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SEMI E81-0600 © 1999, 2 000 16 7.2.12.5 Run-time Responsibilities o f Sp e c i fication Component • Create a fully -bound proces s operation from a process operation s pecification. • Create a Process Flow Co ntext (PFC)…

• Maintain, report and record history of consumable

attributes, state and relations.

• Support assignment of consumables to factory jobs

(e.g., the scheduling of a gas feed pressure for use

in a production machine job) and monitor and

record job progress (from the perspective of the

consumable’s role).

• Monitor consumable maintenance triggers (quality

checks and replenishment levels) and recommend

consumable maintenance jobs.

• Execute triggered consumable maintenance jobs.

• Change consumable capabilities.

• Execute consumable maintenance jobs and report

job progress.

• Record consumable maintenance triggers and job

results in resource maintenance histories.

• Collect and report consumable utilization and

effectiveness measures.

7.2.12 Responsibilities of Specification Component

7.2.12.1 The Specification component supports

definition and use of process specifications, product

specifications and bill of materials. Process

specifications define process flows (the process steps to

manufacture a product, along with supporting material

movement, advance process control, equipment

maintenance and other tasks). Product specifications

relate product types to the process flows to build them.

7.2.12.2 The CIM Framework does not specify a fully-

detailed representation of process flows. At run-time, it

views a specification as a current operation (the Process

Flow Context) and a view of potential next steps (the

Process Flow Iterator). Although a complete MES

solution must build and provide process flow details,

the CIM Framework standard does not require this

detail for component integration.

7.2.12.3 Recipes, process capabilities, maintenance

specifications, document management and version

control services are the responsibilities of other

components. The Specification component references

and uses these services.

7.2.12.4 Build-time Responsibilities of Specification

Component

• Build process operation specifications.

• Specify a processing step as a relationship

between a combination of recipes, data collect-

ion plans, advanced process control strategies,

process capabilities, processing constraints

(timing dependencies, contamination con-

straints, qualified machines, etc.), operator

qualifications, durables, consumables and other

elements.

NOTE 6: At run-time, a process operation

specification is fully bound to create a process

operation (a specific machine is selected, recipe

parameters are set, specific support resources are

named, etc.).

• Build manufacturing process flows.

• Specify a process flow as a combination of

material processing steps, material movement

tasks, equipment qualification and maintenance

tasks and other tasks.

NOTE 7: Process flows are primarily a combination

process operation specifications, but the process flow

should allow inclusion of explicit steps for material

movement, metrology, equipment calibration, etc.

• Define process flow traversal logic (rework

decisions, metrology sampling decisions,

alternate path decisions, parallel assembly

routes, etc.).

• preconditions for beginning a step.

• postconditions for completing a step.

• logic to enable selecting appropriate next

steps.

• Support recursive (nested) composition of

simple process flows (partial flows or mini-

flows) into complex process flows.

• Support a library of configurable, reusable process

operation specifications and process flows.

• Build product specifications.

• The process flow to build the product.

• Product-specific run-time parameters.

• Reticle and other required resources.

• Quality/metrology sampling plans.

• Required manufacturing technologies.

NOTE 8: This is not a full product specification.

It is only those elements needed to select and

initialize the manufacturing process.

• Define and maintain relationships between process

flow specifications and product specifications

which use them.

• Use document and version management for

specification change control.

7.2.12.5 Run-time Responsibilities of Specification

Component

• Create a fully-bound process operation from a

process operation specification.

• Create a Process Flow Context (PFC) from a

product specification (create the initial process

flow for a product).

NOTE 9: The PFC is the “pointer” marking the

current step in a process flow.

• Transition the PFC from the current process

operation to the next process operation in the flow

(move along the process flow).

NOTE 10: The decision to move is the responsibility of

other components. The Specification component records

the decision.

• Create a PFC from an existing PFC (for example,

to support splitting of a product group).

• Create a Process Flow Iterator (PFI) from a product

specification (create an initial process flow iterator

for a product).

NOTE 11: The PFI is a process flow navigation aid to

look ahead or look behind at steps in a process flow

without actually incrementing the PFC. This allows

scheduling and other functions to determine what steps

are possible and to use processing history in determining

what steps to take next.

• Create a PFI from an existing PFI (for example, to

support evaluating among alternatives).

• Use the PFI to traverse forward and backward

through a process flow.

• Using the results of executing process flow

traversal logic (the factory job control or

process job control does the actual execution of

traversal logic to decide among alternate paths).

• Provide query support for the contents and

relationships of process operation specifications

and process operations.

• Maintain relationships of active process flows to

the factory jobs, production machine jobs, and

transport jobs that are implementing the process

flow.

• Maintain relationships of active process flows

(process flow contexts) to product groups (e.g.

process groups, transport groups, etc.) and product

group histories for recording the results of

executing process flow steps.

• Maintain relationships of process flow

specifications to process capabilities and process

resources.

• Support effectivity changes to process flows and

process operation specifications (if the process

flow version changes for the current product group

on the flow, be responsive to those changes).

7.2.13 Responsibilities of Factory Operations

Component

7.2.13.1 The Factory Operations component provides

support for maximizing factory effectiveness through

efficient use of factory resources to satisfy product

demand and planned objectives. Examples of overall

factory effectiveness measures are on-time delivery,

profit margin, profit rate, cost per wafer, yield, overall

equipment effectiveness, cycle time, etc. The Factory

Operations component also provides the interface to the

enterprise planning systems to commit the factory to

fulfill product requests and to communicate factory

capacity and production capability to enterprise

planning. The product requests also provide a

placeholder for order information (such as quantity, due

date, priority, etc.) and are part of the link to material

tracking at the enterprise level. Given the factory-wide

scope of Factory Operations, this component owns the

overall factory resource model of machines, areas,

inventory regions, etc.

7.2.13.2 Factory Operations may not have exclusive

responsibility for maximizing all factory objectives.

The Production Machine component maximizes the use

of process resources (chambers, internal storage,

production batching, etc.), the Material Transport and

Storage component maximizes the use of transport and

storage resources (transport vehicles, transport paths,

storage locations, etc.), the Equipment Tracking and

Maintenance component maximizes equipment

availability and capability, etc. The business logic and

decision-making methods may be distributed to

improve overall enterprise effectiveness (Enterprise

functions), overall factory effectiveness (Factory

Operations functions) and overall equipment

effectiveness (Production Machine, Material Transport

and Storage and other functions). The CIM Framework

provides flexibility, enabling the spectrum from

centralized, enterprise-wide or factory-wide operations

to distributed, resource-focused operations with

coordination to achieve factory-wide effectiveness. The

CIM Framework Job Architecture is critical to enabling

this flexibility (see Section 7.3.4).

7.2.13.3 Build-time Responsibilities of Factory

Operations Component

• Define the factory model of resources (machines,

people, durables, etc.), areas (bays, lines, cells,

etc.), and inventory regions (see Section 7.3.3 for a

description of the factory model of resources).

• Define the (initial or nominal) capabilities of the

factory and area resources, including factory

capacity, area capacity and process capability

(detailed capabilities of the machines, people, etc.

are the responsibility of other components).

7.2.13.4 Run-time Responsibilities of Factory

Operations Component

• Dynamically receive product requests (from the

enterprise or internally) and map them to product

work-in-progress and planned material release (lot

starts).

• Associate material to a process flow (in the

Specification component) for the product.

• Consolidate product demand in the factory.

• Request Factory Jobs or modify existing

Factory Jobs to drive material through its

process flows, in response to product requests.

• New Factory Jobs for new material release,

• Modify existing Factory Jobs (and

associated material model and assigned

process flow) for assigning new or modified

product requests to material in process.

• Set or modify product material quantity and due

date(s) and other scheduling support

information (such as priority and planned profit

margin).

• Execute Factory Jobs to drive material through its

process flow, using scheduling and dispatching

services of the Scheduling component and

requesting work from Production Machine,

Material Transport and Storage, Equipment

Tracking and Maintenance, and Factory Labor

components.

• Based on factory state (material process state,

material due date and priority, material

location, equipment state, equipment process

capability, operator availability and

qualification, etc.) and where the material is in

its process flow, request and track Production

machine jobs, transport jobs, maintenance jobs

and other jobs that implement and enable the

process steps in the process flow.

• Based on success, failure or partial failure of

production machine jobs and transport jobs, and

based on metrology results and other

information, determine the next activities for

material and factory resources. This may

include splitting or joining product groups,

scrapping material, downgrading or changing

the product type of material, and other actions

responsive to job performance and resource

availability. Once split, scrap and other

decisions are made, Factory Operations may

use scheduling utilities to select the next

activities for the material and resources.

• Record and report factory job status and decisions

in factory job histories.

• Report status and progress on enterprise product

requests.

• Manage assignment of human resources to other

factory resources.

7.2.14 Responsibilities of Scheduling Component

7.2.14.1 The Scheduling component supports Factory

Operations, Material Movement, Production Machine

and other components by ordering, in time, jobs that

process material on equipment, move material, maintain

equipment, etc. The scheduler uses knowledge of

product demand, equipment and material state, process

flows, throughput bottlenecks, operational policy and

constraints, and other information to recommend jobs

that maximize effective utilization of factory resources

to satisfy product demand and planned objectives.

7.2.14.2 The CIM Framework specifies a dispatching

function to support Factory Operations. Dispatching

provides an answer to questions of the form, “What is

next for this material or resource?” The answer may be

based on any number of current or future constraints

and objectives, but the dispatcher does not typically

define a sequence of jobs projected into the future.

Scheduling functions in the Scheduling component

provide this future job sequencing function. Separate

scheduler and dispatcher utilities can also provide

resource-focused utilities, such as scheduling of process

resources within a production machine or scheduling of

material transport and storage resources and internal

material movements within the factory-wide material

transport and storage system.

7.2.14.3 Build-time Responsibilities of Scheduling

Component

• Configure scheduling and dispatching decision

mechanisms (for example, define scheduling goals

and constraints, rules for resolving conflicting

constraints, etc.).

7.2.14.4 Run-time Responsibilities of Scheduling

Component

• Monitor resource and material state and apply

scheduling and dispatching decision mechanisms to