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SEMI E81-0600 © 1999, 2 000 14 Produc t Mana geme nt compone nt i s responsi ble f or keeping its material location c onsistent w ith Material Transpor t and Storage material locat ion informatio n. • Account for and tra…

separately implement these facilities for their own use,

they can share a common facility across components, or

use a combination of separate and shared

implementations.

7.2.8.2 Services in Factory Services Group

• Document management and version management:

functions common to creating, storing, retrieving,

and changing (under change control and version

management) documents such as process recipes,

process flow specifications, and maintenance

specifications.

• Event broker: support for components to publish,

subscribe to and filter events.

• Access security control: support for components to

limit access of system functions to authorized users

and applications.

• Component management: functions for CIM

Framework component registration, start-up,

shutdown, etc.

• History: supports the ability of factory objects to

configure and maintain histories (time-based

sequences of data and events) and to support access

to those histories.

• Data collection: the functions common to data

collectors, including equipment, sensors, and

manual data entry.

7.2.9 Responsibilities of Product Management

Component

7.2.9.1 The Product Management component captures

the state of all product material (work in progress). For

wafer fabrication, this includes wafer and die-level

tracking to support multiple products on a single wafer

and to track known-good-die through wafer probe. The

component also tracks engineering wafers and test

wafers, even though they may not become “product.”

The component implements the common material

architecture functions so product material can be

identified, grouped (product groups, lots, process

groups, transport groups), moved and located in the

factory.

7.2.9.2 Build-time Responsibilities of Product

Management Component

• Configure inventory regions.

• Configure product tracking histories, including

what data to store and data archival mechanisms.

7.2.9.3 Run-time Responsibilities of P roduct

Management Component

• Record and support access to current and historical

product information, including:

• Where material is (and has been) in its process

flow.

NOTE 2: The decision to advance material along its

process flow is in the Factory Operations component.

• Product state (processing, on hold, scrapped,

etc.).

• Material type (product, engineering, filler, etc.).

• User-defined product information.

• Genealogy, batching, allocation to product

requests, the number of times reworked, etc.

• Historical information on what equipment

processed the material, when, with what

process flow specification, recipe and durables,

and by what operator.

• Relations and history to related information in

other components, including material location,

material container, process flow specification,

inventory region, process run data, recipe, etc.

• Notify other components of material information

changes.

• Support creation, maintenance and historical

recording of product groups and relationships

among product groups (such as lots, transport

groups and process batches) including splits and

joins (and resulting product genealogy),

experiments (planned future splits and processing

changes), hold, rework, etc.

NOTE 3: The decision to split, join, batch, move,

rework, etc. is a responsibility outside of the Product

Management component. Product Management records

the results of the decisions.

• Record and support access to material location at

multiple levels of detail: an area, a specific

machine, a specific load port on a machine, a

specific zone in a stocker, a specific wafer slot in a

carrier, or a specific wafer coordinate of a die.

• Including reference to material containers

(cassettes, pods, etc.) holding the product (the

containers are managed by the Durables

Management component).

NOTE 4: Material location is served by the Product

Management component and the Material Transport

and Storage component. The Material Transport and

Storage component is responsible for physically

moving material and recording its location, and the

Product Management component is responsible for

keeping its material location consistent with Material

Transport and Storage material location information.

• Account for and track material loss.

• Support inventory regions: monitor, report and

capture history of material movement through

physical and logical regions of the factory.

7.2.10 Responsibilities of Durables Management

Component

7.2.10.1 The Durables Management component

manages the durable resources used in wafer

manufacturing, including material containers (cassettes,

SMIF pods, etc.), reticles, fixtures, test probes, etc. The

component implements the generic resource tracking

and maintenance architecture specialized for durables.

The component also implements the common material

architecture behavior so durables can be identified,

grouped and located in the factory.

7.2.10.2 Build-time Responsibilities of Durables

Management Component

• Define the specific durables in the factory (the

inventory of carriers, reticles, etc.).

• Define inventory regions that track the use and

movement of various durable types in a factory (for

example, the reticles assigned to and existing in a

lithography bay).

• Define relationships between durables and the

process steps that use them.

• Define maintenance tasks for durables and what

triggers them.

7.2.10.3 Run-time Responsibilities of Durables

Management Component

• Track durable attributes (location, usage,

contamination exposure, etc.) and state (available,

not available, in use, etc.).

• Maintain relations between durables and other CIM

Framework objects (such as product material

contained in a wafer carrier, the reticles in a reticle

carrier, the process step a reticle is used for, etc.).

NOTE 5: The Material Transport and Storage component

has some responsibility for managing material

containers, such as to move and allocate empty pods, gas

purge and clean pods, etc.

• Maintain, report and record history of durable

attributes, state and relations.

• Support assignment of durables to factory jobs (e.g.

supporting the scheduling of a reticle for use in a

production machine job) and monitor and record

job progress (from the perspective of the durable’s

role).

• Monitor durable maintenance triggers (such as

excessive exposure to contaminants) and

recommend durable maintenance jobs.

• Execute triggered durable maintenance jobs.

• Change durable capabilities.

• Execute durable maintenance jobs (pod

cleaning, reticle inspection and repair, etc.) and

report job progress.

• Record durable maintenance triggers and job

results in resource maintenance histories.

• Collect and report durable utilization and

effectiveness measures.

7.2.11 Responsibilities of Consumables Management

Component

7.2.11.1 The Consumables Management component

manages consumable materials, including gases,

chemicals, etc. The component implements the generic

resource tracking and maintenance architecture to track

consumable usage and quality (e.g., expired resist) and

to enable maintenance based on replenishment levels

and quality expiration. The component also implements

the common material architecture behavior so

consumables can be identified, grouped and located in

the factory.

7.2.11.2 Build-time Responsibilities of Consumables

Management Component

• Define the specific consumables in the factory (the

types of gases, chemicals, etc.).

• Define inventory regions that track the use and

movement of consumable types in a factory (for

example, the equipment fed by a common gas

bottle and feeders).

• Define relationships between consumable types

and the process steps that use them.

• Define maintenance tasks and triggers for testing

the quality of and replacing consumables.

7.2.11.3 Run-time Responsibilities of Consumables

Management Component

• Track consumable attributes and state (supplier’s

lot number, quantity available, usage rate,

expiration date, etc.).

• Maintain relations between consumables and other

CIM Framework objects (the product groups a

particular consumable was used on, the equipment

fed by a common gas bottle, etc.).

• Maintain, report and record history of consumable

attributes, state and relations.

• Support assignment of consumables to factory jobs

(e.g., the scheduling of a gas feed pressure for use

in a production machine job) and monitor and

record job progress (from the perspective of the

consumable’s role).

• Monitor consumable maintenance triggers (quality

checks and replenishment levels) and recommend

consumable maintenance jobs.

• Execute triggered consumable maintenance jobs.

• Change consumable capabilities.

• Execute consumable maintenance jobs and report

job progress.

• Record consumable maintenance triggers and job

results in resource maintenance histories.

• Collect and report consumable utilization and

effectiveness measures.

7.2.12 Responsibilities of Specification Component

7.2.12.1 The Specification component supports

definition and use of process specifications, product

specifications and bill of materials. Process

specifications define process flows (the process steps to

manufacture a product, along with supporting material

movement, advance process control, equipment

maintenance and other tasks). Product specifications

relate product types to the process flows to build them.

7.2.12.2 The CIM Framework does not specify a fully-

detailed representation of process flows. At run-time, it

views a specification as a current operation (the Process

Flow Context) and a view of potential next steps (the

Process Flow Iterator). Although a complete MES

solution must build and provide process flow details,

the CIM Framework standard does not require this

detail for component integration.

7.2.12.3 Recipes, process capabilities, maintenance

specifications, document management and version

control services are the responsibilities of other

components. The Specification component references

and uses these services.

7.2.12.4 Build-time Responsibilities of Specification

Component

• Build process operation specifications.

• Specify a processing step as a relationship

between a combination of recipes, data collect-

ion plans, advanced process control strategies,

process capabilities, processing constraints

(timing dependencies, contamination con-

straints, qualified machines, etc.), operator

qualifications, durables, consumables and other

elements.

NOTE 6: At run-time, a process operation

specification is fully bound to create a process

operation (a specific machine is selected, recipe

parameters are set, specific support resources are

named, etc.).

• Build manufacturing process flows.

• Specify a process flow as a combination of

material processing steps, material movement

tasks, equipment qualification and maintenance

tasks and other tasks.

NOTE 7: Process flows are primarily a combination

process operation specifications, but the process flow

should allow inclusion of explicit steps for material

movement, metrology, equipment calibration, etc.

• Define process flow traversal logic (rework

decisions, metrology sampling decisions,

alternate path decisions, parallel assembly

routes, etc.).

• preconditions for beginning a step.

• postconditions for completing a step.

• logic to enable selecting appropriate next

steps.

• Support recursive (nested) composition of

simple process flows (partial flows or mini-

flows) into complex process flows.

• Support a library of configurable, reusable process

operation specifications and process flows.

• Build product specifications.

• The process flow to build the product.

• Product-specific run-time parameters.

• Reticle and other required resources.

• Quality/metrology sampling plans.

• Required manufacturing technologies.

NOTE 8: This is not a full product specification.

It is only those elements needed to select and

initialize the manufacturing process.

• Define and maintain relationships between process

flow specifications and product specifications

which use them.

• Use document and version management for

specification change control.