standards including OMG CORBA®
and Microsoft DCOM.
6.4.15.4 Additional documents detail the CIM
Framework specifications. The document structure will
reflect the functional partitioning of the domain
architecture. Except for reorganization, the details will
remain substantially the same as contained within the
CIM Framework Blue Ballots with some requested
extensions. The structure of these documents has been
influenced by SEMATECH’s CIM Framework
Specification [CIMFW]. These companion documents
represent the actual specification; whereas this
document serves primarily as their introduction.
7 Requirements
7.1 This section specifies the functional requirements
of CIM Framework components. It establishes a
functional partitioning of CIM Framework components
and it defines functional architectures for resource
tracking and maintenance and for factory control. It also
establishes the graphical and textual notations required
to specify the CIM Framework components. The list
below is a short overview of this section.
• Global and Abstract Definitions Group
• Factory Services Group
• Product Management Component
• Durables Management Component
• Consumables Management Component
• Specification Component
• Factory Operations Component
• Scheduling Component
• Equipment Tracking and Maintenance Component
• Production Machine Component
• Recipe Management Component