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SEMI E81-0600 © 1999, 2 000 15 • Maintain, report and record history of consum able attributes, state and relations. • Support as signment of cons umables to factory j obs (e.g., the sch ed uling of a gas feed pres sure …

Product Management component is responsible for

keeping its material location consistent with Material

Transport and Storage material location information.

• Account for and track material loss.

• Support inventory regions: monitor, report and

capture history of material movement through

physical and logical regions of the factory.

7.2.10 Responsibilities of Durables Management

Component

7.2.10.1 The Durables Management component

manages the durable resources used in wafer

manufacturing, including material containers (cassettes,

SMIF pods, etc.), reticles, fixtures, test probes, etc. The

component implements the generic resource tracking

and maintenance architecture specialized for durables.

The component also implements the common material

architecture behavior so durables can be identified,

grouped and located in the factory.

7.2.10.2 Build-time Responsibilities of Durables

Management Component

• Define the specific durables in the factory (the

inventory of carriers, reticles, etc.).

• Define inventory regions that track the use and

movement of various durable types in a factory (for

example, the reticles assigned to and existing in a

lithography bay).

• Define relationships between durables and the

process steps that use them.

• Define maintenance tasks for durables and what

triggers them.

7.2.10.3 Run-time Responsibilities of Durables

Management Component

• Track durable attributes (location, usage,

contamination exposure, etc.) and state (available,

not available, in use, etc.).

• Maintain relations between durables and other CIM

Framework objects (such as product material

contained in a wafer carrier, the reticles in a reticle

carrier, the process step a reticle is used for, etc.).

NOTE 5: The Material Transport and Storage component

has some responsibility for managing material

containers, such as to move and allocate empty pods, gas

purge and clean pods, etc.

• Maintain, report and record history of durable

attributes, state and relations.

• Support assignment of durables to factory jobs (e.g.

supporting the scheduling of a reticle for use in a

production machine job) and monitor and record

job progress (from the perspective of the durable’s

role).

• Monitor durable maintenance triggers (such as

excessive exposure to contaminants) and

recommend durable maintenance jobs.

• Execute triggered durable maintenance jobs.

• Change durable capabilities.

• Execute durable maintenance jobs (pod

cleaning, reticle inspection and repair, etc.) and

report job progress.

• Record durable maintenance triggers and job

results in resource maintenance histories.

• Collect and report durable utilization and

effectiveness measures.

7.2.11 Responsibilities of Consumables Management

Component

7.2.11.1 The Consumables Management component

manages consumable materials, including gases,

chemicals, etc. The component implements the generic

resource tracking and maintenance architecture to track

consumable usage and quality (e.g., expired resist) and

to enable maintenance based on replenishment levels

and quality expiration. The component also implements

the common material architecture behavior so

consumables can be identified, grouped and located in

the factory.

7.2.11.2 Build-time Responsibilities of Consumables

Management Component

• Define the specific consumables in the factory (the

types of gases, chemicals, etc.).

• Define inventory regions that track the use and

movement of consumable types in a factory (for

example, the equipment fed by a common gas

bottle and feeders).

• Define relationships between consumable types

and the process steps that use them.

• Define maintenance tasks and triggers for testing

the quality of and replacing consumables.

7.2.11.3 Run-time Responsibilities of Consumables

Management Component

• Track consumable attributes and state (supplier’s

lot number, quantity available, usage rate,

expiration date, etc.).

• Maintain relations between consumables and other

CIM Framework objects (the product groups a

particular consumable was used on, the equipment

fed by a common gas bottle, etc.).

• Maintain, report and record history of consumable

attributes, state and relations.

• Support assignment of consumables to factory jobs

(e.g., the scheduling of a gas feed pressure for use

in a production machine job) and monitor and

record job progress (from the perspective of the

consumable’s role).

• Monitor consumable maintenance triggers (quality

checks and replenishment levels) and recommend

consumable maintenance jobs.

• Execute triggered consumable maintenance jobs.

• Change consumable capabilities.

• Execute consumable maintenance jobs and report

job progress.

• Record consumable maintenance triggers and job

results in resource maintenance histories.

• Collect and report consumable utilization and

effectiveness measures.

7.2.12 Responsibilities of Specification Component

7.2.12.1 The Specification component supports

definition and use of process specifications, product

specifications and bill of materials. Process

specifications define process flows (the process steps to

manufacture a product, along with supporting material

movement, advance process control, equipment

maintenance and other tasks). Product specifications

relate product types to the process flows to build them.

7.2.12.2 The CIM Framework does not specify a fully-

detailed representation of process flows. At run-time, it

views a specification as a current operation (the Process

Flow Context) and a view of potential next steps (the

Process Flow Iterator). Although a complete MES

solution must build and provide process flow details,

the CIM Framework standard does not require this

detail for component integration.

7.2.12.3 Recipes, process capabilities, maintenance

specifications, document management and version

control services are the responsibilities of other

components. The Specification component references

and uses these services.

7.2.12.4 Build-time Responsibilities of Specification

Component

• Build process operation specifications.

• Specify a processing step as a relationship

between a combination of recipes, data collect-

ion plans, advanced process control strategies,

process capabilities, processing constraints

(timing dependencies, contamination con-

straints, qualified machines, etc.), operator

qualifications, durables, consumables and other

elements.

NOTE 6: At run-time, a process operation

specification is fully bound to create a process

operation (a specific machine is selected, recipe

parameters are set, specific support resources are

named, etc.).

• Build manufacturing process flows.

• Specify a process flow as a combination of

material processing steps, material movement

tasks, equipment qualification and maintenance

tasks and other tasks.

NOTE 7: Process flows are primarily a combination

process operation specifications, but the process flow

should allow inclusion of explicit steps for material

movement, metrology, equipment calibration, etc.

• Define process flow traversal logic (rework

decisions, metrology sampling decisions,

alternate path decisions, parallel assembly

routes, etc.).

• preconditions for beginning a step.

• postconditions for completing a step.

• logic to enable selecting appropriate next

steps.

• Support recursive (nested) composition of

simple process flows (partial flows or mini-

flows) into complex process flows.

• Support a library of configurable, reusable process

operation specifications and process flows.

• Build product specifications.

• The process flow to build the product.

• Product-specific run-time parameters.

• Reticle and other required resources.

• Quality/metrology sampling plans.

• Required manufacturing technologies.

NOTE 8: This is not a full product specification.

It is only those elements needed to select and

initialize the manufacturing process.

• Define and maintain relationships between process

flow specifications and product specifications

which use them.

• Use document and version management for

specification change control.

7.2.12.5 Run-time Responsibilities of Specification

Component

• Create a fully-bound process operation from a

process operation specification.

• Create a Process Flow Context (PFC) from a

product specification (create the initial process

flow for a product).

NOTE 9: The PFC is the “pointer” marking the

current step in a process flow.

• Transition the PFC from the current process

operation to the next process operation in the flow

(move along the process flow).

NOTE 10: The decision to move is the responsibility of

other components. The Specification component records

the decision.

• Create a PFC from an existing PFC (for example,

to support splitting of a product group).

• Create a Process Flow Iterator (PFI) from a product

specification (create an initial process flow iterator

for a product).

NOTE 11: The PFI is a process flow navigation aid to

look ahead or look behind at steps in a process flow

without actually incrementing the PFC. This allows

scheduling and other functions to determine what steps

are possible and to use processing history in determining

what steps to take next.

• Create a PFI from an existing PFI (for example, to

support evaluating among alternatives).

• Use the PFI to traverse forward and backward

through a process flow.

• Using the results of executing process flow

traversal logic (the factory job control or

process job control does the actual execution of

traversal logic to decide among alternate paths).

• Provide query support for the contents and

relationships of process operation specifications

and process operations.

• Maintain relationships of active process flows to

the factory jobs, production machine jobs, and

transport jobs that are implementing the process

flow.

• Maintain relationships of active process flows

(process flow contexts) to product groups (e.g.

process groups, transport groups, etc.) and product

group histories for recording the results of

executing process flow steps.

• Maintain relationships of process flow

specifications to process capabilities and process

resources.

• Support effectivity changes to process flows and

process operation specifications (if the process

flow version changes for the current product group

on the flow, be responsive to those changes).

7.2.13 Responsibilities of Factory Operations

Component

7.2.13.1 The Factory Operations component provides

support for maximizing factory effectiveness through

efficient use of factory resources to satisfy product

demand and planned objectives. Examples of overall

factory effectiveness measures are on-time delivery,

profit margin, profit rate, cost per wafer, yield, overall

equipment effectiveness, cycle time, etc. The Factory

Operations component also provides the interface to the

enterprise planning systems to commit the factory to

fulfill product requests and to communicate factory

capacity and production capability to enterprise

planning. The product requests also provide a

placeholder for order information (such as quantity, due

date, priority, etc.) and are part of the link to material

tracking at the enterprise level. Given the factory-wide

scope of Factory Operations, this component owns the

overall factory resource model of machines, areas,

inventory regions, etc.

7.2.13.2 Factory Operations may not have exclusive

responsibility for maximizing all factory objectives.

The Production Machine component maximizes the use

of process resources (chambers, internal storage,

production batching, etc.), the Material Transport and

Storage component maximizes the use of transport and

storage resources (transport vehicles, transport paths,

storage locations, etc.), the Equipment Tracking and

Maintenance component maximizes equipment

availability and capability, etc. The business logic and

decision-making methods may be distributed to

improve overall enterprise effectiveness (Enterprise

functions), overall factory effectiveness (Factory

Operations functions) and overall equipment

effectiveness (Production Machine, Material Transport

and Storage and other functions). The CIM Framework

provides flexibility, enabling the spectrum from

centralized, enterprise-wide or factory-wide operations

to distributed, resource-focused operations with

coordination to achieve factory-wide effectiveness. The

CIM Framework Job Architecture is critical to enabling

this flexibility (see Section 7.3.4).

7.2.13.3 Build-time Responsibilities of Factory

Operations Component

• Define the factory model of resources (machines,

people, durables, etc.), areas (bays, lines, cells,